2/2/2012	11:08:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:08:28 AM	Recipe started at 11:08 AM
2/2/2012	11:08:28 AM	Helium valve closed
2/2/2012	11:08:28 AM	H2 valve closed
2/2/2012	11:08:28 AM	BCl3 valve closed
2/2/2012	11:08:28 AM	PH3 valve closed
2/2/2012	11:08:28 AM	SiCl4 pre valve closed
2/2/2012	11:08:28 AM	SiCl4 post valve closed
2/2/2012	11:08:28 AM	Main Vac valve closed
2/2/2012	11:08:28 AM	Bypass valve closed
2/2/2012	11:08:28 AM	Bubbler valve closed
2/2/2012	11:08:28 AM	Helium MFC set to  0.000000
2/2/2012	11:08:28 AM	H2 MFC set to  0.000000
2/2/2012	11:08:28 AM	BCl3 MFC set to  0.000000
2/2/2012	11:08:28 AM	PH3 MFC set to  0.000000
2/2/2012	11:08:28 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:08:28 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:08:28 AM	Tube furnace set to 0
2/2/2012	11:08:31 AM	H2 valve closed
2/2/2012	11:08:31 AM	BCl3 valve closed
2/2/2012	11:08:31 AM	PH3 valve closed
2/2/2012	11:08:31 AM	SiCl4 pre valve closed
2/2/2012	11:08:31 AM	SiCl4 post valve closed
2/2/2012	11:08:31 AM	Main Vac valve closed
2/2/2012	11:08:31 AM	Bypass valve closed
2/2/2012	11:08:31 AM	Bubbler valve closed
2/2/2012	11:08:31 AM	Helium valve opened
2/2/2012	11:08:31 AM	Helium MFC set to  500.000000
2/2/2012	11:08:31 AM	H2 MFC set to  0.000000
2/2/2012	11:08:31 AM	BCl3 MFC set to  0.000000
2/2/2012	11:08:31 AM	PH3 MFC set to  0.000000
2/2/2012	11:08:31 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:08:31 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:08:31 AM	Tube furnace set to 0
2/2/2012	11:09:36 AM	Helium valve closed
2/2/2012	11:09:36 AM	H2 valve closed
2/2/2012	11:09:36 AM	BCl3 valve closed
2/2/2012	11:09:36 AM	PH3 valve closed
2/2/2012	11:09:36 AM	SiCl4 pre valve closed
2/2/2012	11:09:36 AM	SiCl4 post valve closed
2/2/2012	11:09:36 AM	Main Vac valve closed
2/2/2012	11:09:36 AM	Bypass valve closed
2/2/2012	11:09:36 AM	Bubbler valve closed
2/2/2012	11:09:36 AM	Helium MFC set to  0.000000
2/2/2012	11:09:36 AM	H2 MFC set to  0.000000
2/2/2012	11:09:36 AM	BCl3 MFC set to  0.000000
2/2/2012	11:09:36 AM	PH3 MFC set to  0.000000
2/2/2012	11:09:36 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:09:36 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:09:36 AM	Tube furnace set to 0
2/2/2012	11:09:37 AM	Run finished at 11:09 AM
2/2/2012	11:09:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:14:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:14:49 AM	Recipe started at 11:14 AM
2/2/2012	11:14:49 AM	Helium valve closed
2/2/2012	11:14:49 AM	H2 valve closed
2/2/2012	11:14:49 AM	BCl3 valve closed
2/2/2012	11:14:49 AM	PH3 valve closed
2/2/2012	11:14:49 AM	SiCl4 pre valve closed
2/2/2012	11:14:49 AM	SiCl4 post valve closed
2/2/2012	11:14:49 AM	Main Vac valve closed
2/2/2012	11:14:49 AM	Bubbler valve closed
2/2/2012	11:14:49 AM	Bypass valve opened
2/2/2012	11:14:49 AM	Helium MFC set to  0.000000
2/2/2012	11:14:49 AM	H2 MFC set to  0.000000
2/2/2012	11:14:49 AM	BCl3 MFC set to  0.000000
2/2/2012	11:14:49 AM	PH3 MFC set to  0.000000
2/2/2012	11:14:49 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:14:49 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:14:49 AM	Tube furnace set to 0
2/2/2012	11:15:15 AM	Run aborted at 11:15 AM
2/2/2012	11:15:15 AM	Helium valve closed
2/2/2012	11:15:15 AM	H2 valve closed
2/2/2012	11:15:15 AM	BCl3 valve closed
2/2/2012	11:15:15 AM	PH3 valve closed
2/2/2012	11:15:15 AM	SiCl4 pre valve closed
2/2/2012	11:15:15 AM	SiCl4 post valve closed
2/2/2012	11:15:15 AM	Bypass valve closed
2/2/2012	11:15:15 AM	Main Vac valve closed
2/2/2012	11:15:15 AM	Bubbler valve closed
2/2/2012	11:15:15 AM	Helium MFC set to  0.000000
2/2/2012	11:15:15 AM	H2 MFC set to  0.000000
2/2/2012	11:15:15 AM	BCl3 MFC set to  0.000000
2/2/2012	11:15:15 AM	PH3 MFC set to  0.000000
2/2/2012	11:15:15 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:15:16 AM	Tube furnace set to 0
2/2/2012	11:15:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:15:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:15:24 AM	Recipe started at 11:15 AM
2/2/2012	11:15:24 AM	Helium valve closed
2/2/2012	11:15:24 AM	H2 valve closed
2/2/2012	11:15:24 AM	BCl3 valve closed
2/2/2012	11:15:24 AM	PH3 valve closed
2/2/2012	11:15:24 AM	SiCl4 pre valve closed
2/2/2012	11:15:24 AM	SiCl4 post valve closed
2/2/2012	11:15:24 AM	Main Vac valve closed
2/2/2012	11:15:24 AM	Bypass valve closed
2/2/2012	11:15:24 AM	Bubbler valve closed
2/2/2012	11:15:24 AM	Helium MFC set to  0.000000
2/2/2012	11:15:24 AM	H2 MFC set to  0.000000
2/2/2012	11:15:24 AM	BCl3 MFC set to  0.000000
2/2/2012	11:15:24 AM	PH3 MFC set to  0.000000
2/2/2012	11:15:24 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:15:24 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:15:24 AM	Tube furnace set to 0
2/2/2012	11:15:27 AM	H2 valve closed
2/2/2012	11:15:27 AM	BCl3 valve closed
2/2/2012	11:15:27 AM	PH3 valve closed
2/2/2012	11:15:27 AM	SiCl4 pre valve closed
2/2/2012	11:15:27 AM	SiCl4 post valve closed
2/2/2012	11:15:27 AM	Main Vac valve closed
2/2/2012	11:15:27 AM	Bypass valve closed
2/2/2012	11:15:28 AM	Bubbler valve closed
2/2/2012	11:15:28 AM	Helium valve opened
2/2/2012	11:15:28 AM	Helium MFC set to  500.000000
2/2/2012	11:15:28 AM	H2 MFC set to  0.000000
2/2/2012	11:15:28 AM	BCl3 MFC set to  0.000000
2/2/2012	11:15:28 AM	PH3 MFC set to  0.000000
2/2/2012	11:15:28 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:15:28 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:15:28 AM	Tube furnace set to 0
2/2/2012	11:15:34 AM	Helium valve closed
2/2/2012	11:15:34 AM	H2 valve closed
2/2/2012	11:15:34 AM	BCl3 valve closed
2/2/2012	11:15:34 AM	PH3 valve closed
2/2/2012	11:15:34 AM	SiCl4 pre valve closed
2/2/2012	11:15:34 AM	SiCl4 post valve closed
2/2/2012	11:15:34 AM	Main Vac valve closed
2/2/2012	11:15:34 AM	Bypass valve closed
2/2/2012	11:15:34 AM	Bubbler valve closed
2/2/2012	11:15:34 AM	Helium MFC set to  0.000000
2/2/2012	11:15:34 AM	H2 MFC set to  0.000000
2/2/2012	11:15:34 AM	BCl3 MFC set to  0.000000
2/2/2012	11:15:34 AM	PH3 MFC set to  0.000000
2/2/2012	11:15:34 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:15:34 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:15:34 AM	Tube furnace set to 0
2/2/2012	11:15:35 AM	Run finished at 11:15 AM
2/2/2012	11:15:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:16:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:16:53 AM	Recipe started at 11:16 AM
2/2/2012	11:16:53 AM	Helium valve closed
2/2/2012	11:16:53 AM	H2 valve closed
2/2/2012	11:16:53 AM	BCl3 valve closed
2/2/2012	11:16:53 AM	PH3 valve closed
2/2/2012	11:16:53 AM	SiCl4 pre valve closed
2/2/2012	11:16:53 AM	SiCl4 post valve closed
2/2/2012	11:16:53 AM	Main Vac valve closed
2/2/2012	11:16:53 AM	Bubbler valve closed
2/2/2012	11:16:53 AM	Bypass valve opened
2/2/2012	11:16:53 AM	Helium MFC set to  0.000000
2/2/2012	11:16:53 AM	H2 MFC set to  0.000000
2/2/2012	11:16:53 AM	BCl3 MFC set to  0.000000
2/2/2012	11:16:53 AM	PH3 MFC set to  0.000000
2/2/2012	11:16:53 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:16:53 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:16:53 AM	Tube furnace set to 0
2/2/2012	11:17:22 AM	Run aborted at 11:17 AM
2/2/2012	11:17:22 AM	Helium valve closed
2/2/2012	11:17:22 AM	H2 valve closed
2/2/2012	11:17:22 AM	BCl3 valve closed
2/2/2012	11:17:22 AM	PH3 valve closed
2/2/2012	11:17:22 AM	SiCl4 pre valve closed
2/2/2012	11:17:22 AM	SiCl4 post valve closed
2/2/2012	11:17:22 AM	Bypass valve closed
2/2/2012	11:17:22 AM	Main Vac valve closed
2/2/2012	11:17:22 AM	Bubbler valve closed
2/2/2012	11:17:22 AM	Helium MFC set to  0.000000
2/2/2012	11:17:22 AM	H2 MFC set to  0.000000
2/2/2012	11:17:22 AM	BCl3 MFC set to  0.000000
2/2/2012	11:17:22 AM	PH3 MFC set to  0.000000
2/2/2012	11:17:22 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:17:22 AM	Tube furnace set to 0
2/2/2012	11:17:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:17:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:17:24 AM	Recipe started at 11:17 AM
2/2/2012	11:17:24 AM	Helium valve closed
2/2/2012	11:17:24 AM	H2 valve closed
2/2/2012	11:17:24 AM	BCl3 valve closed
2/2/2012	11:17:24 AM	PH3 valve closed
2/2/2012	11:17:24 AM	SiCl4 pre valve closed
2/2/2012	11:17:24 AM	SiCl4 post valve closed
2/2/2012	11:17:24 AM	Main Vac valve closed
2/2/2012	11:17:24 AM	Bypass valve closed
2/2/2012	11:17:24 AM	Bubbler valve closed
2/2/2012	11:17:24 AM	Helium MFC set to  0.000000
2/2/2012	11:17:24 AM	H2 MFC set to  0.000000
2/2/2012	11:17:24 AM	BCl3 MFC set to  0.000000
2/2/2012	11:17:24 AM	PH3 MFC set to  0.000000
2/2/2012	11:17:24 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:17:24 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:17:24 AM	Tube furnace set to 0
2/2/2012	11:17:27 AM	H2 valve closed
2/2/2012	11:17:27 AM	BCl3 valve closed
2/2/2012	11:17:27 AM	PH3 valve closed
2/2/2012	11:17:27 AM	SiCl4 pre valve closed
2/2/2012	11:17:27 AM	SiCl4 post valve closed
2/2/2012	11:17:27 AM	Main Vac valve closed
2/2/2012	11:17:27 AM	Bypass valve closed
2/2/2012	11:17:27 AM	Bubbler valve closed
2/2/2012	11:17:27 AM	Helium valve opened
2/2/2012	11:17:27 AM	Helium MFC set to  500.000000
2/2/2012	11:17:27 AM	H2 MFC set to  0.000000
2/2/2012	11:17:27 AM	BCl3 MFC set to  0.000000
2/2/2012	11:17:27 AM	PH3 MFC set to  0.000000
2/2/2012	11:17:27 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:17:27 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:17:27 AM	Tube furnace set to 0
2/2/2012	11:17:41 AM	Helium valve closed
2/2/2012	11:17:41 AM	H2 valve closed
2/2/2012	11:17:41 AM	BCl3 valve closed
2/2/2012	11:17:41 AM	PH3 valve closed
2/2/2012	11:17:41 AM	SiCl4 pre valve closed
2/2/2012	11:17:41 AM	SiCl4 post valve closed
2/2/2012	11:17:41 AM	Main Vac valve closed
2/2/2012	11:17:41 AM	Bypass valve closed
2/2/2012	11:17:41 AM	Bubbler valve closed
2/2/2012	11:17:41 AM	Helium MFC set to  0.000000
2/2/2012	11:17:41 AM	H2 MFC set to  0.000000
2/2/2012	11:17:41 AM	BCl3 MFC set to  0.000000
2/2/2012	11:17:41 AM	PH3 MFC set to  0.000000
2/2/2012	11:17:41 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:17:41 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:17:41 AM	Tube furnace set to 0
2/2/2012	11:17:42 AM	Run finished at 11:17 AM
2/2/2012	11:17:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:20:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:20:59 AM	Recipe started at 11:20 AM
2/2/2012	11:20:59 AM	Helium valve closed
2/2/2012	11:20:59 AM	H2 valve closed
2/2/2012	11:20:59 AM	BCl3 valve closed
2/2/2012	11:20:59 AM	PH3 valve closed
2/2/2012	11:20:59 AM	SiCl4 pre valve closed
2/2/2012	11:20:59 AM	SiCl4 post valve closed
2/2/2012	11:20:59 AM	Main Vac valve closed
2/2/2012	11:20:59 AM	Bubbler valve closed
2/2/2012	11:20:59 AM	Bypass valve opened
2/2/2012	11:20:59 AM	Helium MFC set to  0.000000
2/2/2012	11:20:59 AM	H2 MFC set to  0.000000
2/2/2012	11:20:59 AM	BCl3 MFC set to  0.000000
2/2/2012	11:20:59 AM	PH3 MFC set to  0.000000
2/2/2012	11:20:59 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:20:59 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:20:59 AM	Tube furnace set to 0
2/2/2012	11:22:06 AM	Helium valve closed
2/2/2012	11:22:06 AM	H2 valve closed
2/2/2012	11:22:06 AM	BCl3 valve closed
2/2/2012	11:22:06 AM	PH3 valve closed
2/2/2012	11:22:06 AM	SiCl4 pre valve closed
2/2/2012	11:22:06 AM	SiCl4 post valve closed
2/2/2012	11:22:06 AM	Main Vac valve closed
2/2/2012	11:22:06 AM	Bubbler valve closed
2/2/2012	11:22:06 AM	Bypass valve opened
2/2/2012	11:22:06 AM	Helium MFC set to  0.000000
2/2/2012	11:22:06 AM	H2 MFC set to  0.000000
2/2/2012	11:22:06 AM	BCl3 MFC set to  0.000000
2/2/2012	11:22:06 AM	PH3 MFC set to  0.000000
2/2/2012	11:22:06 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:22:06 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:22:06 AM	Tube furnace set to 0
2/2/2012	11:23:06 AM	Helium valve closed
2/2/2012	11:23:06 AM	H2 valve closed
2/2/2012	11:23:06 AM	BCl3 valve closed
2/2/2012	11:23:06 AM	PH3 valve closed
2/2/2012	11:23:06 AM	SiCl4 pre valve closed
2/2/2012	11:23:06 AM	SiCl4 post valve closed
2/2/2012	11:23:06 AM	Bypass valve closed
2/2/2012	11:23:06 AM	Bubbler valve closed
2/2/2012	11:23:06 AM	Main Vac valve opened
2/2/2012	11:23:06 AM	Helium MFC set to  0.000000
2/2/2012	11:23:06 AM	H2 MFC set to  0.000000
2/2/2012	11:23:06 AM	BCl3 MFC set to  0.000000
2/2/2012	11:23:06 AM	PH3 MFC set to  0.000000
2/2/2012	11:23:06 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:23:06 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:23:07 AM	Tube furnace set to 0
2/2/2012	11:23:08 AM	Run finished at 11:23 AM
2/2/2012	11:23:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:24:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:24:23 AM	Recipe started at 11:24 AM
2/2/2012	11:24:23 AM	Helium valve closed
2/2/2012	11:24:23 AM	H2 valve closed
2/2/2012	11:24:23 AM	BCl3 valve closed
2/2/2012	11:24:23 AM	PH3 valve closed
2/2/2012	11:24:23 AM	SiCl4 pre valve closed
2/2/2012	11:24:23 AM	SiCl4 post valve closed
2/2/2012	11:24:23 AM	Main Vac valve closed
2/2/2012	11:24:23 AM	Bypass valve closed
2/2/2012	11:24:23 AM	Bubbler valve closed
2/2/2012	11:24:23 AM	Helium MFC set to  0.000000
2/2/2012	11:24:23 AM	H2 MFC set to  0.000000
2/2/2012	11:24:23 AM	BCl3 MFC set to  0.000000
2/2/2012	11:24:23 AM	PH3 MFC set to  0.000000
2/2/2012	11:24:23 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:24:23 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:24:23 AM	Tube furnace set to 0
2/2/2012	11:24:26 AM	H2 valve closed
2/2/2012	11:24:26 AM	BCl3 valve closed
2/2/2012	11:24:26 AM	PH3 valve closed
2/2/2012	11:24:26 AM	SiCl4 pre valve closed
2/2/2012	11:24:26 AM	SiCl4 post valve closed
2/2/2012	11:24:26 AM	Main Vac valve closed
2/2/2012	11:24:26 AM	Bypass valve closed
2/2/2012	11:24:26 AM	Bubbler valve closed
2/2/2012	11:24:26 AM	Helium valve opened
2/2/2012	11:24:26 AM	Helium MFC set to  500.000000
2/2/2012	11:24:26 AM	H2 MFC set to  0.000000
2/2/2012	11:24:26 AM	BCl3 MFC set to  0.000000
2/2/2012	11:24:26 AM	PH3 MFC set to  0.000000
2/2/2012	11:24:26 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:24:26 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:24:26 AM	Tube furnace set to 0
2/2/2012	11:25:33 AM	Helium valve closed
2/2/2012	11:25:33 AM	H2 valve closed
2/2/2012	11:25:33 AM	BCl3 valve closed
2/2/2012	11:25:33 AM	PH3 valve closed
2/2/2012	11:25:33 AM	SiCl4 pre valve closed
2/2/2012	11:25:33 AM	SiCl4 post valve closed
2/2/2012	11:25:33 AM	Main Vac valve closed
2/2/2012	11:25:33 AM	Bypass valve closed
2/2/2012	11:25:33 AM	Bubbler valve closed
2/2/2012	11:25:33 AM	Helium MFC set to  0.000000
2/2/2012	11:25:33 AM	H2 MFC set to  0.000000
2/2/2012	11:25:33 AM	BCl3 MFC set to  0.000000
2/2/2012	11:25:33 AM	PH3 MFC set to  0.000000
2/2/2012	11:25:33 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:25:33 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:25:33 AM	Tube furnace set to 0
2/2/2012	11:25:34 AM	Run finished at 11:25 AM
2/2/2012	11:25:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	11:40:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	11:40:40 AM	Recipe started at 11:40 AM
2/2/2012	11:40:40 AM	Helium valve closed
2/2/2012	11:40:40 AM	H2 valve closed
2/2/2012	11:40:40 AM	BCl3 valve closed
2/2/2012	11:40:40 AM	PH3 valve closed
2/2/2012	11:40:40 AM	SiCl4 pre valve closed
2/2/2012	11:40:40 AM	SiCl4 post valve closed
2/2/2012	11:40:40 AM	Main Vac valve closed
2/2/2012	11:40:40 AM	Bubbler valve closed
2/2/2012	11:40:40 AM	Bypass valve opened
2/2/2012	11:40:40 AM	Helium MFC set to  0.000000
2/2/2012	11:40:40 AM	H2 MFC set to  0.000000
2/2/2012	11:40:40 AM	BCl3 MFC set to  0.000000
2/2/2012	11:40:40 AM	PH3 MFC set to  0.000000
2/2/2012	11:40:40 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:40:40 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:40:40 AM	Tube furnace set to 0
2/2/2012	11:41:41 AM	Helium valve closed
2/2/2012	11:41:41 AM	H2 valve closed
2/2/2012	11:41:41 AM	BCl3 valve closed
2/2/2012	11:41:41 AM	PH3 valve closed
2/2/2012	11:41:41 AM	SiCl4 pre valve closed
2/2/2012	11:41:41 AM	SiCl4 post valve closed
2/2/2012	11:41:41 AM	Main Vac valve closed
2/2/2012	11:41:41 AM	Bubbler valve closed
2/2/2012	11:41:41 AM	Bypass valve opened
2/2/2012	11:41:41 AM	Helium MFC set to  0.000000
2/2/2012	11:41:41 AM	H2 MFC set to  0.000000
2/2/2012	11:41:41 AM	BCl3 MFC set to  0.000000
2/2/2012	11:41:41 AM	PH3 MFC set to  0.000000
2/2/2012	11:41:41 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:41:41 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:41:42 AM	Tube furnace set to 0
2/2/2012	11:42:42 AM	Helium valve closed
2/2/2012	11:42:42 AM	H2 valve closed
2/2/2012	11:42:42 AM	BCl3 valve closed
2/2/2012	11:42:42 AM	PH3 valve closed
2/2/2012	11:42:42 AM	SiCl4 pre valve closed
2/2/2012	11:42:42 AM	SiCl4 post valve closed
2/2/2012	11:42:42 AM	Bypass valve closed
2/2/2012	11:42:42 AM	Bubbler valve closed
2/2/2012	11:42:42 AM	Main Vac valve opened
2/2/2012	11:42:42 AM	Helium MFC set to  0.000000
2/2/2012	11:42:42 AM	H2 MFC set to  0.000000
2/2/2012	11:42:42 AM	BCl3 MFC set to  0.000000
2/2/2012	11:42:42 AM	PH3 MFC set to  0.000000
2/2/2012	11:42:42 AM	SiCl4 MFC set to  0.000000
2/2/2012	11:42:42 AM	Bypass solenoid MFC set to  0.000000
2/2/2012	11:42:42 AM	Tube furnace set to 0
2/2/2012	11:42:43 AM	Run finished at 11:42 AM
2/2/2012	11:42:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	12:58:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	12:58:34 PM	Recipe started at 12:58 PM
2/2/2012	12:58:34 PM	Helium valve closed
2/2/2012	12:58:35 PM	H2 valve closed
2/2/2012	12:58:35 PM	BCl3 valve closed
2/2/2012	12:58:35 PM	PH3 valve closed
2/2/2012	12:58:35 PM	SiCl4 pre valve closed
2/2/2012	12:58:35 PM	SiCl4 post valve closed
2/2/2012	12:58:35 PM	Main Vac valve closed
2/2/2012	12:58:35 PM	Bubbler valve closed
2/2/2012	12:58:35 PM	Bypass valve opened
2/2/2012	12:58:35 PM	Helium MFC set to  0.000000
2/2/2012	12:58:35 PM	H2 MFC set to  0.000000
2/2/2012	12:58:35 PM	BCl3 MFC set to  0.000000
2/2/2012	12:58:35 PM	PH3 MFC set to  0.000000
2/2/2012	12:58:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	12:58:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	12:58:35 PM	Tube furnace set to 0
2/2/2012	12:58:35 PM	Helium valve closed
2/2/2012	12:58:35 PM	H2 valve closed
2/2/2012	12:58:35 PM	BCl3 valve closed
2/2/2012	12:58:35 PM	PH3 valve closed
2/2/2012	12:58:35 PM	SiCl4 pre valve closed
2/2/2012	12:58:35 PM	SiCl4 post valve closed
2/2/2012	12:58:35 PM	Main Vac valve closed
2/2/2012	12:58:35 PM	Bubbler valve closed
2/2/2012	12:58:35 PM	Bypass valve opened
2/2/2012	12:58:35 PM	Helium MFC set to  0.000000
2/2/2012	12:58:35 PM	H2 MFC set to  0.000000
2/2/2012	12:58:35 PM	BCl3 MFC set to  0.000000
2/2/2012	12:58:35 PM	PH3 MFC set to  0.000000
2/2/2012	12:58:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	12:58:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	12:58:35 PM	Tube furnace set to 0
2/2/2012	12:59:05 PM	Helium valve closed
2/2/2012	12:59:05 PM	H2 valve closed
2/2/2012	12:59:05 PM	BCl3 valve closed
2/2/2012	12:59:05 PM	PH3 valve closed
2/2/2012	12:59:05 PM	SiCl4 pre valve closed
2/2/2012	12:59:05 PM	SiCl4 post valve closed
2/2/2012	12:59:05 PM	Bypass valve closed
2/2/2012	12:59:05 PM	Bubbler valve closed
2/2/2012	12:59:05 PM	Main Vac valve opened
2/2/2012	12:59:05 PM	Helium MFC set to  0.000000
2/2/2012	12:59:05 PM	H2 MFC set to  0.000000
2/2/2012	12:59:05 PM	BCl3 MFC set to  0.000000
2/2/2012	12:59:05 PM	PH3 MFC set to  0.000000
2/2/2012	12:59:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	12:59:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	12:59:05 PM	Tube furnace set to 0
2/2/2012	12:59:35 PM	H2 valve closed
2/2/2012	12:59:35 PM	BCl3 valve closed
2/2/2012	12:59:35 PM	PH3 valve closed
2/2/2012	12:59:35 PM	SiCl4 pre valve closed
2/2/2012	12:59:35 PM	SiCl4 post valve closed
2/2/2012	12:59:35 PM	Bypass valve closed
2/2/2012	12:59:35 PM	Bubbler valve closed
2/2/2012	12:59:35 PM	Helium valve opened
2/2/2012	12:59:35 PM	Main Vac valve opened
2/2/2012	12:59:35 PM	Helium MFC set to  20.000000
2/2/2012	12:59:35 PM	H2 MFC set to  0.000000
2/2/2012	12:59:35 PM	BCl3 MFC set to  0.000000
2/2/2012	12:59:35 PM	PH3 MFC set to  0.000000
2/2/2012	12:59:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	12:59:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	12:59:36 PM	Tube furnace set to 0
2/2/2012	1:00:06 PM	Helium valve closed
2/2/2012	1:00:06 PM	H2 valve closed
2/2/2012	1:00:06 PM	BCl3 valve closed
2/2/2012	1:00:06 PM	PH3 valve closed
2/2/2012	1:00:06 PM	SiCl4 pre valve closed
2/2/2012	1:00:06 PM	SiCl4 post valve closed
2/2/2012	1:00:06 PM	Bypass valve closed
2/2/2012	1:00:06 PM	Bubbler valve closed
2/2/2012	1:00:06 PM	Main Vac valve opened
2/2/2012	1:00:06 PM	Helium MFC set to  0.000000
2/2/2012	1:00:06 PM	H2 MFC set to  0.000000
2/2/2012	1:00:06 PM	BCl3 MFC set to  0.000000
2/2/2012	1:00:06 PM	PH3 MFC set to  0.000000
2/2/2012	1:00:06 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:00:06 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:00:06 PM	Tube furnace set to 0
2/2/2012	1:00:36 PM	H2 valve closed
2/2/2012	1:00:36 PM	BCl3 valve closed
2/2/2012	1:00:36 PM	PH3 valve closed
2/2/2012	1:00:36 PM	SiCl4 pre valve closed
2/2/2012	1:00:36 PM	SiCl4 post valve closed
2/2/2012	1:00:36 PM	Bypass valve closed
2/2/2012	1:00:36 PM	Bubbler valve closed
2/2/2012	1:00:36 PM	Helium valve opened
2/2/2012	1:00:36 PM	Main Vac valve opened
2/2/2012	1:00:36 PM	Helium MFC set to  20.000000
2/2/2012	1:00:36 PM	H2 MFC set to  0.000000
2/2/2012	1:00:36 PM	BCl3 MFC set to  0.000000
2/2/2012	1:00:36 PM	PH3 MFC set to  0.000000
2/2/2012	1:00:36 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:00:36 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:00:36 PM	Tube furnace set to 0
2/2/2012	1:01:06 PM	Helium valve closed
2/2/2012	1:01:06 PM	H2 valve closed
2/2/2012	1:01:06 PM	BCl3 valve closed
2/2/2012	1:01:06 PM	PH3 valve closed
2/2/2012	1:01:06 PM	SiCl4 pre valve closed
2/2/2012	1:01:06 PM	SiCl4 post valve closed
2/2/2012	1:01:06 PM	Bypass valve closed
2/2/2012	1:01:06 PM	Bubbler valve closed
2/2/2012	1:01:06 PM	Main Vac valve opened
2/2/2012	1:01:06 PM	Helium MFC set to  0.000000
2/2/2012	1:01:06 PM	H2 MFC set to  0.000000
2/2/2012	1:01:06 PM	BCl3 MFC set to  0.000000
2/2/2012	1:01:06 PM	PH3 MFC set to  0.000000
2/2/2012	1:01:06 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:01:06 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:01:06 PM	Tube furnace set to 0
2/2/2012	1:01:36 PM	H2 valve closed
2/2/2012	1:01:36 PM	BCl3 valve closed
2/2/2012	1:01:36 PM	PH3 valve closed
2/2/2012	1:01:36 PM	SiCl4 pre valve closed
2/2/2012	1:01:36 PM	SiCl4 post valve closed
2/2/2012	1:01:36 PM	Bypass valve closed
2/2/2012	1:01:36 PM	Bubbler valve closed
2/2/2012	1:01:36 PM	Helium valve opened
2/2/2012	1:01:36 PM	Main Vac valve opened
2/2/2012	1:01:36 PM	Helium MFC set to  20.000000
2/2/2012	1:01:36 PM	H2 MFC set to  0.000000
2/2/2012	1:01:36 PM	BCl3 MFC set to  0.000000
2/2/2012	1:01:36 PM	PH3 MFC set to  0.000000
2/2/2012	1:01:36 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:01:36 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:01:36 PM	Tube furnace set to 0
2/2/2012	1:02:06 PM	Helium valve closed
2/2/2012	1:02:06 PM	H2 valve closed
2/2/2012	1:02:06 PM	BCl3 valve closed
2/2/2012	1:02:06 PM	PH3 valve closed
2/2/2012	1:02:06 PM	SiCl4 pre valve closed
2/2/2012	1:02:06 PM	SiCl4 post valve closed
2/2/2012	1:02:06 PM	Bypass valve closed
2/2/2012	1:02:06 PM	Bubbler valve closed
2/2/2012	1:02:06 PM	Main Vac valve opened
2/2/2012	1:02:06 PM	Helium MFC set to  0.000000
2/2/2012	1:02:06 PM	H2 MFC set to  0.000000
2/2/2012	1:02:06 PM	BCl3 MFC set to  0.000000
2/2/2012	1:02:06 PM	PH3 MFC set to  0.000000
2/2/2012	1:02:06 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:02:06 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:02:07 PM	Tube furnace set to 0
2/2/2012	1:02:37 PM	H2 valve closed
2/2/2012	1:02:37 PM	BCl3 valve closed
2/2/2012	1:02:37 PM	PH3 valve closed
2/2/2012	1:02:37 PM	SiCl4 pre valve closed
2/2/2012	1:02:37 PM	SiCl4 post valve closed
2/2/2012	1:02:37 PM	Bypass valve closed
2/2/2012	1:02:37 PM	Bubbler valve closed
2/2/2012	1:02:37 PM	Helium valve opened
2/2/2012	1:02:37 PM	Main Vac valve opened
2/2/2012	1:02:37 PM	Helium MFC set to  20.000000
2/2/2012	1:02:37 PM	H2 MFC set to  0.000000
2/2/2012	1:02:37 PM	BCl3 MFC set to  0.000000
2/2/2012	1:02:37 PM	PH3 MFC set to  0.000000
2/2/2012	1:02:37 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:02:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:02:37 PM	Tube furnace set to 0
2/2/2012	1:03:07 PM	Helium valve closed
2/2/2012	1:03:07 PM	H2 valve closed
2/2/2012	1:03:07 PM	BCl3 valve closed
2/2/2012	1:03:07 PM	PH3 valve closed
2/2/2012	1:03:07 PM	SiCl4 pre valve closed
2/2/2012	1:03:07 PM	SiCl4 post valve closed
2/2/2012	1:03:07 PM	Bypass valve closed
2/2/2012	1:03:07 PM	Bubbler valve closed
2/2/2012	1:03:07 PM	Main Vac valve opened
2/2/2012	1:03:07 PM	Helium MFC set to  0.000000
2/2/2012	1:03:07 PM	H2 MFC set to  0.000000
2/2/2012	1:03:07 PM	BCl3 MFC set to  0.000000
2/2/2012	1:03:07 PM	PH3 MFC set to  0.000000
2/2/2012	1:03:07 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:03:07 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:03:07 PM	Tube furnace set to 0
2/2/2012	1:03:37 PM	H2 valve closed
2/2/2012	1:03:37 PM	BCl3 valve closed
2/2/2012	1:03:37 PM	PH3 valve closed
2/2/2012	1:03:37 PM	SiCl4 pre valve closed
2/2/2012	1:03:37 PM	SiCl4 post valve closed
2/2/2012	1:03:37 PM	Bypass valve closed
2/2/2012	1:03:37 PM	Bubbler valve closed
2/2/2012	1:03:37 PM	Helium valve opened
2/2/2012	1:03:37 PM	Main Vac valve opened
2/2/2012	1:03:37 PM	Helium MFC set to  20.000000
2/2/2012	1:03:37 PM	H2 MFC set to  0.000000
2/2/2012	1:03:37 PM	BCl3 MFC set to  0.000000
2/2/2012	1:03:37 PM	PH3 MFC set to  0.000000
2/2/2012	1:03:37 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:03:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:03:37 PM	Tube furnace set to 0
2/2/2012	1:04:07 PM	Helium valve closed
2/2/2012	1:04:07 PM	H2 valve closed
2/2/2012	1:04:07 PM	BCl3 valve closed
2/2/2012	1:04:07 PM	PH3 valve closed
2/2/2012	1:04:07 PM	SiCl4 pre valve closed
2/2/2012	1:04:07 PM	SiCl4 post valve closed
2/2/2012	1:04:07 PM	Bypass valve closed
2/2/2012	1:04:07 PM	Bubbler valve closed
2/2/2012	1:04:07 PM	Main Vac valve opened
2/2/2012	1:04:07 PM	Helium MFC set to  0.000000
2/2/2012	1:04:07 PM	H2 MFC set to  0.000000
2/2/2012	1:04:07 PM	BCl3 MFC set to  0.000000
2/2/2012	1:04:07 PM	PH3 MFC set to  0.000000
2/2/2012	1:04:07 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:04:07 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:04:07 PM	Tube furnace set to 0
2/2/2012	1:04:37 PM	H2 valve closed
2/2/2012	1:04:37 PM	BCl3 valve closed
2/2/2012	1:04:37 PM	PH3 valve closed
2/2/2012	1:04:37 PM	SiCl4 pre valve closed
2/2/2012	1:04:37 PM	SiCl4 post valve closed
2/2/2012	1:04:37 PM	Bypass valve closed
2/2/2012	1:04:37 PM	Bubbler valve closed
2/2/2012	1:04:37 PM	Helium valve opened
2/2/2012	1:04:37 PM	Main Vac valve opened
2/2/2012	1:04:37 PM	Helium MFC set to  20.000000
2/2/2012	1:04:37 PM	H2 MFC set to  0.000000
2/2/2012	1:04:37 PM	BCl3 MFC set to  0.000000
2/2/2012	1:04:37 PM	PH3 MFC set to  0.000000
2/2/2012	1:04:37 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:04:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:04:38 PM	Tube furnace set to 0
2/2/2012	1:05:08 PM	Helium valve closed
2/2/2012	1:05:08 PM	H2 valve closed
2/2/2012	1:05:08 PM	BCl3 valve closed
2/2/2012	1:05:08 PM	PH3 valve closed
2/2/2012	1:05:08 PM	SiCl4 pre valve closed
2/2/2012	1:05:08 PM	SiCl4 post valve closed
2/2/2012	1:05:08 PM	Bypass valve closed
2/2/2012	1:05:08 PM	Bubbler valve closed
2/2/2012	1:05:08 PM	Main Vac valve opened
2/2/2012	1:05:08 PM	Helium MFC set to  0.000000
2/2/2012	1:05:08 PM	H2 MFC set to  0.000000
2/2/2012	1:05:08 PM	BCl3 MFC set to  0.000000
2/2/2012	1:05:08 PM	PH3 MFC set to  0.000000
2/2/2012	1:05:08 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:05:08 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:05:08 PM	Tube furnace set to 0
2/2/2012	1:05:38 PM	H2 valve closed
2/2/2012	1:05:38 PM	BCl3 valve closed
2/2/2012	1:05:38 PM	PH3 valve closed
2/2/2012	1:05:38 PM	SiCl4 pre valve closed
2/2/2012	1:05:38 PM	SiCl4 post valve closed
2/2/2012	1:05:38 PM	Bypass valve closed
2/2/2012	1:05:38 PM	Bubbler valve closed
2/2/2012	1:05:38 PM	Helium valve opened
2/2/2012	1:05:38 PM	Main Vac valve opened
2/2/2012	1:05:38 PM	Helium MFC set to  20.000000
2/2/2012	1:05:38 PM	H2 MFC set to  0.000000
2/2/2012	1:05:38 PM	BCl3 MFC set to  0.000000
2/2/2012	1:05:38 PM	PH3 MFC set to  0.000000
2/2/2012	1:05:38 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:05:38 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:05:38 PM	Tube furnace set to 0
2/2/2012	1:06:08 PM	Helium valve closed
2/2/2012	1:06:08 PM	H2 valve closed
2/2/2012	1:06:08 PM	BCl3 valve closed
2/2/2012	1:06:08 PM	PH3 valve closed
2/2/2012	1:06:08 PM	SiCl4 pre valve closed
2/2/2012	1:06:08 PM	SiCl4 post valve closed
2/2/2012	1:06:08 PM	Bypass valve closed
2/2/2012	1:06:08 PM	Bubbler valve closed
2/2/2012	1:06:08 PM	Main Vac valve opened
2/2/2012	1:06:08 PM	Helium MFC set to  0.000000
2/2/2012	1:06:08 PM	H2 MFC set to  0.000000
2/2/2012	1:06:08 PM	BCl3 MFC set to  0.000000
2/2/2012	1:06:08 PM	PH3 MFC set to  0.000000
2/2/2012	1:06:08 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:06:08 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:06:08 PM	Tube furnace set to 0
2/2/2012	1:06:38 PM	H2 valve closed
2/2/2012	1:06:38 PM	BCl3 valve closed
2/2/2012	1:06:38 PM	PH3 valve closed
2/2/2012	1:06:38 PM	SiCl4 pre valve closed
2/2/2012	1:06:38 PM	SiCl4 post valve closed
2/2/2012	1:06:38 PM	Bypass valve closed
2/2/2012	1:06:38 PM	Bubbler valve closed
2/2/2012	1:06:38 PM	Helium valve opened
2/2/2012	1:06:38 PM	Main Vac valve opened
2/2/2012	1:06:38 PM	Helium MFC set to  20.000000
2/2/2012	1:06:38 PM	H2 MFC set to  0.000000
2/2/2012	1:06:38 PM	BCl3 MFC set to  0.000000
2/2/2012	1:06:38 PM	PH3 MFC set to  0.000000
2/2/2012	1:06:38 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:06:38 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:06:38 PM	Tube furnace set to 0
2/2/2012	1:07:08 PM	Helium valve closed
2/2/2012	1:07:08 PM	H2 valve closed
2/2/2012	1:07:08 PM	BCl3 valve closed
2/2/2012	1:07:08 PM	PH3 valve closed
2/2/2012	1:07:08 PM	SiCl4 pre valve closed
2/2/2012	1:07:08 PM	SiCl4 post valve closed
2/2/2012	1:07:08 PM	Bypass valve closed
2/2/2012	1:07:08 PM	Bubbler valve closed
2/2/2012	1:07:08 PM	Main Vac valve opened
2/2/2012	1:07:08 PM	Helium MFC set to  0.000000
2/2/2012	1:07:08 PM	H2 MFC set to  0.000000
2/2/2012	1:07:08 PM	BCl3 MFC set to  0.000000
2/2/2012	1:07:08 PM	PH3 MFC set to  0.000000
2/2/2012	1:07:08 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:07:08 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:07:09 PM	Tube furnace set to 0
2/2/2012	1:07:39 PM	H2 valve closed
2/2/2012	1:07:39 PM	BCl3 valve closed
2/2/2012	1:07:39 PM	PH3 valve closed
2/2/2012	1:07:39 PM	SiCl4 pre valve closed
2/2/2012	1:07:39 PM	SiCl4 post valve closed
2/2/2012	1:07:39 PM	Bypass valve closed
2/2/2012	1:07:39 PM	Bubbler valve closed
2/2/2012	1:07:39 PM	Helium valve opened
2/2/2012	1:07:39 PM	Main Vac valve opened
2/2/2012	1:07:39 PM	Helium MFC set to  20.000000
2/2/2012	1:07:39 PM	H2 MFC set to  0.000000
2/2/2012	1:07:39 PM	BCl3 MFC set to  0.000000
2/2/2012	1:07:39 PM	PH3 MFC set to  0.000000
2/2/2012	1:07:39 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:07:39 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:07:39 PM	Tube furnace set to 0
2/2/2012	1:08:09 PM	Helium valve closed
2/2/2012	1:08:09 PM	H2 valve closed
2/2/2012	1:08:09 PM	BCl3 valve closed
2/2/2012	1:08:09 PM	PH3 valve closed
2/2/2012	1:08:09 PM	SiCl4 pre valve closed
2/2/2012	1:08:09 PM	SiCl4 post valve closed
2/2/2012	1:08:09 PM	Bypass valve closed
2/2/2012	1:08:09 PM	Bubbler valve closed
2/2/2012	1:08:09 PM	Main Vac valve opened
2/2/2012	1:08:09 PM	Helium MFC set to  0.000000
2/2/2012	1:08:09 PM	H2 MFC set to  0.000000
2/2/2012	1:08:09 PM	BCl3 MFC set to  0.000000
2/2/2012	1:08:09 PM	PH3 MFC set to  0.000000
2/2/2012	1:08:09 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:08:09 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:08:09 PM	Tube furnace set to 0
2/2/2012	1:08:39 PM	H2 valve closed
2/2/2012	1:08:39 PM	BCl3 valve closed
2/2/2012	1:08:39 PM	PH3 valve closed
2/2/2012	1:08:39 PM	SiCl4 pre valve closed
2/2/2012	1:08:39 PM	SiCl4 post valve closed
2/2/2012	1:08:39 PM	Bypass valve closed
2/2/2012	1:08:39 PM	Bubbler valve closed
2/2/2012	1:08:39 PM	Helium valve opened
2/2/2012	1:08:39 PM	Main Vac valve opened
2/2/2012	1:08:39 PM	Helium MFC set to  20.000000
2/2/2012	1:08:39 PM	H2 MFC set to  0.000000
2/2/2012	1:08:39 PM	BCl3 MFC set to  0.000000
2/2/2012	1:08:39 PM	PH3 MFC set to  0.000000
2/2/2012	1:08:39 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:08:39 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:08:39 PM	Tube furnace set to 0
2/2/2012	1:09:09 PM	Helium valve closed
2/2/2012	1:09:09 PM	H2 valve closed
2/2/2012	1:09:09 PM	BCl3 valve closed
2/2/2012	1:09:09 PM	PH3 valve closed
2/2/2012	1:09:09 PM	SiCl4 pre valve closed
2/2/2012	1:09:09 PM	SiCl4 post valve closed
2/2/2012	1:09:09 PM	Bypass valve closed
2/2/2012	1:09:09 PM	Bubbler valve closed
2/2/2012	1:09:09 PM	Main Vac valve opened
2/2/2012	1:09:09 PM	Helium MFC set to  0.000000
2/2/2012	1:09:09 PM	H2 MFC set to  0.000000
2/2/2012	1:09:09 PM	BCl3 MFC set to  0.000000
2/2/2012	1:09:09 PM	PH3 MFC set to  0.000000
2/2/2012	1:09:09 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:09:09 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:09:09 PM	Tube furnace set to 0
2/2/2012	1:09:10 PM	Run finished at 1:09 PM
2/2/2012	1:09:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	1:10:39 PM	Main Vac valve closed
2/2/2012	1:10:51 PM	Main Vac valve opened
2/2/2012	1:11:06 PM	Main Vac valve closed
2/2/2012	1:11:17 PM	Main Vac valve opened
2/2/2012	1:11:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	1:11:41 PM	Recipe started at 1:11 PM
2/2/2012	1:11:41 PM	Helium valve closed
2/2/2012	1:11:41 PM	H2 valve closed
2/2/2012	1:11:41 PM	BCl3 valve closed
2/2/2012	1:11:41 PM	PH3 valve closed
2/2/2012	1:11:41 PM	SiCl4 pre valve closed
2/2/2012	1:11:41 PM	SiCl4 post valve closed
2/2/2012	1:11:41 PM	Main Vac valve closed
2/2/2012	1:11:41 PM	Bubbler valve closed
2/2/2012	1:11:41 PM	Bypass valve opened
2/2/2012	1:11:41 PM	Helium MFC set to  0.000000
2/2/2012	1:11:41 PM	H2 MFC set to  0.000000
2/2/2012	1:11:41 PM	BCl3 MFC set to  0.000000
2/2/2012	1:11:41 PM	PH3 MFC set to  0.000000
2/2/2012	1:11:41 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:11:41 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:11:42 PM	Tube furnace set to 0
2/2/2012	1:11:42 PM	Helium valve closed
2/2/2012	1:11:42 PM	H2 valve closed
2/2/2012	1:11:42 PM	BCl3 valve closed
2/2/2012	1:11:42 PM	PH3 valve closed
2/2/2012	1:11:42 PM	SiCl4 pre valve closed
2/2/2012	1:11:42 PM	SiCl4 post valve closed
2/2/2012	1:11:42 PM	Main Vac valve closed
2/2/2012	1:11:42 PM	Bubbler valve closed
2/2/2012	1:11:42 PM	Bypass valve opened
2/2/2012	1:11:42 PM	Helium MFC set to  0.000000
2/2/2012	1:11:42 PM	H2 MFC set to  0.000000
2/2/2012	1:11:42 PM	BCl3 MFC set to  0.000000
2/2/2012	1:11:42 PM	PH3 MFC set to  0.000000
2/2/2012	1:11:42 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:11:42 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:11:42 PM	Tube furnace set to 0
2/2/2012	1:11:43 PM	Helium valve closed
2/2/2012	1:11:43 PM	H2 valve closed
2/2/2012	1:11:43 PM	BCl3 valve closed
2/2/2012	1:11:43 PM	PH3 valve closed
2/2/2012	1:11:43 PM	SiCl4 pre valve closed
2/2/2012	1:11:43 PM	SiCl4 post valve closed
2/2/2012	1:11:43 PM	Bypass valve closed
2/2/2012	1:11:43 PM	Bubbler valve closed
2/2/2012	1:11:43 PM	Main Vac valve opened
2/2/2012	1:11:43 PM	Helium MFC set to  0.000000
2/2/2012	1:11:43 PM	H2 MFC set to  0.000000
2/2/2012	1:11:43 PM	BCl3 MFC set to  0.000000
2/2/2012	1:11:43 PM	PH3 MFC set to  0.000000
2/2/2012	1:11:43 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:11:43 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:11:44 PM	Tube furnace set to 0
2/2/2012	1:11:48 PM	H2 valve closed
2/2/2012	1:11:48 PM	BCl3 valve closed
2/2/2012	1:11:48 PM	PH3 valve closed
2/2/2012	1:11:48 PM	SiCl4 pre valve closed
2/2/2012	1:11:48 PM	SiCl4 post valve closed
2/2/2012	1:11:48 PM	Bypass valve closed
2/2/2012	1:11:48 PM	Bubbler valve closed
2/2/2012	1:11:48 PM	Helium valve opened
2/2/2012	1:11:48 PM	Main Vac valve opened
2/2/2012	1:11:48 PM	Helium MFC set to  20.000000
2/2/2012	1:11:48 PM	H2 MFC set to  0.000000
2/2/2012	1:11:48 PM	BCl3 MFC set to  0.000000
2/2/2012	1:11:48 PM	PH3 MFC set to  0.000000
2/2/2012	1:11:48 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:11:48 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:11:49 PM	Tube furnace set to 0
2/2/2012	1:12:19 PM	Helium valve closed
2/2/2012	1:12:19 PM	H2 valve closed
2/2/2012	1:12:19 PM	BCl3 valve closed
2/2/2012	1:12:19 PM	PH3 valve closed
2/2/2012	1:12:19 PM	SiCl4 pre valve closed
2/2/2012	1:12:19 PM	SiCl4 post valve closed
2/2/2012	1:12:19 PM	Bypass valve closed
2/2/2012	1:12:19 PM	Bubbler valve closed
2/2/2012	1:12:19 PM	Main Vac valve opened
2/2/2012	1:12:19 PM	Helium MFC set to  0.000000
2/2/2012	1:12:19 PM	H2 MFC set to  0.000000
2/2/2012	1:12:19 PM	BCl3 MFC set to  0.000000
2/2/2012	1:12:19 PM	PH3 MFC set to  0.000000
2/2/2012	1:12:19 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:12:19 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:12:19 PM	Tube furnace set to 0
2/2/2012	1:12:49 PM	H2 valve closed
2/2/2012	1:12:49 PM	BCl3 valve closed
2/2/2012	1:12:49 PM	PH3 valve closed
2/2/2012	1:12:49 PM	SiCl4 pre valve closed
2/2/2012	1:12:49 PM	SiCl4 post valve closed
2/2/2012	1:12:49 PM	Bypass valve closed
2/2/2012	1:12:49 PM	Bubbler valve closed
2/2/2012	1:12:49 PM	Helium valve opened
2/2/2012	1:12:49 PM	Main Vac valve opened
2/2/2012	1:12:49 PM	Helium MFC set to  20.000000
2/2/2012	1:12:49 PM	H2 MFC set to  0.000000
2/2/2012	1:12:49 PM	BCl3 MFC set to  0.000000
2/2/2012	1:12:49 PM	PH3 MFC set to  0.000000
2/2/2012	1:12:49 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:12:49 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:12:49 PM	Tube furnace set to 0
2/2/2012	1:13:19 PM	Helium valve closed
2/2/2012	1:13:19 PM	H2 valve closed
2/2/2012	1:13:19 PM	BCl3 valve closed
2/2/2012	1:13:19 PM	PH3 valve closed
2/2/2012	1:13:19 PM	SiCl4 pre valve closed
2/2/2012	1:13:19 PM	SiCl4 post valve closed
2/2/2012	1:13:19 PM	Bypass valve closed
2/2/2012	1:13:19 PM	Bubbler valve closed
2/2/2012	1:13:19 PM	Main Vac valve opened
2/2/2012	1:13:19 PM	Helium MFC set to  0.000000
2/2/2012	1:13:19 PM	H2 MFC set to  0.000000
2/2/2012	1:13:19 PM	BCl3 MFC set to  0.000000
2/2/2012	1:13:19 PM	PH3 MFC set to  0.000000
2/2/2012	1:13:19 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:13:19 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:13:19 PM	Tube furnace set to 0
2/2/2012	1:13:49 PM	H2 valve closed
2/2/2012	1:13:49 PM	BCl3 valve closed
2/2/2012	1:13:49 PM	PH3 valve closed
2/2/2012	1:13:49 PM	SiCl4 pre valve closed
2/2/2012	1:13:49 PM	SiCl4 post valve closed
2/2/2012	1:13:49 PM	Bypass valve closed
2/2/2012	1:13:49 PM	Bubbler valve closed
2/2/2012	1:13:49 PM	Helium valve opened
2/2/2012	1:13:49 PM	Main Vac valve opened
2/2/2012	1:13:49 PM	Helium MFC set to  20.000000
2/2/2012	1:13:49 PM	H2 MFC set to  0.000000
2/2/2012	1:13:49 PM	BCl3 MFC set to  0.000000
2/2/2012	1:13:49 PM	PH3 MFC set to  0.000000
2/2/2012	1:13:49 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:13:49 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:13:49 PM	Tube furnace set to 0
2/2/2012	1:14:19 PM	Helium valve closed
2/2/2012	1:14:19 PM	H2 valve closed
2/2/2012	1:14:19 PM	BCl3 valve closed
2/2/2012	1:14:19 PM	PH3 valve closed
2/2/2012	1:14:19 PM	SiCl4 pre valve closed
2/2/2012	1:14:19 PM	SiCl4 post valve closed
2/2/2012	1:14:19 PM	Bypass valve closed
2/2/2012	1:14:19 PM	Bubbler valve closed
2/2/2012	1:14:19 PM	Main Vac valve opened
2/2/2012	1:14:19 PM	Helium MFC set to  0.000000
2/2/2012	1:14:19 PM	H2 MFC set to  0.000000
2/2/2012	1:14:19 PM	BCl3 MFC set to  0.000000
2/2/2012	1:14:19 PM	PH3 MFC set to  0.000000
2/2/2012	1:14:19 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:14:19 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:14:20 PM	Tube furnace set to 0
2/2/2012	1:14:50 PM	H2 valve closed
2/2/2012	1:14:50 PM	BCl3 valve closed
2/2/2012	1:14:50 PM	PH3 valve closed
2/2/2012	1:14:50 PM	SiCl4 pre valve closed
2/2/2012	1:14:50 PM	SiCl4 post valve closed
2/2/2012	1:14:50 PM	Bypass valve closed
2/2/2012	1:14:50 PM	Bubbler valve closed
2/2/2012	1:14:50 PM	Helium valve opened
2/2/2012	1:14:50 PM	Main Vac valve opened
2/2/2012	1:14:50 PM	Helium MFC set to  20.000000
2/2/2012	1:14:50 PM	H2 MFC set to  0.000000
2/2/2012	1:14:50 PM	BCl3 MFC set to  0.000000
2/2/2012	1:14:50 PM	PH3 MFC set to  0.000000
2/2/2012	1:14:50 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:14:50 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:14:50 PM	Tube furnace set to 0
2/2/2012	1:15:20 PM	Helium valve closed
2/2/2012	1:15:20 PM	H2 valve closed
2/2/2012	1:15:20 PM	BCl3 valve closed
2/2/2012	1:15:20 PM	PH3 valve closed
2/2/2012	1:15:20 PM	SiCl4 pre valve closed
2/2/2012	1:15:20 PM	SiCl4 post valve closed
2/2/2012	1:15:20 PM	Bypass valve closed
2/2/2012	1:15:20 PM	Bubbler valve closed
2/2/2012	1:15:20 PM	Main Vac valve opened
2/2/2012	1:15:20 PM	Helium MFC set to  0.000000
2/2/2012	1:15:20 PM	H2 MFC set to  0.000000
2/2/2012	1:15:20 PM	BCl3 MFC set to  0.000000
2/2/2012	1:15:20 PM	PH3 MFC set to  0.000000
2/2/2012	1:15:20 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:15:20 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:15:20 PM	Tube furnace set to 0
2/2/2012	1:15:50 PM	H2 valve closed
2/2/2012	1:15:50 PM	BCl3 valve closed
2/2/2012	1:15:50 PM	PH3 valve closed
2/2/2012	1:15:50 PM	SiCl4 pre valve closed
2/2/2012	1:15:50 PM	SiCl4 post valve closed
2/2/2012	1:15:50 PM	Bypass valve closed
2/2/2012	1:15:50 PM	Bubbler valve closed
2/2/2012	1:15:50 PM	Helium valve opened
2/2/2012	1:15:50 PM	Main Vac valve opened
2/2/2012	1:15:50 PM	Helium MFC set to  20.000000
2/2/2012	1:15:50 PM	H2 MFC set to  0.000000
2/2/2012	1:15:50 PM	BCl3 MFC set to  0.000000
2/2/2012	1:15:50 PM	PH3 MFC set to  0.000000
2/2/2012	1:15:50 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:15:50 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:15:50 PM	Tube furnace set to 0
2/2/2012	1:16:20 PM	Helium valve closed
2/2/2012	1:16:20 PM	H2 valve closed
2/2/2012	1:16:20 PM	BCl3 valve closed
2/2/2012	1:16:20 PM	PH3 valve closed
2/2/2012	1:16:20 PM	SiCl4 pre valve closed
2/2/2012	1:16:20 PM	SiCl4 post valve closed
2/2/2012	1:16:20 PM	Bypass valve closed
2/2/2012	1:16:20 PM	Bubbler valve closed
2/2/2012	1:16:20 PM	Main Vac valve opened
2/2/2012	1:16:20 PM	Helium MFC set to  0.000000
2/2/2012	1:16:20 PM	H2 MFC set to  0.000000
2/2/2012	1:16:20 PM	BCl3 MFC set to  0.000000
2/2/2012	1:16:20 PM	PH3 MFC set to  0.000000
2/2/2012	1:16:20 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:16:20 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:16:20 PM	Tube furnace set to 0
2/2/2012	1:16:50 PM	H2 valve closed
2/2/2012	1:16:50 PM	BCl3 valve closed
2/2/2012	1:16:50 PM	PH3 valve closed
2/2/2012	1:16:50 PM	SiCl4 pre valve closed
2/2/2012	1:16:50 PM	SiCl4 post valve closed
2/2/2012	1:16:50 PM	Bypass valve closed
2/2/2012	1:16:50 PM	Bubbler valve closed
2/2/2012	1:16:50 PM	Helium valve opened
2/2/2012	1:16:50 PM	Main Vac valve opened
2/2/2012	1:16:50 PM	Helium MFC set to  20.000000
2/2/2012	1:16:50 PM	H2 MFC set to  0.000000
2/2/2012	1:16:50 PM	BCl3 MFC set to  0.000000
2/2/2012	1:16:50 PM	PH3 MFC set to  0.000000
2/2/2012	1:16:50 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:16:50 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:16:51 PM	Tube furnace set to 0
2/2/2012	1:17:21 PM	Helium valve closed
2/2/2012	1:17:21 PM	H2 valve closed
2/2/2012	1:17:21 PM	BCl3 valve closed
2/2/2012	1:17:21 PM	PH3 valve closed
2/2/2012	1:17:21 PM	SiCl4 pre valve closed
2/2/2012	1:17:21 PM	SiCl4 post valve closed
2/2/2012	1:17:21 PM	Bypass valve closed
2/2/2012	1:17:21 PM	Bubbler valve closed
2/2/2012	1:17:21 PM	Main Vac valve opened
2/2/2012	1:17:21 PM	Helium MFC set to  0.000000
2/2/2012	1:17:21 PM	H2 MFC set to  0.000000
2/2/2012	1:17:21 PM	BCl3 MFC set to  0.000000
2/2/2012	1:17:21 PM	PH3 MFC set to  0.000000
2/2/2012	1:17:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:17:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:17:21 PM	Tube furnace set to 0
2/2/2012	1:17:51 PM	H2 valve closed
2/2/2012	1:17:51 PM	BCl3 valve closed
2/2/2012	1:17:51 PM	PH3 valve closed
2/2/2012	1:17:51 PM	SiCl4 pre valve closed
2/2/2012	1:17:51 PM	SiCl4 post valve closed
2/2/2012	1:17:51 PM	Bypass valve closed
2/2/2012	1:17:51 PM	Bubbler valve closed
2/2/2012	1:17:51 PM	Helium valve opened
2/2/2012	1:17:51 PM	Main Vac valve opened
2/2/2012	1:17:51 PM	Helium MFC set to  20.000000
2/2/2012	1:17:51 PM	H2 MFC set to  0.000000
2/2/2012	1:17:51 PM	BCl3 MFC set to  0.000000
2/2/2012	1:17:51 PM	PH3 MFC set to  0.000000
2/2/2012	1:17:51 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:17:51 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:17:51 PM	Tube furnace set to 0
2/2/2012	1:18:21 PM	Helium valve closed
2/2/2012	1:18:21 PM	H2 valve closed
2/2/2012	1:18:21 PM	BCl3 valve closed
2/2/2012	1:18:21 PM	PH3 valve closed
2/2/2012	1:18:21 PM	SiCl4 pre valve closed
2/2/2012	1:18:21 PM	SiCl4 post valve closed
2/2/2012	1:18:21 PM	Bypass valve closed
2/2/2012	1:18:21 PM	Bubbler valve closed
2/2/2012	1:18:21 PM	Main Vac valve opened
2/2/2012	1:18:21 PM	Helium MFC set to  0.000000
2/2/2012	1:18:21 PM	H2 MFC set to  0.000000
2/2/2012	1:18:21 PM	BCl3 MFC set to  0.000000
2/2/2012	1:18:21 PM	PH3 MFC set to  0.000000
2/2/2012	1:18:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:18:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:18:21 PM	Tube furnace set to 0
2/2/2012	1:18:51 PM	H2 valve closed
2/2/2012	1:18:51 PM	BCl3 valve closed
2/2/2012	1:18:51 PM	PH3 valve closed
2/2/2012	1:18:51 PM	SiCl4 pre valve closed
2/2/2012	1:18:51 PM	SiCl4 post valve closed
2/2/2012	1:18:51 PM	Bypass valve closed
2/2/2012	1:18:51 PM	Bubbler valve closed
2/2/2012	1:18:51 PM	Helium valve opened
2/2/2012	1:18:51 PM	Main Vac valve opened
2/2/2012	1:18:51 PM	Helium MFC set to  20.000000
2/2/2012	1:18:51 PM	H2 MFC set to  0.000000
2/2/2012	1:18:51 PM	BCl3 MFC set to  0.000000
2/2/2012	1:18:51 PM	PH3 MFC set to  0.000000
2/2/2012	1:18:51 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:18:51 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:18:51 PM	Tube furnace set to 0
2/2/2012	1:19:21 PM	Helium valve closed
2/2/2012	1:19:21 PM	H2 valve closed
2/2/2012	1:19:21 PM	BCl3 valve closed
2/2/2012	1:19:21 PM	PH3 valve closed
2/2/2012	1:19:21 PM	SiCl4 pre valve closed
2/2/2012	1:19:21 PM	SiCl4 post valve closed
2/2/2012	1:19:21 PM	Bypass valve closed
2/2/2012	1:19:21 PM	Bubbler valve closed
2/2/2012	1:19:21 PM	Main Vac valve opened
2/2/2012	1:19:21 PM	Helium MFC set to  0.000000
2/2/2012	1:19:21 PM	H2 MFC set to  0.000000
2/2/2012	1:19:21 PM	BCl3 MFC set to  0.000000
2/2/2012	1:19:21 PM	PH3 MFC set to  0.000000
2/2/2012	1:19:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:19:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:19:22 PM	Tube furnace set to 0
2/2/2012	1:19:24 PM	Run aborted at 1:19 PM
2/2/2012	1:19:24 PM	Helium valve closed
2/2/2012	1:19:24 PM	H2 valve closed
2/2/2012	1:19:24 PM	BCl3 valve closed
2/2/2012	1:19:24 PM	PH3 valve closed
2/2/2012	1:19:24 PM	SiCl4 pre valve closed
2/2/2012	1:19:24 PM	SiCl4 post valve closed
2/2/2012	1:19:24 PM	Bypass valve closed
2/2/2012	1:19:24 PM	Main Vac valve closed
2/2/2012	1:19:24 PM	Bubbler valve closed
2/2/2012	1:19:24 PM	Helium MFC set to  0.000000
2/2/2012	1:19:24 PM	H2 MFC set to  0.000000
2/2/2012	1:19:24 PM	BCl3 MFC set to  0.000000
2/2/2012	1:19:24 PM	PH3 MFC set to  0.000000
2/2/2012	1:19:24 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:19:24 PM	Tube furnace set to 0
2/2/2012	1:19:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	1:19:26 PM	Main Vac valve opened
2/2/2012	1:19:39 PM	Main Vac valve closed
2/2/2012	1:19:50 PM	Main Vac valve opened
2/2/2012	1:20:04 PM	Main Vac valve closed
2/2/2012	1:20:11 PM	Main Vac valve opened
2/2/2012	1:22:09 PM	Recipe started at 1:22 PM
2/2/2012	1:22:09 PM	Helium valve closed
2/2/2012	1:22:09 PM	H2 valve closed
2/2/2012	1:22:09 PM	BCl3 valve closed
2/2/2012	1:22:09 PM	PH3 valve closed
2/2/2012	1:22:09 PM	SiCl4 pre valve closed
2/2/2012	1:22:09 PM	SiCl4 post valve closed
2/2/2012	1:22:09 PM	Main Vac valve closed
2/2/2012	1:22:09 PM	Bypass valve closed
2/2/2012	1:22:09 PM	Bubbler valve closed
2/2/2012	1:22:09 PM	Helium MFC set to  0.000000
2/2/2012	1:22:09 PM	H2 MFC set to  0.000000
2/2/2012	1:22:09 PM	BCl3 MFC set to  0.000000
2/2/2012	1:22:09 PM	PH3 MFC set to  0.000000
2/2/2012	1:22:09 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:22:09 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:22:09 PM	Tube furnace set to 0
2/2/2012	1:22:12 PM	Helium valve closed
2/2/2012	1:22:12 PM	BCl3 valve closed
2/2/2012	1:22:12 PM	PH3 valve closed
2/2/2012	1:22:12 PM	SiCl4 pre valve closed
2/2/2012	1:22:12 PM	SiCl4 post valve closed
2/2/2012	1:22:12 PM	Main Vac valve closed
2/2/2012	1:22:12 PM	Bypass valve closed
2/2/2012	1:22:12 PM	Bubbler valve closed
2/2/2012	1:22:12 PM	H2 valve opened
2/2/2012	1:22:12 PM	Helium MFC set to  0.000000
2/2/2012	1:22:12 PM	H2 MFC set to  500.000000
2/2/2012	1:22:12 PM	BCl3 MFC set to  0.000000
2/2/2012	1:22:12 PM	PH3 MFC set to  0.000000
2/2/2012	1:22:12 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:22:12 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:22:12 PM	Tube furnace set to 0
2/2/2012	1:23:21 PM	Helium valve closed
2/2/2012	1:23:21 PM	BCl3 valve closed
2/2/2012	1:23:21 PM	PH3 valve closed
2/2/2012	1:23:21 PM	SiCl4 pre valve closed
2/2/2012	1:23:21 PM	SiCl4 post valve closed
2/2/2012	1:23:21 PM	Main Vac valve closed
2/2/2012	1:23:21 PM	Bypass valve closed
2/2/2012	1:23:21 PM	H2 valve opened
2/2/2012	1:23:21 PM	Bubbler valve opened
2/2/2012	1:23:21 PM	Helium MFC set to  0.000000
2/2/2012	1:23:21 PM	H2 MFC set to  500.000000
2/2/2012	1:23:21 PM	BCl3 MFC set to  0.000000
2/2/2012	1:23:21 PM	PH3 MFC set to  0.000000
2/2/2012	1:23:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:23:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:23:21 PM	Tube furnace set to 0
2/2/2012	1:23:22 PM	Helium valve closed
2/2/2012	1:23:22 PM	BCl3 valve closed
2/2/2012	1:23:22 PM	PH3 valve closed
2/2/2012	1:23:22 PM	SiCl4 pre valve closed
2/2/2012	1:23:22 PM	SiCl4 post valve closed
2/2/2012	1:23:22 PM	Main Vac valve closed
2/2/2012	1:23:22 PM	Bypass valve closed
2/2/2012	1:23:22 PM	H2 valve opened
2/2/2012	1:23:22 PM	Bubbler valve opened
2/2/2012	1:23:22 PM	Helium MFC set to  0.000000
2/2/2012	1:23:22 PM	H2 MFC set to  500.000000
2/2/2012	1:23:22 PM	BCl3 MFC set to  0.000000
2/2/2012	1:23:22 PM	PH3 MFC set to  0.000000
2/2/2012	1:23:22 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:23:22 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:23:23 PM	Tube furnace set to 1000
2/2/2012	1:43:23 PM	Helium valve closed
2/2/2012	1:43:23 PM	PH3 valve closed
2/2/2012	1:43:23 PM	Main Vac valve closed
2/2/2012	1:43:23 PM	Bypass valve closed
2/2/2012	1:43:23 PM	H2 valve opened
2/2/2012	1:43:23 PM	BCl3 valve opened
2/2/2012	1:43:23 PM	SiCl4 pre valve opened
2/2/2012	1:43:23 PM	SiCl4 post valve opened
2/2/2012	1:43:23 PM	Bubbler valve opened
2/2/2012	1:43:23 PM	Helium MFC set to  0.000000
2/2/2012	1:43:23 PM	H2 MFC set to  500.000000
2/2/2012	1:43:23 PM	BCl3 MFC set to  1.000000
2/2/2012	1:43:23 PM	PH3 MFC set to  0.000000
2/2/2012	1:43:23 PM	SiCl4 MFC set to  50.000000
2/2/2012	1:43:23 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:43:23 PM	Tube furnace set to 1000
2/2/2012	1:44:23 PM	Helium valve closed
2/2/2012	1:44:23 PM	BCl3 valve closed
2/2/2012	1:44:23 PM	PH3 valve closed
2/2/2012	1:44:23 PM	SiCl4 pre valve closed
2/2/2012	1:44:23 PM	SiCl4 post valve closed
2/2/2012	1:44:23 PM	Main Vac valve closed
2/2/2012	1:44:23 PM	Bypass valve closed
2/2/2012	1:44:23 PM	H2 valve opened
2/2/2012	1:44:23 PM	Bubbler valve opened
2/2/2012	1:44:23 PM	Helium MFC set to  0.000000
2/2/2012	1:44:23 PM	H2 MFC set to  500.000000
2/2/2012	1:44:23 PM	BCl3 MFC set to  0.000000
2/2/2012	1:44:23 PM	PH3 MFC set to  0.000000
2/2/2012	1:44:23 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:44:23 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:44:23 PM	Tube furnace set to 750
2/2/2012	1:49:23 PM	H2 valve closed
2/2/2012	1:49:23 PM	BCl3 valve closed
2/2/2012	1:49:23 PM	PH3 valve closed
2/2/2012	1:49:23 PM	SiCl4 pre valve closed
2/2/2012	1:49:23 PM	SiCl4 post valve closed
2/2/2012	1:49:23 PM	Main Vac valve closed
2/2/2012	1:49:23 PM	Bypass valve closed
2/2/2012	1:49:23 PM	Helium valve opened
2/2/2012	1:49:23 PM	Bubbler valve opened
2/2/2012	1:49:23 PM	Helium MFC set to  500.000000
2/2/2012	1:49:23 PM	H2 MFC set to  0.000000
2/2/2012	1:49:23 PM	BCl3 MFC set to  0.000000
2/2/2012	1:49:23 PM	PH3 MFC set to  0.000000
2/2/2012	1:49:23 PM	SiCl4 MFC set to  0.000000
2/2/2012	1:49:23 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	1:49:23 PM	Tube furnace set to 0
2/2/2012	2:09:23 PM	Helium valve closed
2/2/2012	2:09:23 PM	H2 valve closed
2/2/2012	2:09:23 PM	BCl3 valve closed
2/2/2012	2:09:23 PM	PH3 valve closed
2/2/2012	2:09:23 PM	SiCl4 pre valve closed
2/2/2012	2:09:23 PM	SiCl4 post valve closed
2/2/2012	2:09:23 PM	Main Vac valve closed
2/2/2012	2:09:23 PM	Bypass valve closed
2/2/2012	2:09:23 PM	Bubbler valve closed
2/2/2012	2:09:23 PM	Helium MFC set to  0.000000
2/2/2012	2:09:23 PM	H2 MFC set to  0.000000
2/2/2012	2:09:23 PM	BCl3 MFC set to  0.000000
2/2/2012	2:09:23 PM	PH3 MFC set to  0.000000
2/2/2012	2:09:23 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:09:23 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:09:23 PM	Tube furnace set to 0
2/2/2012	2:09:24 PM	Run finished at 2:09 PM
2/2/2012	2:10:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	2:10:16 PM	Recipe started at 2:10 PM
2/2/2012	2:10:16 PM	Helium valve closed
2/2/2012	2:10:16 PM	H2 valve closed
2/2/2012	2:10:16 PM	BCl3 valve closed
2/2/2012	2:10:16 PM	PH3 valve closed
2/2/2012	2:10:16 PM	SiCl4 pre valve closed
2/2/2012	2:10:16 PM	SiCl4 post valve closed
2/2/2012	2:10:16 PM	Main Vac valve closed
2/2/2012	2:10:16 PM	Bypass valve closed
2/2/2012	2:10:16 PM	Bubbler valve closed
2/2/2012	2:10:16 PM	Helium MFC set to  0.000000
2/2/2012	2:10:16 PM	H2 MFC set to  0.000000
2/2/2012	2:10:16 PM	BCl3 MFC set to  0.000000
2/2/2012	2:10:16 PM	PH3 MFC set to  0.000000
2/2/2012	2:10:16 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:10:16 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:10:16 PM	Tube furnace set to 0
2/2/2012	2:10:19 PM	H2 valve closed
2/2/2012	2:10:19 PM	BCl3 valve closed
2/2/2012	2:10:19 PM	PH3 valve closed
2/2/2012	2:10:19 PM	SiCl4 pre valve closed
2/2/2012	2:10:19 PM	SiCl4 post valve closed
2/2/2012	2:10:19 PM	Main Vac valve closed
2/2/2012	2:10:19 PM	Bypass valve closed
2/2/2012	2:10:19 PM	Bubbler valve closed
2/2/2012	2:10:19 PM	Helium valve opened
2/2/2012	2:10:19 PM	Helium MFC set to  500.000000
2/2/2012	2:10:19 PM	H2 MFC set to  0.000000
2/2/2012	2:10:19 PM	BCl3 MFC set to  0.000000
2/2/2012	2:10:19 PM	PH3 MFC set to  0.000000
2/2/2012	2:10:19 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:10:19 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:10:19 PM	Tube furnace set to 0
2/2/2012	2:10:20 PM	Helium valve closed
2/2/2012	2:10:20 PM	H2 valve closed
2/2/2012	2:10:20 PM	BCl3 valve closed
2/2/2012	2:10:20 PM	PH3 valve closed
2/2/2012	2:10:20 PM	SiCl4 pre valve closed
2/2/2012	2:10:20 PM	SiCl4 post valve closed
2/2/2012	2:10:20 PM	Main Vac valve closed
2/2/2012	2:10:20 PM	Bypass valve closed
2/2/2012	2:10:20 PM	Bubbler valve closed
2/2/2012	2:10:20 PM	Helium MFC set to  0.000000
2/2/2012	2:10:20 PM	H2 MFC set to  0.000000
2/2/2012	2:10:20 PM	BCl3 MFC set to  0.000000
2/2/2012	2:10:20 PM	PH3 MFC set to  0.000000
2/2/2012	2:10:20 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:10:20 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:10:20 PM	Tube furnace set to 0
2/2/2012	2:10:21 PM	Run finished at 2:10 PM
2/2/2012	2:10:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	2:18:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	2:18:59 PM	Recipe started at 2:18 PM
2/2/2012	2:18:59 PM	Helium valve closed
2/2/2012	2:18:59 PM	H2 valve closed
2/2/2012	2:18:59 PM	BCl3 valve closed
2/2/2012	2:18:59 PM	PH3 valve closed
2/2/2012	2:18:59 PM	SiCl4 pre valve closed
2/2/2012	2:18:59 PM	SiCl4 post valve closed
2/2/2012	2:18:59 PM	Main Vac valve closed
2/2/2012	2:18:59 PM	Bubbler valve closed
2/2/2012	2:18:59 PM	Bypass valve opened
2/2/2012	2:18:59 PM	Helium MFC set to  0.000000
2/2/2012	2:18:59 PM	H2 MFC set to  0.000000
2/2/2012	2:18:59 PM	BCl3 MFC set to  0.000000
2/2/2012	2:18:59 PM	PH3 MFC set to  0.000000
2/2/2012	2:18:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:18:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:18:59 PM	Tube furnace set to 0
2/2/2012	2:20:02 PM	Helium valve closed
2/2/2012	2:20:02 PM	H2 valve closed
2/2/2012	2:20:02 PM	BCl3 valve closed
2/2/2012	2:20:02 PM	PH3 valve closed
2/2/2012	2:20:02 PM	SiCl4 pre valve closed
2/2/2012	2:20:02 PM	SiCl4 post valve closed
2/2/2012	2:20:02 PM	Main Vac valve closed
2/2/2012	2:20:02 PM	Bubbler valve closed
2/2/2012	2:20:02 PM	Bypass valve opened
2/2/2012	2:20:02 PM	Helium MFC set to  0.000000
2/2/2012	2:20:02 PM	H2 MFC set to  0.000000
2/2/2012	2:20:02 PM	BCl3 MFC set to  0.000000
2/2/2012	2:20:02 PM	PH3 MFC set to  0.000000
2/2/2012	2:20:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:20:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:20:02 PM	Tube furnace set to 0
2/2/2012	2:21:02 PM	Helium valve closed
2/2/2012	2:21:02 PM	H2 valve closed
2/2/2012	2:21:02 PM	BCl3 valve closed
2/2/2012	2:21:02 PM	PH3 valve closed
2/2/2012	2:21:02 PM	SiCl4 pre valve closed
2/2/2012	2:21:02 PM	SiCl4 post valve closed
2/2/2012	2:21:02 PM	Bypass valve closed
2/2/2012	2:21:02 PM	Bubbler valve closed
2/2/2012	2:21:02 PM	Main Vac valve opened
2/2/2012	2:21:02 PM	Helium MFC set to  0.000000
2/2/2012	2:21:02 PM	H2 MFC set to  0.000000
2/2/2012	2:21:02 PM	BCl3 MFC set to  0.000000
2/2/2012	2:21:02 PM	PH3 MFC set to  0.000000
2/2/2012	2:21:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:21:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:21:02 PM	Tube furnace set to 0
2/2/2012	2:21:03 PM	Run finished at 2:21 PM
2/2/2012	2:21:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	2:31:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	2:31:35 PM	Recipe started at 2:31 PM
2/2/2012	2:31:35 PM	Helium valve closed
2/2/2012	2:31:35 PM	H2 valve closed
2/2/2012	2:31:35 PM	BCl3 valve closed
2/2/2012	2:31:35 PM	PH3 valve closed
2/2/2012	2:31:35 PM	SiCl4 pre valve closed
2/2/2012	2:31:35 PM	SiCl4 post valve closed
2/2/2012	2:31:35 PM	Main Vac valve closed
2/2/2012	2:31:35 PM	Bubbler valve closed
2/2/2012	2:31:35 PM	Bypass valve opened
2/2/2012	2:31:35 PM	Helium MFC set to  0.000000
2/2/2012	2:31:35 PM	H2 MFC set to  0.000000
2/2/2012	2:31:35 PM	BCl3 MFC set to  0.000000
2/2/2012	2:31:35 PM	PH3 MFC set to  0.000000
2/2/2012	2:31:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:31:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:31:35 PM	Tube furnace set to 0
2/2/2012	2:31:35 PM	Helium valve closed
2/2/2012	2:31:35 PM	H2 valve closed
2/2/2012	2:31:35 PM	BCl3 valve closed
2/2/2012	2:31:35 PM	PH3 valve closed
2/2/2012	2:31:35 PM	SiCl4 pre valve closed
2/2/2012	2:31:35 PM	SiCl4 post valve closed
2/2/2012	2:31:35 PM	Main Vac valve closed
2/2/2012	2:31:35 PM	Bubbler valve closed
2/2/2012	2:31:35 PM	Bypass valve opened
2/2/2012	2:31:35 PM	Helium MFC set to  0.000000
2/2/2012	2:31:35 PM	H2 MFC set to  0.000000
2/2/2012	2:31:35 PM	BCl3 MFC set to  0.000000
2/2/2012	2:31:35 PM	PH3 MFC set to  0.000000
2/2/2012	2:31:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:31:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:31:36 PM	Tube furnace set to 0
2/2/2012	2:31:57 PM	Helium valve closed
2/2/2012	2:31:57 PM	H2 valve closed
2/2/2012	2:31:57 PM	BCl3 valve closed
2/2/2012	2:31:57 PM	PH3 valve closed
2/2/2012	2:31:57 PM	SiCl4 pre valve closed
2/2/2012	2:31:57 PM	SiCl4 post valve closed
2/2/2012	2:31:57 PM	Bypass valve closed
2/2/2012	2:31:57 PM	Bubbler valve closed
2/2/2012	2:31:57 PM	Main Vac valve opened
2/2/2012	2:31:57 PM	Helium MFC set to  0.000000
2/2/2012	2:31:57 PM	H2 MFC set to  0.000000
2/2/2012	2:31:57 PM	BCl3 MFC set to  0.000000
2/2/2012	2:31:57 PM	PH3 MFC set to  0.000000
2/2/2012	2:31:57 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:31:57 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:31:57 PM	Tube furnace set to 0
2/2/2012	2:32:27 PM	H2 valve closed
2/2/2012	2:32:27 PM	BCl3 valve closed
2/2/2012	2:32:27 PM	PH3 valve closed
2/2/2012	2:32:27 PM	SiCl4 pre valve closed
2/2/2012	2:32:28 PM	SiCl4 post valve closed
2/2/2012	2:32:28 PM	Bypass valve closed
2/2/2012	2:32:28 PM	Bubbler valve closed
2/2/2012	2:32:28 PM	Helium valve opened
2/2/2012	2:32:28 PM	Main Vac valve opened
2/2/2012	2:32:28 PM	Helium MFC set to  20.000000
2/2/2012	2:32:28 PM	H2 MFC set to  0.000000
2/2/2012	2:32:28 PM	BCl3 MFC set to  0.000000
2/2/2012	2:32:28 PM	PH3 MFC set to  0.000000
2/2/2012	2:32:28 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:32:28 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:32:28 PM	Tube furnace set to 0
2/2/2012	2:32:58 PM	Helium valve closed
2/2/2012	2:32:58 PM	H2 valve closed
2/2/2012	2:32:58 PM	BCl3 valve closed
2/2/2012	2:32:58 PM	PH3 valve closed
2/2/2012	2:32:58 PM	SiCl4 pre valve closed
2/2/2012	2:32:58 PM	SiCl4 post valve closed
2/2/2012	2:32:58 PM	Bypass valve closed
2/2/2012	2:32:58 PM	Bubbler valve closed
2/2/2012	2:32:58 PM	Main Vac valve opened
2/2/2012	2:32:58 PM	Helium MFC set to  0.000000
2/2/2012	2:32:58 PM	H2 MFC set to  0.000000
2/2/2012	2:32:58 PM	BCl3 MFC set to  0.000000
2/2/2012	2:32:58 PM	PH3 MFC set to  0.000000
2/2/2012	2:32:58 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:32:58 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:32:58 PM	Tube furnace set to 0
2/2/2012	2:33:28 PM	H2 valve closed
2/2/2012	2:33:28 PM	BCl3 valve closed
2/2/2012	2:33:28 PM	PH3 valve closed
2/2/2012	2:33:28 PM	SiCl4 pre valve closed
2/2/2012	2:33:28 PM	SiCl4 post valve closed
2/2/2012	2:33:28 PM	Bypass valve closed
2/2/2012	2:33:28 PM	Bubbler valve closed
2/2/2012	2:33:28 PM	Helium valve opened
2/2/2012	2:33:28 PM	Main Vac valve opened
2/2/2012	2:33:28 PM	Helium MFC set to  20.000000
2/2/2012	2:33:28 PM	H2 MFC set to  0.000000
2/2/2012	2:33:28 PM	BCl3 MFC set to  0.000000
2/2/2012	2:33:28 PM	PH3 MFC set to  0.000000
2/2/2012	2:33:28 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:33:28 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:33:28 PM	Tube furnace set to 0
2/2/2012	2:33:58 PM	Helium valve closed
2/2/2012	2:33:58 PM	H2 valve closed
2/2/2012	2:33:58 PM	BCl3 valve closed
2/2/2012	2:33:58 PM	PH3 valve closed
2/2/2012	2:33:58 PM	SiCl4 pre valve closed
2/2/2012	2:33:58 PM	SiCl4 post valve closed
2/2/2012	2:33:58 PM	Bypass valve closed
2/2/2012	2:33:58 PM	Bubbler valve closed
2/2/2012	2:33:58 PM	Main Vac valve opened
2/2/2012	2:33:58 PM	Helium MFC set to  0.000000
2/2/2012	2:33:58 PM	H2 MFC set to  0.000000
2/2/2012	2:33:58 PM	BCl3 MFC set to  0.000000
2/2/2012	2:33:58 PM	PH3 MFC set to  0.000000
2/2/2012	2:33:58 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:33:58 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:33:58 PM	Tube furnace set to 0
2/2/2012	2:34:28 PM	H2 valve closed
2/2/2012	2:34:28 PM	BCl3 valve closed
2/2/2012	2:34:28 PM	PH3 valve closed
2/2/2012	2:34:28 PM	SiCl4 pre valve closed
2/2/2012	2:34:28 PM	SiCl4 post valve closed
2/2/2012	2:34:28 PM	Bypass valve closed
2/2/2012	2:34:28 PM	Bubbler valve closed
2/2/2012	2:34:28 PM	Helium valve opened
2/2/2012	2:34:28 PM	Main Vac valve opened
2/2/2012	2:34:28 PM	Helium MFC set to  20.000000
2/2/2012	2:34:28 PM	H2 MFC set to  0.000000
2/2/2012	2:34:28 PM	BCl3 MFC set to  0.000000
2/2/2012	2:34:28 PM	PH3 MFC set to  0.000000
2/2/2012	2:34:28 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:34:28 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:34:28 PM	Tube furnace set to 0
2/2/2012	2:34:59 PM	Helium valve closed
2/2/2012	2:34:59 PM	H2 valve closed
2/2/2012	2:34:59 PM	BCl3 valve closed
2/2/2012	2:34:59 PM	PH3 valve closed
2/2/2012	2:34:59 PM	SiCl4 pre valve closed
2/2/2012	2:34:59 PM	SiCl4 post valve closed
2/2/2012	2:34:59 PM	Bypass valve closed
2/2/2012	2:34:59 PM	Bubbler valve closed
2/2/2012	2:34:59 PM	Main Vac valve opened
2/2/2012	2:34:59 PM	Helium MFC set to  0.000000
2/2/2012	2:34:59 PM	H2 MFC set to  0.000000
2/2/2012	2:34:59 PM	BCl3 MFC set to  0.000000
2/2/2012	2:34:59 PM	PH3 MFC set to  0.000000
2/2/2012	2:34:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:34:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:34:59 PM	Tube furnace set to 0
2/2/2012	2:35:29 PM	H2 valve closed
2/2/2012	2:35:29 PM	BCl3 valve closed
2/2/2012	2:35:29 PM	PH3 valve closed
2/2/2012	2:35:29 PM	SiCl4 pre valve closed
2/2/2012	2:35:29 PM	SiCl4 post valve closed
2/2/2012	2:35:29 PM	Bypass valve closed
2/2/2012	2:35:29 PM	Bubbler valve closed
2/2/2012	2:35:29 PM	Helium valve opened
2/2/2012	2:35:29 PM	Main Vac valve opened
2/2/2012	2:35:29 PM	Helium MFC set to  20.000000
2/2/2012	2:35:29 PM	H2 MFC set to  0.000000
2/2/2012	2:35:29 PM	BCl3 MFC set to  0.000000
2/2/2012	2:35:29 PM	PH3 MFC set to  0.000000
2/2/2012	2:35:29 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:35:29 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:35:29 PM	Tube furnace set to 0
2/2/2012	2:35:59 PM	Helium valve closed
2/2/2012	2:35:59 PM	H2 valve closed
2/2/2012	2:35:59 PM	BCl3 valve closed
2/2/2012	2:35:59 PM	PH3 valve closed
2/2/2012	2:35:59 PM	SiCl4 pre valve closed
2/2/2012	2:35:59 PM	SiCl4 post valve closed
2/2/2012	2:35:59 PM	Bypass valve closed
2/2/2012	2:35:59 PM	Bubbler valve closed
2/2/2012	2:35:59 PM	Main Vac valve opened
2/2/2012	2:35:59 PM	Helium MFC set to  0.000000
2/2/2012	2:35:59 PM	H2 MFC set to  0.000000
2/2/2012	2:35:59 PM	BCl3 MFC set to  0.000000
2/2/2012	2:35:59 PM	PH3 MFC set to  0.000000
2/2/2012	2:35:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:35:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:35:59 PM	Tube furnace set to 0
2/2/2012	2:36:29 PM	H2 valve closed
2/2/2012	2:36:29 PM	BCl3 valve closed
2/2/2012	2:36:29 PM	PH3 valve closed
2/2/2012	2:36:29 PM	SiCl4 pre valve closed
2/2/2012	2:36:29 PM	SiCl4 post valve closed
2/2/2012	2:36:29 PM	Bypass valve closed
2/2/2012	2:36:29 PM	Bubbler valve closed
2/2/2012	2:36:29 PM	Helium valve opened
2/2/2012	2:36:29 PM	Main Vac valve opened
2/2/2012	2:36:29 PM	Helium MFC set to  20.000000
2/2/2012	2:36:29 PM	H2 MFC set to  0.000000
2/2/2012	2:36:29 PM	BCl3 MFC set to  0.000000
2/2/2012	2:36:29 PM	PH3 MFC set to  0.000000
2/2/2012	2:36:29 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:36:29 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:36:29 PM	Tube furnace set to 0
2/2/2012	2:36:59 PM	Helium valve closed
2/2/2012	2:36:59 PM	H2 valve closed
2/2/2012	2:36:59 PM	BCl3 valve closed
2/2/2012	2:36:59 PM	PH3 valve closed
2/2/2012	2:36:59 PM	SiCl4 pre valve closed
2/2/2012	2:36:59 PM	SiCl4 post valve closed
2/2/2012	2:36:59 PM	Bypass valve closed
2/2/2012	2:36:59 PM	Bubbler valve closed
2/2/2012	2:36:59 PM	Main Vac valve opened
2/2/2012	2:36:59 PM	Helium MFC set to  0.000000
2/2/2012	2:36:59 PM	H2 MFC set to  0.000000
2/2/2012	2:36:59 PM	BCl3 MFC set to  0.000000
2/2/2012	2:36:59 PM	PH3 MFC set to  0.000000
2/2/2012	2:36:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:36:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:37:00 PM	Tube furnace set to 0
2/2/2012	2:37:30 PM	H2 valve closed
2/2/2012	2:37:30 PM	BCl3 valve closed
2/2/2012	2:37:30 PM	PH3 valve closed
2/2/2012	2:37:30 PM	SiCl4 pre valve closed
2/2/2012	2:37:30 PM	SiCl4 post valve closed
2/2/2012	2:37:30 PM	Bypass valve closed
2/2/2012	2:37:30 PM	Bubbler valve closed
2/2/2012	2:37:30 PM	Helium valve opened
2/2/2012	2:37:30 PM	Main Vac valve opened
2/2/2012	2:37:30 PM	Helium MFC set to  20.000000
2/2/2012	2:37:30 PM	H2 MFC set to  0.000000
2/2/2012	2:37:30 PM	BCl3 MFC set to  0.000000
2/2/2012	2:37:30 PM	PH3 MFC set to  0.000000
2/2/2012	2:37:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:37:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:37:30 PM	Tube furnace set to 0
2/2/2012	2:38:00 PM	Helium valve closed
2/2/2012	2:38:00 PM	H2 valve closed
2/2/2012	2:38:00 PM	BCl3 valve closed
2/2/2012	2:38:00 PM	PH3 valve closed
2/2/2012	2:38:00 PM	SiCl4 pre valve closed
2/2/2012	2:38:00 PM	SiCl4 post valve closed
2/2/2012	2:38:00 PM	Bypass valve closed
2/2/2012	2:38:00 PM	Bubbler valve closed
2/2/2012	2:38:00 PM	Main Vac valve opened
2/2/2012	2:38:00 PM	Helium MFC set to  0.000000
2/2/2012	2:38:00 PM	H2 MFC set to  0.000000
2/2/2012	2:38:00 PM	BCl3 MFC set to  0.000000
2/2/2012	2:38:00 PM	PH3 MFC set to  0.000000
2/2/2012	2:38:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:38:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:38:00 PM	Tube furnace set to 0
2/2/2012	2:38:30 PM	H2 valve closed
2/2/2012	2:38:30 PM	BCl3 valve closed
2/2/2012	2:38:30 PM	PH3 valve closed
2/2/2012	2:38:30 PM	SiCl4 pre valve closed
2/2/2012	2:38:30 PM	SiCl4 post valve closed
2/2/2012	2:38:30 PM	Bypass valve closed
2/2/2012	2:38:30 PM	Bubbler valve closed
2/2/2012	2:38:30 PM	Helium valve opened
2/2/2012	2:38:30 PM	Main Vac valve opened
2/2/2012	2:38:30 PM	Helium MFC set to  20.000000
2/2/2012	2:38:30 PM	H2 MFC set to  0.000000
2/2/2012	2:38:30 PM	BCl3 MFC set to  0.000000
2/2/2012	2:38:30 PM	PH3 MFC set to  0.000000
2/2/2012	2:38:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:38:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:38:30 PM	Tube furnace set to 0
2/2/2012	2:39:00 PM	Helium valve closed
2/2/2012	2:39:00 PM	H2 valve closed
2/2/2012	2:39:00 PM	BCl3 valve closed
2/2/2012	2:39:00 PM	PH3 valve closed
2/2/2012	2:39:00 PM	SiCl4 pre valve closed
2/2/2012	2:39:00 PM	SiCl4 post valve closed
2/2/2012	2:39:00 PM	Bypass valve closed
2/2/2012	2:39:00 PM	Bubbler valve closed
2/2/2012	2:39:00 PM	Main Vac valve opened
2/2/2012	2:39:00 PM	Helium MFC set to  0.000000
2/2/2012	2:39:00 PM	H2 MFC set to  0.000000
2/2/2012	2:39:00 PM	BCl3 MFC set to  0.000000
2/2/2012	2:39:00 PM	PH3 MFC set to  0.000000
2/2/2012	2:39:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:39:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:39:00 PM	Tube furnace set to 0
2/2/2012	2:39:30 PM	H2 valve closed
2/2/2012	2:39:30 PM	BCl3 valve closed
2/2/2012	2:39:30 PM	PH3 valve closed
2/2/2012	2:39:30 PM	SiCl4 pre valve closed
2/2/2012	2:39:30 PM	SiCl4 post valve closed
2/2/2012	2:39:30 PM	Bypass valve closed
2/2/2012	2:39:30 PM	Bubbler valve closed
2/2/2012	2:39:30 PM	Helium valve opened
2/2/2012	2:39:30 PM	Main Vac valve opened
2/2/2012	2:39:30 PM	Helium MFC set to  20.000000
2/2/2012	2:39:30 PM	H2 MFC set to  0.000000
2/2/2012	2:39:30 PM	BCl3 MFC set to  0.000000
2/2/2012	2:39:30 PM	PH3 MFC set to  0.000000
2/2/2012	2:39:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:39:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:39:31 PM	Tube furnace set to 0
2/2/2012	2:40:01 PM	Helium valve closed
2/2/2012	2:40:01 PM	H2 valve closed
2/2/2012	2:40:01 PM	BCl3 valve closed
2/2/2012	2:40:01 PM	PH3 valve closed
2/2/2012	2:40:01 PM	SiCl4 pre valve closed
2/2/2012	2:40:01 PM	SiCl4 post valve closed
2/2/2012	2:40:01 PM	Bypass valve closed
2/2/2012	2:40:01 PM	Bubbler valve closed
2/2/2012	2:40:01 PM	Main Vac valve opened
2/2/2012	2:40:01 PM	Helium MFC set to  0.000000
2/2/2012	2:40:01 PM	H2 MFC set to  0.000000
2/2/2012	2:40:01 PM	BCl3 MFC set to  0.000000
2/2/2012	2:40:01 PM	PH3 MFC set to  0.000000
2/2/2012	2:40:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:40:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:40:01 PM	Tube furnace set to 0
2/2/2012	2:40:31 PM	H2 valve closed
2/2/2012	2:40:31 PM	BCl3 valve closed
2/2/2012	2:40:31 PM	PH3 valve closed
2/2/2012	2:40:31 PM	SiCl4 pre valve closed
2/2/2012	2:40:31 PM	SiCl4 post valve closed
2/2/2012	2:40:31 PM	Bypass valve closed
2/2/2012	2:40:31 PM	Bubbler valve closed
2/2/2012	2:40:31 PM	Helium valve opened
2/2/2012	2:40:31 PM	Main Vac valve opened
2/2/2012	2:40:31 PM	Helium MFC set to  20.000000
2/2/2012	2:40:31 PM	H2 MFC set to  0.000000
2/2/2012	2:40:31 PM	BCl3 MFC set to  0.000000
2/2/2012	2:40:31 PM	PH3 MFC set to  0.000000
2/2/2012	2:40:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:40:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:40:31 PM	Tube furnace set to 0
2/2/2012	2:41:01 PM	Helium valve closed
2/2/2012	2:41:01 PM	H2 valve closed
2/2/2012	2:41:01 PM	BCl3 valve closed
2/2/2012	2:41:01 PM	PH3 valve closed
2/2/2012	2:41:01 PM	SiCl4 pre valve closed
2/2/2012	2:41:01 PM	SiCl4 post valve closed
2/2/2012	2:41:01 PM	Bypass valve closed
2/2/2012	2:41:01 PM	Bubbler valve closed
2/2/2012	2:41:01 PM	Main Vac valve opened
2/2/2012	2:41:01 PM	Helium MFC set to  0.000000
2/2/2012	2:41:01 PM	H2 MFC set to  0.000000
2/2/2012	2:41:01 PM	BCl3 MFC set to  0.000000
2/2/2012	2:41:01 PM	PH3 MFC set to  0.000000
2/2/2012	2:41:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:41:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:41:01 PM	Tube furnace set to 0
2/2/2012	2:41:31 PM	H2 valve closed
2/2/2012	2:41:31 PM	BCl3 valve closed
2/2/2012	2:41:31 PM	PH3 valve closed
2/2/2012	2:41:31 PM	SiCl4 pre valve closed
2/2/2012	2:41:31 PM	SiCl4 post valve closed
2/2/2012	2:41:31 PM	Bypass valve closed
2/2/2012	2:41:31 PM	Bubbler valve closed
2/2/2012	2:41:31 PM	Helium valve opened
2/2/2012	2:41:31 PM	Main Vac valve opened
2/2/2012	2:41:31 PM	Helium MFC set to  20.000000
2/2/2012	2:41:31 PM	H2 MFC set to  0.000000
2/2/2012	2:41:31 PM	BCl3 MFC set to  0.000000
2/2/2012	2:41:31 PM	PH3 MFC set to  0.000000
2/2/2012	2:41:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:41:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:41:31 PM	Tube furnace set to 0
2/2/2012	2:42:01 PM	Helium valve closed
2/2/2012	2:42:01 PM	H2 valve closed
2/2/2012	2:42:01 PM	BCl3 valve closed
2/2/2012	2:42:01 PM	PH3 valve closed
2/2/2012	2:42:01 PM	SiCl4 pre valve closed
2/2/2012	2:42:02 PM	SiCl4 post valve closed
2/2/2012	2:42:02 PM	Bypass valve closed
2/2/2012	2:42:02 PM	Bubbler valve closed
2/2/2012	2:42:02 PM	Main Vac valve opened
2/2/2012	2:42:02 PM	Helium MFC set to  0.000000
2/2/2012	2:42:02 PM	H2 MFC set to  0.000000
2/2/2012	2:42:02 PM	BCl3 MFC set to  0.000000
2/2/2012	2:42:02 PM	PH3 MFC set to  0.000000
2/2/2012	2:42:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:42:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:42:02 PM	Tube furnace set to 0
2/2/2012	2:42:03 PM	Run finished at 2:42 PM
2/2/2012	2:42:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	2:42:37 PM	Main Vac valve closed
2/2/2012	2:42:45 PM	Main Vac valve opened
2/2/2012	2:42:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	2:43:00 PM	Recipe started at 2:42 PM
2/2/2012	2:43:00 PM	Helium valve closed
2/2/2012	2:43:00 PM	H2 valve closed
2/2/2012	2:43:00 PM	BCl3 valve closed
2/2/2012	2:43:00 PM	PH3 valve closed
2/2/2012	2:43:00 PM	SiCl4 pre valve closed
2/2/2012	2:43:00 PM	SiCl4 post valve closed
2/2/2012	2:43:00 PM	Main Vac valve closed
2/2/2012	2:43:00 PM	Bubbler valve closed
2/2/2012	2:43:00 PM	Bypass valve opened
2/2/2012	2:43:00 PM	Helium MFC set to  0.000000
2/2/2012	2:43:00 PM	H2 MFC set to  0.000000
2/2/2012	2:43:00 PM	BCl3 MFC set to  0.000000
2/2/2012	2:43:00 PM	PH3 MFC set to  0.000000
2/2/2012	2:43:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:43:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:43:00 PM	Tube furnace set to 0
2/2/2012	2:43:00 PM	Helium valve closed
2/2/2012	2:43:00 PM	H2 valve closed
2/2/2012	2:43:00 PM	BCl3 valve closed
2/2/2012	2:43:00 PM	PH3 valve closed
2/2/2012	2:43:00 PM	SiCl4 pre valve closed
2/2/2012	2:43:00 PM	SiCl4 post valve closed
2/2/2012	2:43:00 PM	Main Vac valve closed
2/2/2012	2:43:00 PM	Bubbler valve closed
2/2/2012	2:43:00 PM	Bypass valve opened
2/2/2012	2:43:00 PM	Helium MFC set to  0.000000
2/2/2012	2:43:00 PM	H2 MFC set to  0.000000
2/2/2012	2:43:00 PM	BCl3 MFC set to  0.000000
2/2/2012	2:43:00 PM	PH3 MFC set to  0.000000
2/2/2012	2:43:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:43:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:43:00 PM	Tube furnace set to 0
2/2/2012	2:43:03 PM	Helium valve closed
2/2/2012	2:43:03 PM	H2 valve closed
2/2/2012	2:43:03 PM	BCl3 valve closed
2/2/2012	2:43:03 PM	PH3 valve closed
2/2/2012	2:43:03 PM	SiCl4 pre valve closed
2/2/2012	2:43:03 PM	SiCl4 post valve closed
2/2/2012	2:43:03 PM	Bypass valve closed
2/2/2012	2:43:03 PM	Bubbler valve closed
2/2/2012	2:43:03 PM	Main Vac valve opened
2/2/2012	2:43:03 PM	Helium MFC set to  0.000000
2/2/2012	2:43:03 PM	H2 MFC set to  0.000000
2/2/2012	2:43:03 PM	BCl3 MFC set to  0.000000
2/2/2012	2:43:03 PM	PH3 MFC set to  0.000000
2/2/2012	2:43:03 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:43:03 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:43:04 PM	Tube furnace set to 0
2/2/2012	2:43:34 PM	H2 valve closed
2/2/2012	2:43:34 PM	BCl3 valve closed
2/2/2012	2:43:34 PM	PH3 valve closed
2/2/2012	2:43:34 PM	SiCl4 pre valve closed
2/2/2012	2:43:34 PM	SiCl4 post valve closed
2/2/2012	2:43:34 PM	Bypass valve closed
2/2/2012	2:43:34 PM	Bubbler valve closed
2/2/2012	2:43:34 PM	Helium valve opened
2/2/2012	2:43:34 PM	Main Vac valve opened
2/2/2012	2:43:34 PM	Helium MFC set to  20.000000
2/2/2012	2:43:34 PM	H2 MFC set to  0.000000
2/2/2012	2:43:34 PM	BCl3 MFC set to  0.000000
2/2/2012	2:43:34 PM	PH3 MFC set to  0.000000
2/2/2012	2:43:34 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:43:34 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:43:34 PM	Tube furnace set to 0
2/2/2012	2:44:04 PM	Helium valve closed
2/2/2012	2:44:04 PM	H2 valve closed
2/2/2012	2:44:04 PM	BCl3 valve closed
2/2/2012	2:44:04 PM	PH3 valve closed
2/2/2012	2:44:04 PM	SiCl4 pre valve closed
2/2/2012	2:44:04 PM	SiCl4 post valve closed
2/2/2012	2:44:04 PM	Bypass valve closed
2/2/2012	2:44:04 PM	Bubbler valve closed
2/2/2012	2:44:04 PM	Main Vac valve opened
2/2/2012	2:44:04 PM	Helium MFC set to  0.000000
2/2/2012	2:44:04 PM	H2 MFC set to  0.000000
2/2/2012	2:44:04 PM	BCl3 MFC set to  0.000000
2/2/2012	2:44:04 PM	PH3 MFC set to  0.000000
2/2/2012	2:44:04 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:44:04 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:44:04 PM	Tube furnace set to 0
2/2/2012	2:44:34 PM	H2 valve closed
2/2/2012	2:44:34 PM	BCl3 valve closed
2/2/2012	2:44:34 PM	PH3 valve closed
2/2/2012	2:44:34 PM	SiCl4 pre valve closed
2/2/2012	2:44:34 PM	SiCl4 post valve closed
2/2/2012	2:44:34 PM	Bypass valve closed
2/2/2012	2:44:34 PM	Bubbler valve closed
2/2/2012	2:44:34 PM	Helium valve opened
2/2/2012	2:44:34 PM	Main Vac valve opened
2/2/2012	2:44:34 PM	Helium MFC set to  20.000000
2/2/2012	2:44:34 PM	H2 MFC set to  0.000000
2/2/2012	2:44:34 PM	BCl3 MFC set to  0.000000
2/2/2012	2:44:34 PM	PH3 MFC set to  0.000000
2/2/2012	2:44:34 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:44:34 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:44:34 PM	Tube furnace set to 0
2/2/2012	2:45:04 PM	Helium valve closed
2/2/2012	2:45:04 PM	H2 valve closed
2/2/2012	2:45:04 PM	BCl3 valve closed
2/2/2012	2:45:04 PM	PH3 valve closed
2/2/2012	2:45:04 PM	SiCl4 pre valve closed
2/2/2012	2:45:04 PM	SiCl4 post valve closed
2/2/2012	2:45:04 PM	Bypass valve closed
2/2/2012	2:45:04 PM	Bubbler valve closed
2/2/2012	2:45:04 PM	Main Vac valve opened
2/2/2012	2:45:04 PM	Helium MFC set to  0.000000
2/2/2012	2:45:04 PM	H2 MFC set to  0.000000
2/2/2012	2:45:04 PM	BCl3 MFC set to  0.000000
2/2/2012	2:45:04 PM	PH3 MFC set to  0.000000
2/2/2012	2:45:04 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:45:04 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:45:04 PM	Tube furnace set to 0
2/2/2012	2:45:34 PM	H2 valve closed
2/2/2012	2:45:34 PM	BCl3 valve closed
2/2/2012	2:45:34 PM	PH3 valve closed
2/2/2012	2:45:34 PM	SiCl4 pre valve closed
2/2/2012	2:45:34 PM	SiCl4 post valve closed
2/2/2012	2:45:34 PM	Bypass valve closed
2/2/2012	2:45:34 PM	Bubbler valve closed
2/2/2012	2:45:34 PM	Helium valve opened
2/2/2012	2:45:34 PM	Main Vac valve opened
2/2/2012	2:45:34 PM	Helium MFC set to  20.000000
2/2/2012	2:45:34 PM	H2 MFC set to  0.000000
2/2/2012	2:45:34 PM	BCl3 MFC set to  0.000000
2/2/2012	2:45:34 PM	PH3 MFC set to  0.000000
2/2/2012	2:45:34 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:45:34 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:45:35 PM	Tube furnace set to 0
2/2/2012	2:46:05 PM	Helium valve closed
2/2/2012	2:46:05 PM	H2 valve closed
2/2/2012	2:46:05 PM	BCl3 valve closed
2/2/2012	2:46:05 PM	PH3 valve closed
2/2/2012	2:46:05 PM	SiCl4 pre valve closed
2/2/2012	2:46:05 PM	SiCl4 post valve closed
2/2/2012	2:46:05 PM	Bypass valve closed
2/2/2012	2:46:05 PM	Bubbler valve closed
2/2/2012	2:46:05 PM	Main Vac valve opened
2/2/2012	2:46:05 PM	Helium MFC set to  0.000000
2/2/2012	2:46:05 PM	H2 MFC set to  0.000000
2/2/2012	2:46:05 PM	BCl3 MFC set to  0.000000
2/2/2012	2:46:05 PM	PH3 MFC set to  0.000000
2/2/2012	2:46:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:46:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:46:05 PM	Tube furnace set to 0
2/2/2012	2:46:35 PM	H2 valve closed
2/2/2012	2:46:35 PM	BCl3 valve closed
2/2/2012	2:46:35 PM	PH3 valve closed
2/2/2012	2:46:35 PM	SiCl4 pre valve closed
2/2/2012	2:46:35 PM	SiCl4 post valve closed
2/2/2012	2:46:35 PM	Bypass valve closed
2/2/2012	2:46:35 PM	Bubbler valve closed
2/2/2012	2:46:35 PM	Helium valve opened
2/2/2012	2:46:35 PM	Main Vac valve opened
2/2/2012	2:46:35 PM	Helium MFC set to  20.000000
2/2/2012	2:46:35 PM	H2 MFC set to  0.000000
2/2/2012	2:46:35 PM	BCl3 MFC set to  0.000000
2/2/2012	2:46:35 PM	PH3 MFC set to  0.000000
2/2/2012	2:46:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:46:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:46:35 PM	Tube furnace set to 0
2/2/2012	2:47:05 PM	Helium valve closed
2/2/2012	2:47:05 PM	H2 valve closed
2/2/2012	2:47:05 PM	BCl3 valve closed
2/2/2012	2:47:05 PM	PH3 valve closed
2/2/2012	2:47:05 PM	SiCl4 pre valve closed
2/2/2012	2:47:05 PM	SiCl4 post valve closed
2/2/2012	2:47:05 PM	Bypass valve closed
2/2/2012	2:47:05 PM	Bubbler valve closed
2/2/2012	2:47:05 PM	Main Vac valve opened
2/2/2012	2:47:05 PM	Helium MFC set to  0.000000
2/2/2012	2:47:05 PM	H2 MFC set to  0.000000
2/2/2012	2:47:05 PM	BCl3 MFC set to  0.000000
2/2/2012	2:47:05 PM	PH3 MFC set to  0.000000
2/2/2012	2:47:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:47:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:47:05 PM	Tube furnace set to 0
2/2/2012	2:47:35 PM	H2 valve closed
2/2/2012	2:47:35 PM	BCl3 valve closed
2/2/2012	2:47:35 PM	PH3 valve closed
2/2/2012	2:47:35 PM	SiCl4 pre valve closed
2/2/2012	2:47:35 PM	SiCl4 post valve closed
2/2/2012	2:47:35 PM	Bypass valve closed
2/2/2012	2:47:35 PM	Bubbler valve closed
2/2/2012	2:47:35 PM	Helium valve opened
2/2/2012	2:47:35 PM	Main Vac valve opened
2/2/2012	2:47:35 PM	Helium MFC set to  20.000000
2/2/2012	2:47:35 PM	H2 MFC set to  0.000000
2/2/2012	2:47:35 PM	BCl3 MFC set to  0.000000
2/2/2012	2:47:35 PM	PH3 MFC set to  0.000000
2/2/2012	2:47:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:47:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:47:35 PM	Tube furnace set to 0
2/2/2012	2:48:05 PM	Helium valve closed
2/2/2012	2:48:05 PM	H2 valve closed
2/2/2012	2:48:05 PM	BCl3 valve closed
2/2/2012	2:48:05 PM	PH3 valve closed
2/2/2012	2:48:05 PM	SiCl4 pre valve closed
2/2/2012	2:48:05 PM	SiCl4 post valve closed
2/2/2012	2:48:05 PM	Bypass valve closed
2/2/2012	2:48:05 PM	Bubbler valve closed
2/2/2012	2:48:05 PM	Main Vac valve opened
2/2/2012	2:48:05 PM	Helium MFC set to  0.000000
2/2/2012	2:48:05 PM	H2 MFC set to  0.000000
2/2/2012	2:48:05 PM	BCl3 MFC set to  0.000000
2/2/2012	2:48:05 PM	PH3 MFC set to  0.000000
2/2/2012	2:48:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:48:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:48:06 PM	Tube furnace set to 0
2/2/2012	2:48:36 PM	H2 valve closed
2/2/2012	2:48:36 PM	BCl3 valve closed
2/2/2012	2:48:36 PM	PH3 valve closed
2/2/2012	2:48:36 PM	SiCl4 pre valve closed
2/2/2012	2:48:36 PM	SiCl4 post valve closed
2/2/2012	2:48:36 PM	Bypass valve closed
2/2/2012	2:48:36 PM	Bubbler valve closed
2/2/2012	2:48:36 PM	Helium valve opened
2/2/2012	2:48:36 PM	Main Vac valve opened
2/2/2012	2:48:36 PM	Helium MFC set to  20.000000
2/2/2012	2:48:36 PM	H2 MFC set to  0.000000
2/2/2012	2:48:36 PM	BCl3 MFC set to  0.000000
2/2/2012	2:48:36 PM	PH3 MFC set to  0.000000
2/2/2012	2:48:36 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:48:36 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:48:36 PM	Tube furnace set to 0
2/2/2012	2:49:06 PM	Helium valve closed
2/2/2012	2:49:06 PM	H2 valve closed
2/2/2012	2:49:06 PM	BCl3 valve closed
2/2/2012	2:49:06 PM	PH3 valve closed
2/2/2012	2:49:06 PM	SiCl4 pre valve closed
2/2/2012	2:49:06 PM	SiCl4 post valve closed
2/2/2012	2:49:06 PM	Bypass valve closed
2/2/2012	2:49:06 PM	Bubbler valve closed
2/2/2012	2:49:06 PM	Main Vac valve opened
2/2/2012	2:49:06 PM	Helium MFC set to  0.000000
2/2/2012	2:49:06 PM	H2 MFC set to  0.000000
2/2/2012	2:49:06 PM	BCl3 MFC set to  0.000000
2/2/2012	2:49:06 PM	PH3 MFC set to  0.000000
2/2/2012	2:49:06 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:49:06 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:49:06 PM	Tube furnace set to 0
2/2/2012	2:49:36 PM	H2 valve closed
2/2/2012	2:49:36 PM	BCl3 valve closed
2/2/2012	2:49:36 PM	PH3 valve closed
2/2/2012	2:49:36 PM	SiCl4 pre valve closed
2/2/2012	2:49:36 PM	SiCl4 post valve closed
2/2/2012	2:49:36 PM	Bypass valve closed
2/2/2012	2:49:36 PM	Bubbler valve closed
2/2/2012	2:49:36 PM	Helium valve opened
2/2/2012	2:49:36 PM	Main Vac valve opened
2/2/2012	2:49:36 PM	Helium MFC set to  20.000000
2/2/2012	2:49:36 PM	H2 MFC set to  0.000000
2/2/2012	2:49:36 PM	BCl3 MFC set to  0.000000
2/2/2012	2:49:36 PM	PH3 MFC set to  0.000000
2/2/2012	2:49:36 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:49:36 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:49:36 PM	Tube furnace set to 0
2/2/2012	2:50:06 PM	Helium valve closed
2/2/2012	2:50:06 PM	H2 valve closed
2/2/2012	2:50:06 PM	BCl3 valve closed
2/2/2012	2:50:06 PM	PH3 valve closed
2/2/2012	2:50:06 PM	SiCl4 pre valve closed
2/2/2012	2:50:06 PM	SiCl4 post valve closed
2/2/2012	2:50:06 PM	Bypass valve closed
2/2/2012	2:50:06 PM	Bubbler valve closed
2/2/2012	2:50:06 PM	Main Vac valve opened
2/2/2012	2:50:06 PM	Helium MFC set to  0.000000
2/2/2012	2:50:06 PM	H2 MFC set to  0.000000
2/2/2012	2:50:06 PM	BCl3 MFC set to  0.000000
2/2/2012	2:50:06 PM	PH3 MFC set to  0.000000
2/2/2012	2:50:06 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:50:06 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:50:06 PM	Tube furnace set to 0
2/2/2012	2:50:36 PM	H2 valve closed
2/2/2012	2:50:36 PM	BCl3 valve closed
2/2/2012	2:50:36 PM	PH3 valve closed
2/2/2012	2:50:36 PM	SiCl4 pre valve closed
2/2/2012	2:50:36 PM	SiCl4 post valve closed
2/2/2012	2:50:36 PM	Bypass valve closed
2/2/2012	2:50:36 PM	Bubbler valve closed
2/2/2012	2:50:36 PM	Helium valve opened
2/2/2012	2:50:36 PM	Main Vac valve opened
2/2/2012	2:50:36 PM	Helium MFC set to  20.000000
2/2/2012	2:50:36 PM	H2 MFC set to  0.000000
2/2/2012	2:50:36 PM	BCl3 MFC set to  0.000000
2/2/2012	2:50:36 PM	PH3 MFC set to  0.000000
2/2/2012	2:50:36 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:50:36 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:50:37 PM	Tube furnace set to 0
2/2/2012	2:51:07 PM	Helium valve closed
2/2/2012	2:51:07 PM	H2 valve closed
2/2/2012	2:51:07 PM	BCl3 valve closed
2/2/2012	2:51:07 PM	PH3 valve closed
2/2/2012	2:51:07 PM	SiCl4 pre valve closed
2/2/2012	2:51:07 PM	SiCl4 post valve closed
2/2/2012	2:51:07 PM	Bypass valve closed
2/2/2012	2:51:07 PM	Bubbler valve closed
2/2/2012	2:51:07 PM	Main Vac valve opened
2/2/2012	2:51:07 PM	Helium MFC set to  0.000000
2/2/2012	2:51:07 PM	H2 MFC set to  0.000000
2/2/2012	2:51:07 PM	BCl3 MFC set to  0.000000
2/2/2012	2:51:07 PM	PH3 MFC set to  0.000000
2/2/2012	2:51:07 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:51:07 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:51:07 PM	Tube furnace set to 0
2/2/2012	2:51:37 PM	H2 valve closed
2/2/2012	2:51:37 PM	BCl3 valve closed
2/2/2012	2:51:37 PM	PH3 valve closed
2/2/2012	2:51:37 PM	SiCl4 pre valve closed
2/2/2012	2:51:37 PM	SiCl4 post valve closed
2/2/2012	2:51:37 PM	Bypass valve closed
2/2/2012	2:51:37 PM	Bubbler valve closed
2/2/2012	2:51:37 PM	Helium valve opened
2/2/2012	2:51:37 PM	Main Vac valve opened
2/2/2012	2:51:37 PM	Helium MFC set to  20.000000
2/2/2012	2:51:37 PM	H2 MFC set to  0.000000
2/2/2012	2:51:37 PM	BCl3 MFC set to  0.000000
2/2/2012	2:51:37 PM	PH3 MFC set to  0.000000
2/2/2012	2:51:37 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:51:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:51:37 PM	Tube furnace set to 0
2/2/2012	2:52:07 PM	Helium valve closed
2/2/2012	2:52:07 PM	H2 valve closed
2/2/2012	2:52:07 PM	BCl3 valve closed
2/2/2012	2:52:07 PM	PH3 valve closed
2/2/2012	2:52:07 PM	SiCl4 pre valve closed
2/2/2012	2:52:07 PM	SiCl4 post valve closed
2/2/2012	2:52:07 PM	Bypass valve closed
2/2/2012	2:52:07 PM	Bubbler valve closed
2/2/2012	2:52:07 PM	Main Vac valve opened
2/2/2012	2:52:07 PM	Helium MFC set to  0.000000
2/2/2012	2:52:07 PM	H2 MFC set to  0.000000
2/2/2012	2:52:07 PM	BCl3 MFC set to  0.000000
2/2/2012	2:52:07 PM	PH3 MFC set to  0.000000
2/2/2012	2:52:07 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:52:07 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:52:07 PM	Tube furnace set to 0
2/2/2012	2:52:37 PM	H2 valve closed
2/2/2012	2:52:37 PM	BCl3 valve closed
2/2/2012	2:52:37 PM	PH3 valve closed
2/2/2012	2:52:37 PM	SiCl4 pre valve closed
2/2/2012	2:52:37 PM	SiCl4 post valve closed
2/2/2012	2:52:37 PM	Bypass valve closed
2/2/2012	2:52:37 PM	Bubbler valve closed
2/2/2012	2:52:37 PM	Helium valve opened
2/2/2012	2:52:37 PM	Main Vac valve opened
2/2/2012	2:52:37 PM	Helium MFC set to  20.000000
2/2/2012	2:52:37 PM	H2 MFC set to  0.000000
2/2/2012	2:52:37 PM	BCl3 MFC set to  0.000000
2/2/2012	2:52:37 PM	PH3 MFC set to  0.000000
2/2/2012	2:52:37 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:52:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:52:37 PM	Tube furnace set to 0
2/2/2012	2:53:07 PM	Helium valve closed
2/2/2012	2:53:07 PM	H2 valve closed
2/2/2012	2:53:07 PM	BCl3 valve closed
2/2/2012	2:53:07 PM	PH3 valve closed
2/2/2012	2:53:07 PM	SiCl4 pre valve closed
2/2/2012	2:53:07 PM	SiCl4 post valve closed
2/2/2012	2:53:07 PM	Bypass valve closed
2/2/2012	2:53:07 PM	Bubbler valve closed
2/2/2012	2:53:07 PM	Main Vac valve opened
2/2/2012	2:53:07 PM	Helium MFC set to  0.000000
2/2/2012	2:53:07 PM	H2 MFC set to  0.000000
2/2/2012	2:53:07 PM	BCl3 MFC set to  0.000000
2/2/2012	2:53:07 PM	PH3 MFC set to  0.000000
2/2/2012	2:53:07 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:53:07 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:53:08 PM	Tube furnace set to 0
2/2/2012	2:53:09 PM	Run finished at 2:53 PM
2/2/2012	2:53:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	2:55:26 PM	Main Vac valve closed
2/2/2012	2:55:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	2:55:52 PM	Recipe started at 2:55 PM
2/2/2012	2:55:52 PM	Helium valve closed
2/2/2012	2:55:52 PM	H2 valve closed
2/2/2012	2:55:52 PM	BCl3 valve closed
2/2/2012	2:55:53 PM	PH3 valve closed
2/2/2012	2:55:53 PM	SiCl4 pre valve closed
2/2/2012	2:55:53 PM	SiCl4 post valve closed
2/2/2012	2:55:53 PM	Main Vac valve closed
2/2/2012	2:55:53 PM	Bubbler valve closed
2/2/2012	2:55:53 PM	Bypass valve opened
2/2/2012	2:55:53 PM	Helium MFC set to  0.000000
2/2/2012	2:55:53 PM	H2 MFC set to  0.000000
2/2/2012	2:55:53 PM	BCl3 MFC set to  0.000000
2/2/2012	2:55:53 PM	PH3 MFC set to  0.000000
2/2/2012	2:55:53 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:55:53 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:55:53 PM	Tube furnace set to 0
2/2/2012	2:55:53 PM	Helium valve closed
2/2/2012	2:55:53 PM	H2 valve closed
2/2/2012	2:55:53 PM	BCl3 valve closed
2/2/2012	2:55:53 PM	PH3 valve closed
2/2/2012	2:55:53 PM	SiCl4 pre valve closed
2/2/2012	2:55:53 PM	SiCl4 post valve closed
2/2/2012	2:55:53 PM	Main Vac valve closed
2/2/2012	2:55:53 PM	Bubbler valve closed
2/2/2012	2:55:53 PM	Bypass valve opened
2/2/2012	2:55:53 PM	Helium MFC set to  0.000000
2/2/2012	2:55:53 PM	H2 MFC set to  0.000000
2/2/2012	2:55:53 PM	BCl3 MFC set to  0.000000
2/2/2012	2:55:53 PM	PH3 MFC set to  0.000000
2/2/2012	2:55:53 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:55:53 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:55:53 PM	Tube furnace set to 0
2/2/2012	2:55:53 PM	Helium valve closed
2/2/2012	2:55:53 PM	H2 valve closed
2/2/2012	2:55:53 PM	BCl3 valve closed
2/2/2012	2:55:53 PM	PH3 valve closed
2/2/2012	2:55:53 PM	SiCl4 pre valve closed
2/2/2012	2:55:53 PM	SiCl4 post valve closed
2/2/2012	2:55:53 PM	Bypass valve closed
2/2/2012	2:55:53 PM	Bubbler valve closed
2/2/2012	2:55:53 PM	Main Vac valve opened
2/2/2012	2:55:53 PM	Helium MFC set to  0.000000
2/2/2012	2:55:53 PM	H2 MFC set to  0.000000
2/2/2012	2:55:53 PM	BCl3 MFC set to  0.000000
2/2/2012	2:55:53 PM	PH3 MFC set to  0.000000
2/2/2012	2:55:53 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:55:53 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:55:54 PM	Tube furnace set to 0
2/2/2012	2:55:54 PM	H2 valve closed
2/2/2012	2:55:54 PM	BCl3 valve closed
2/2/2012	2:55:54 PM	PH3 valve closed
2/2/2012	2:55:54 PM	SiCl4 pre valve closed
2/2/2012	2:55:54 PM	SiCl4 post valve closed
2/2/2012	2:55:54 PM	Bypass valve closed
2/2/2012	2:55:54 PM	Bubbler valve closed
2/2/2012	2:55:54 PM	Helium valve opened
2/2/2012	2:55:54 PM	Main Vac valve opened
2/2/2012	2:55:54 PM	Helium MFC set to  20.000000
2/2/2012	2:55:54 PM	H2 MFC set to  0.000000
2/2/2012	2:55:54 PM	BCl3 MFC set to  0.000000
2/2/2012	2:55:54 PM	PH3 MFC set to  0.000000
2/2/2012	2:55:54 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:55:54 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:55:54 PM	Tube furnace set to 0
2/2/2012	2:56:24 PM	Helium valve closed
2/2/2012	2:56:24 PM	H2 valve closed
2/2/2012	2:56:24 PM	BCl3 valve closed
2/2/2012	2:56:24 PM	PH3 valve closed
2/2/2012	2:56:24 PM	SiCl4 pre valve closed
2/2/2012	2:56:24 PM	SiCl4 post valve closed
2/2/2012	2:56:24 PM	Bypass valve closed
2/2/2012	2:56:24 PM	Bubbler valve closed
2/2/2012	2:56:24 PM	Main Vac valve opened
2/2/2012	2:56:24 PM	Helium MFC set to  0.000000
2/2/2012	2:56:24 PM	H2 MFC set to  0.000000
2/2/2012	2:56:24 PM	BCl3 MFC set to  0.000000
2/2/2012	2:56:24 PM	PH3 MFC set to  0.000000
2/2/2012	2:56:24 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:56:24 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:56:24 PM	Tube furnace set to 0
2/2/2012	2:56:54 PM	H2 valve closed
2/2/2012	2:56:54 PM	BCl3 valve closed
2/2/2012	2:56:54 PM	PH3 valve closed
2/2/2012	2:56:54 PM	SiCl4 pre valve closed
2/2/2012	2:56:54 PM	SiCl4 post valve closed
2/2/2012	2:56:54 PM	Bypass valve closed
2/2/2012	2:56:54 PM	Bubbler valve closed
2/2/2012	2:56:54 PM	Helium valve opened
2/2/2012	2:56:54 PM	Main Vac valve opened
2/2/2012	2:56:54 PM	Helium MFC set to  20.000000
2/2/2012	2:56:54 PM	H2 MFC set to  0.000000
2/2/2012	2:56:54 PM	BCl3 MFC set to  0.000000
2/2/2012	2:56:54 PM	PH3 MFC set to  0.000000
2/2/2012	2:56:54 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:56:54 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:56:54 PM	Tube furnace set to 0
2/2/2012	2:57:24 PM	Helium valve closed
2/2/2012	2:57:24 PM	H2 valve closed
2/2/2012	2:57:24 PM	BCl3 valve closed
2/2/2012	2:57:24 PM	PH3 valve closed
2/2/2012	2:57:24 PM	SiCl4 pre valve closed
2/2/2012	2:57:24 PM	SiCl4 post valve closed
2/2/2012	2:57:24 PM	Bypass valve closed
2/2/2012	2:57:24 PM	Bubbler valve closed
2/2/2012	2:57:24 PM	Main Vac valve opened
2/2/2012	2:57:24 PM	Helium MFC set to  0.000000
2/2/2012	2:57:25 PM	H2 MFC set to  0.000000
2/2/2012	2:57:25 PM	BCl3 MFC set to  0.000000
2/2/2012	2:57:25 PM	PH3 MFC set to  0.000000
2/2/2012	2:57:25 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:57:25 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:57:25 PM	Tube furnace set to 0
2/2/2012	2:57:55 PM	H2 valve closed
2/2/2012	2:57:55 PM	BCl3 valve closed
2/2/2012	2:57:55 PM	PH3 valve closed
2/2/2012	2:57:55 PM	SiCl4 pre valve closed
2/2/2012	2:57:55 PM	SiCl4 post valve closed
2/2/2012	2:57:55 PM	Bypass valve closed
2/2/2012	2:57:55 PM	Bubbler valve closed
2/2/2012	2:57:55 PM	Helium valve opened
2/2/2012	2:57:55 PM	Main Vac valve opened
2/2/2012	2:57:55 PM	Helium MFC set to  20.000000
2/2/2012	2:57:55 PM	H2 MFC set to  0.000000
2/2/2012	2:57:55 PM	BCl3 MFC set to  0.000000
2/2/2012	2:57:55 PM	PH3 MFC set to  0.000000
2/2/2012	2:57:55 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:57:55 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:57:55 PM	Tube furnace set to 0
2/2/2012	2:58:25 PM	Helium valve closed
2/2/2012	2:58:25 PM	H2 valve closed
2/2/2012	2:58:25 PM	BCl3 valve closed
2/2/2012	2:58:25 PM	PH3 valve closed
2/2/2012	2:58:25 PM	SiCl4 pre valve closed
2/2/2012	2:58:25 PM	SiCl4 post valve closed
2/2/2012	2:58:25 PM	Bypass valve closed
2/2/2012	2:58:25 PM	Bubbler valve closed
2/2/2012	2:58:25 PM	Main Vac valve opened
2/2/2012	2:58:25 PM	Helium MFC set to  0.000000
2/2/2012	2:58:25 PM	H2 MFC set to  0.000000
2/2/2012	2:58:25 PM	BCl3 MFC set to  0.000000
2/2/2012	2:58:25 PM	PH3 MFC set to  0.000000
2/2/2012	2:58:25 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:58:25 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:58:25 PM	Tube furnace set to 0
2/2/2012	2:58:55 PM	H2 valve closed
2/2/2012	2:58:55 PM	BCl3 valve closed
2/2/2012	2:58:55 PM	PH3 valve closed
2/2/2012	2:58:55 PM	SiCl4 pre valve closed
2/2/2012	2:58:55 PM	SiCl4 post valve closed
2/2/2012	2:58:55 PM	Bypass valve closed
2/2/2012	2:58:55 PM	Bubbler valve closed
2/2/2012	2:58:55 PM	Helium valve opened
2/2/2012	2:58:55 PM	Main Vac valve opened
2/2/2012	2:58:55 PM	Helium MFC set to  20.000000
2/2/2012	2:58:55 PM	H2 MFC set to  0.000000
2/2/2012	2:58:55 PM	BCl3 MFC set to  0.000000
2/2/2012	2:58:55 PM	PH3 MFC set to  0.000000
2/2/2012	2:58:55 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:58:55 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:58:55 PM	Tube furnace set to 0
2/2/2012	2:59:25 PM	Helium valve closed
2/2/2012	2:59:25 PM	H2 valve closed
2/2/2012	2:59:25 PM	BCl3 valve closed
2/2/2012	2:59:25 PM	PH3 valve closed
2/2/2012	2:59:25 PM	SiCl4 pre valve closed
2/2/2012	2:59:25 PM	SiCl4 post valve closed
2/2/2012	2:59:25 PM	Bypass valve closed
2/2/2012	2:59:25 PM	Bubbler valve closed
2/2/2012	2:59:25 PM	Main Vac valve opened
2/2/2012	2:59:25 PM	Helium MFC set to  0.000000
2/2/2012	2:59:25 PM	H2 MFC set to  0.000000
2/2/2012	2:59:25 PM	BCl3 MFC set to  0.000000
2/2/2012	2:59:25 PM	PH3 MFC set to  0.000000
2/2/2012	2:59:25 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:59:25 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:59:25 PM	Tube furnace set to 0
2/2/2012	2:59:56 PM	H2 valve closed
2/2/2012	2:59:56 PM	BCl3 valve closed
2/2/2012	2:59:56 PM	PH3 valve closed
2/2/2012	2:59:56 PM	SiCl4 pre valve closed
2/2/2012	2:59:56 PM	SiCl4 post valve closed
2/2/2012	2:59:56 PM	Bypass valve closed
2/2/2012	2:59:56 PM	Bubbler valve closed
2/2/2012	2:59:56 PM	Helium valve opened
2/2/2012	2:59:56 PM	Main Vac valve opened
2/2/2012	2:59:56 PM	Helium MFC set to  20.000000
2/2/2012	2:59:56 PM	H2 MFC set to  0.000000
2/2/2012	2:59:56 PM	BCl3 MFC set to  0.000000
2/2/2012	2:59:56 PM	PH3 MFC set to  0.000000
2/2/2012	2:59:56 PM	SiCl4 MFC set to  0.000000
2/2/2012	2:59:56 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	2:59:56 PM	Tube furnace set to 0
2/2/2012	3:00:26 PM	Helium valve closed
2/2/2012	3:00:26 PM	H2 valve closed
2/2/2012	3:00:26 PM	BCl3 valve closed
2/2/2012	3:00:26 PM	PH3 valve closed
2/2/2012	3:00:26 PM	SiCl4 pre valve closed
2/2/2012	3:00:26 PM	SiCl4 post valve closed
2/2/2012	3:00:26 PM	Bypass valve closed
2/2/2012	3:00:26 PM	Bubbler valve closed
2/2/2012	3:00:26 PM	Main Vac valve opened
2/2/2012	3:00:26 PM	Helium MFC set to  0.000000
2/2/2012	3:00:26 PM	H2 MFC set to  0.000000
2/2/2012	3:00:26 PM	BCl3 MFC set to  0.000000
2/2/2012	3:00:26 PM	PH3 MFC set to  0.000000
2/2/2012	3:00:26 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:00:26 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:00:26 PM	Tube furnace set to 0
2/2/2012	3:00:56 PM	H2 valve closed
2/2/2012	3:00:56 PM	BCl3 valve closed
2/2/2012	3:00:56 PM	PH3 valve closed
2/2/2012	3:00:56 PM	SiCl4 pre valve closed
2/2/2012	3:00:56 PM	SiCl4 post valve closed
2/2/2012	3:00:56 PM	Bypass valve closed
2/2/2012	3:00:56 PM	Bubbler valve closed
2/2/2012	3:00:56 PM	Helium valve opened
2/2/2012	3:00:56 PM	Main Vac valve opened
2/2/2012	3:00:56 PM	Helium MFC set to  20.000000
2/2/2012	3:00:56 PM	H2 MFC set to  0.000000
2/2/2012	3:00:56 PM	BCl3 MFC set to  0.000000
2/2/2012	3:00:56 PM	PH3 MFC set to  0.000000
2/2/2012	3:00:56 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:00:56 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:00:56 PM	Tube furnace set to 0
2/2/2012	3:01:26 PM	Helium valve closed
2/2/2012	3:01:26 PM	H2 valve closed
2/2/2012	3:01:26 PM	BCl3 valve closed
2/2/2012	3:01:26 PM	PH3 valve closed
2/2/2012	3:01:26 PM	SiCl4 pre valve closed
2/2/2012	3:01:26 PM	SiCl4 post valve closed
2/2/2012	3:01:26 PM	Bypass valve closed
2/2/2012	3:01:26 PM	Bubbler valve closed
2/2/2012	3:01:26 PM	Main Vac valve opened
2/2/2012	3:01:26 PM	Helium MFC set to  0.000000
2/2/2012	3:01:26 PM	H2 MFC set to  0.000000
2/2/2012	3:01:26 PM	BCl3 MFC set to  0.000000
2/2/2012	3:01:26 PM	PH3 MFC set to  0.000000
2/2/2012	3:01:26 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:01:26 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:01:26 PM	Tube furnace set to 0
2/2/2012	3:01:56 PM	H2 valve closed
2/2/2012	3:01:56 PM	BCl3 valve closed
2/2/2012	3:01:56 PM	PH3 valve closed
2/2/2012	3:01:56 PM	SiCl4 pre valve closed
2/2/2012	3:01:56 PM	SiCl4 post valve closed
2/2/2012	3:01:56 PM	Bypass valve closed
2/2/2012	3:01:56 PM	Bubbler valve closed
2/2/2012	3:01:56 PM	Helium valve opened
2/2/2012	3:01:56 PM	Main Vac valve opened
2/2/2012	3:01:56 PM	Helium MFC set to  20.000000
2/2/2012	3:01:56 PM	H2 MFC set to  0.000000
2/2/2012	3:01:56 PM	BCl3 MFC set to  0.000000
2/2/2012	3:01:56 PM	PH3 MFC set to  0.000000
2/2/2012	3:01:56 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:01:56 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:01:57 PM	Tube furnace set to 0
2/2/2012	3:02:27 PM	Helium valve closed
2/2/2012	3:02:27 PM	H2 valve closed
2/2/2012	3:02:27 PM	BCl3 valve closed
2/2/2012	3:02:27 PM	PH3 valve closed
2/2/2012	3:02:27 PM	SiCl4 pre valve closed
2/2/2012	3:02:27 PM	SiCl4 post valve closed
2/2/2012	3:02:27 PM	Bypass valve closed
2/2/2012	3:02:27 PM	Bubbler valve closed
2/2/2012	3:02:27 PM	Main Vac valve opened
2/2/2012	3:02:27 PM	Helium MFC set to  0.000000
2/2/2012	3:02:27 PM	H2 MFC set to  0.000000
2/2/2012	3:02:27 PM	BCl3 MFC set to  0.000000
2/2/2012	3:02:27 PM	PH3 MFC set to  0.000000
2/2/2012	3:02:27 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:02:27 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:02:27 PM	Tube furnace set to 0
2/2/2012	3:02:57 PM	H2 valve closed
2/2/2012	3:02:57 PM	BCl3 valve closed
2/2/2012	3:02:57 PM	PH3 valve closed
2/2/2012	3:02:57 PM	SiCl4 pre valve closed
2/2/2012	3:02:57 PM	SiCl4 post valve closed
2/2/2012	3:02:57 PM	Bypass valve closed
2/2/2012	3:02:57 PM	Bubbler valve closed
2/2/2012	3:02:57 PM	Helium valve opened
2/2/2012	3:02:57 PM	Main Vac valve opened
2/2/2012	3:02:57 PM	Helium MFC set to  20.000000
2/2/2012	3:02:57 PM	H2 MFC set to  0.000000
2/2/2012	3:02:57 PM	BCl3 MFC set to  0.000000
2/2/2012	3:02:57 PM	PH3 MFC set to  0.000000
2/2/2012	3:02:57 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:02:57 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:02:57 PM	Tube furnace set to 0
2/2/2012	3:03:27 PM	Helium valve closed
2/2/2012	3:03:27 PM	H2 valve closed
2/2/2012	3:03:27 PM	BCl3 valve closed
2/2/2012	3:03:27 PM	PH3 valve closed
2/2/2012	3:03:27 PM	SiCl4 pre valve closed
2/2/2012	3:03:27 PM	SiCl4 post valve closed
2/2/2012	3:03:27 PM	Bypass valve closed
2/2/2012	3:03:27 PM	Bubbler valve closed
2/2/2012	3:03:27 PM	Main Vac valve opened
2/2/2012	3:03:27 PM	Helium MFC set to  0.000000
2/2/2012	3:03:27 PM	H2 MFC set to  0.000000
2/2/2012	3:03:27 PM	BCl3 MFC set to  0.000000
2/2/2012	3:03:27 PM	PH3 MFC set to  0.000000
2/2/2012	3:03:27 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:03:27 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:03:27 PM	Tube furnace set to 0
2/2/2012	3:03:57 PM	H2 valve closed
2/2/2012	3:03:57 PM	BCl3 valve closed
2/2/2012	3:03:57 PM	PH3 valve closed
2/2/2012	3:03:57 PM	SiCl4 pre valve closed
2/2/2012	3:03:57 PM	SiCl4 post valve closed
2/2/2012	3:03:57 PM	Bypass valve closed
2/2/2012	3:03:57 PM	Bubbler valve closed
2/2/2012	3:03:57 PM	Helium valve opened
2/2/2012	3:03:57 PM	Main Vac valve opened
2/2/2012	3:03:57 PM	Helium MFC set to  20.000000
2/2/2012	3:03:57 PM	H2 MFC set to  0.000000
2/2/2012	3:03:57 PM	BCl3 MFC set to  0.000000
2/2/2012	3:03:57 PM	PH3 MFC set to  0.000000
2/2/2012	3:03:57 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:03:57 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:03:57 PM	Tube furnace set to 0
2/2/2012	3:04:27 PM	Helium valve closed
2/2/2012	3:04:27 PM	H2 valve closed
2/2/2012	3:04:27 PM	BCl3 valve closed
2/2/2012	3:04:27 PM	PH3 valve closed
2/2/2012	3:04:27 PM	SiCl4 pre valve closed
2/2/2012	3:04:27 PM	SiCl4 post valve closed
2/2/2012	3:04:27 PM	Bypass valve closed
2/2/2012	3:04:27 PM	Bubbler valve closed
2/2/2012	3:04:27 PM	Main Vac valve opened
2/2/2012	3:04:27 PM	Helium MFC set to  0.000000
2/2/2012	3:04:27 PM	H2 MFC set to  0.000000
2/2/2012	3:04:27 PM	BCl3 MFC set to  0.000000
2/2/2012	3:04:27 PM	PH3 MFC set to  0.000000
2/2/2012	3:04:27 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:04:27 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:04:28 PM	Tube furnace set to 0
2/2/2012	3:04:58 PM	H2 valve closed
2/2/2012	3:04:58 PM	BCl3 valve closed
2/2/2012	3:04:58 PM	PH3 valve closed
2/2/2012	3:04:58 PM	SiCl4 pre valve closed
2/2/2012	3:04:58 PM	SiCl4 post valve closed
2/2/2012	3:04:58 PM	Bypass valve closed
2/2/2012	3:04:58 PM	Bubbler valve closed
2/2/2012	3:04:58 PM	Helium valve opened
2/2/2012	3:04:58 PM	Main Vac valve opened
2/2/2012	3:04:58 PM	Helium MFC set to  20.000000
2/2/2012	3:04:58 PM	H2 MFC set to  0.000000
2/2/2012	3:04:58 PM	BCl3 MFC set to  0.000000
2/2/2012	3:04:58 PM	PH3 MFC set to  0.000000
2/2/2012	3:04:58 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:04:58 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:04:58 PM	Tube furnace set to 0
2/2/2012	3:05:28 PM	Helium valve closed
2/2/2012	3:05:28 PM	H2 valve closed
2/2/2012	3:05:28 PM	BCl3 valve closed
2/2/2012	3:05:28 PM	PH3 valve closed
2/2/2012	3:05:28 PM	SiCl4 pre valve closed
2/2/2012	3:05:28 PM	SiCl4 post valve closed
2/2/2012	3:05:28 PM	Bypass valve closed
2/2/2012	3:05:28 PM	Bubbler valve closed
2/2/2012	3:05:28 PM	Main Vac valve opened
2/2/2012	3:05:28 PM	Helium MFC set to  0.000000
2/2/2012	3:05:28 PM	H2 MFC set to  0.000000
2/2/2012	3:05:28 PM	BCl3 MFC set to  0.000000
2/2/2012	3:05:28 PM	PH3 MFC set to  0.000000
2/2/2012	3:05:28 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:05:28 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:05:28 PM	Tube furnace set to 0
2/2/2012	3:05:29 PM	Run finished at 3:05 PM
2/2/2012	3:05:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	3:07:55 PM	Main Vac valve closed
2/2/2012	3:08:04 PM	Main Vac valve opened
2/2/2012	3:09:10 PM	Recipe started at 3:09 PM
2/2/2012	3:09:10 PM	Helium valve closed
2/2/2012	3:09:10 PM	H2 valve closed
2/2/2012	3:09:10 PM	BCl3 valve closed
2/2/2012	3:09:10 PM	PH3 valve closed
2/2/2012	3:09:10 PM	SiCl4 pre valve closed
2/2/2012	3:09:10 PM	SiCl4 post valve closed
2/2/2012	3:09:10 PM	Main Vac valve closed
2/2/2012	3:09:10 PM	Bypass valve closed
2/2/2012	3:09:10 PM	Bubbler valve closed
2/2/2012	3:09:10 PM	Helium MFC set to  0.000000
2/2/2012	3:09:10 PM	H2 MFC set to  0.000000
2/2/2012	3:09:10 PM	BCl3 MFC set to  0.000000
2/2/2012	3:09:10 PM	PH3 MFC set to  0.000000
2/2/2012	3:09:10 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:09:10 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:09:10 PM	Tube furnace set to 0
2/2/2012	3:09:13 PM	Helium valve closed
2/2/2012	3:09:13 PM	BCl3 valve closed
2/2/2012	3:09:13 PM	PH3 valve closed
2/2/2012	3:09:13 PM	SiCl4 pre valve closed
2/2/2012	3:09:13 PM	SiCl4 post valve closed
2/2/2012	3:09:13 PM	Main Vac valve closed
2/2/2012	3:09:13 PM	Bypass valve closed
2/2/2012	3:09:13 PM	Bubbler valve closed
2/2/2012	3:09:13 PM	H2 valve opened
2/2/2012	3:09:13 PM	Helium MFC set to  0.000000
2/2/2012	3:09:13 PM	H2 MFC set to  500.000000
2/2/2012	3:09:13 PM	BCl3 MFC set to  0.000000
2/2/2012	3:09:13 PM	PH3 MFC set to  0.000000
2/2/2012	3:09:13 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:09:13 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:09:14 PM	Tube furnace set to 0
2/2/2012	3:10:23 PM	Helium valve closed
2/2/2012	3:10:23 PM	BCl3 valve closed
2/2/2012	3:10:23 PM	PH3 valve closed
2/2/2012	3:10:23 PM	SiCl4 pre valve closed
2/2/2012	3:10:23 PM	SiCl4 post valve closed
2/2/2012	3:10:23 PM	Main Vac valve closed
2/2/2012	3:10:23 PM	Bypass valve closed
2/2/2012	3:10:23 PM	H2 valve opened
2/2/2012	3:10:23 PM	Bubbler valve opened
2/2/2012	3:10:23 PM	Helium MFC set to  0.000000
2/2/2012	3:10:23 PM	H2 MFC set to  500.000000
2/2/2012	3:10:23 PM	BCl3 MFC set to  0.000000
2/2/2012	3:10:23 PM	PH3 MFC set to  0.000000
2/2/2012	3:10:23 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:10:23 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:10:23 PM	Tube furnace set to 0
2/2/2012	3:10:24 PM	Helium valve closed
2/2/2012	3:10:24 PM	BCl3 valve closed
2/2/2012	3:10:24 PM	PH3 valve closed
2/2/2012	3:10:24 PM	SiCl4 pre valve closed
2/2/2012	3:10:24 PM	SiCl4 post valve closed
2/2/2012	3:10:24 PM	Main Vac valve closed
2/2/2012	3:10:24 PM	Bypass valve closed
2/2/2012	3:10:24 PM	H2 valve opened
2/2/2012	3:10:24 PM	Bubbler valve opened
2/2/2012	3:10:24 PM	Helium MFC set to  0.000000
2/2/2012	3:10:24 PM	H2 MFC set to  500.000000
2/2/2012	3:10:24 PM	BCl3 MFC set to  0.000000
2/2/2012	3:10:24 PM	PH3 MFC set to  0.000000
2/2/2012	3:10:24 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:10:24 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:10:24 PM	Tube furnace set to 1000
2/2/2012	3:30:24 PM	Helium valve closed
2/2/2012	3:30:24 PM	PH3 valve closed
2/2/2012	3:30:24 PM	Main Vac valve closed
2/2/2012	3:30:24 PM	Bypass valve closed
2/2/2012	3:30:24 PM	H2 valve opened
2/2/2012	3:30:24 PM	BCl3 valve opened
2/2/2012	3:30:24 PM	SiCl4 pre valve opened
2/2/2012	3:30:24 PM	SiCl4 post valve opened
2/2/2012	3:30:24 PM	Bubbler valve opened
2/2/2012	3:30:24 PM	Helium MFC set to  0.000000
2/2/2012	3:30:24 PM	H2 MFC set to  500.000000
2/2/2012	3:30:24 PM	BCl3 MFC set to  1.000000
2/2/2012	3:30:24 PM	PH3 MFC set to  0.000000
2/2/2012	3:30:24 PM	SiCl4 MFC set to  25.000000
2/2/2012	3:30:24 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:30:24 PM	Tube furnace set to 1000
2/2/2012	3:50:24 PM	Helium valve closed
2/2/2012	3:50:24 PM	BCl3 valve closed
2/2/2012	3:50:24 PM	PH3 valve closed
2/2/2012	3:50:24 PM	SiCl4 pre valve closed
2/2/2012	3:50:24 PM	SiCl4 post valve closed
2/2/2012	3:50:24 PM	Main Vac valve closed
2/2/2012	3:50:24 PM	Bypass valve closed
2/2/2012	3:50:24 PM	H2 valve opened
2/2/2012	3:50:24 PM	Bubbler valve opened
2/2/2012	3:50:24 PM	Helium MFC set to  0.000000
2/2/2012	3:50:24 PM	H2 MFC set to  500.000000
2/2/2012	3:50:24 PM	BCl3 MFC set to  0.000000
2/2/2012	3:50:24 PM	PH3 MFC set to  0.000000
2/2/2012	3:50:24 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:50:24 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:50:25 PM	Tube furnace set to 750
2/2/2012	3:55:25 PM	H2 valve closed
2/2/2012	3:55:25 PM	BCl3 valve closed
2/2/2012	3:55:25 PM	PH3 valve closed
2/2/2012	3:55:25 PM	SiCl4 pre valve closed
2/2/2012	3:55:25 PM	SiCl4 post valve closed
2/2/2012	3:55:25 PM	Main Vac valve closed
2/2/2012	3:55:25 PM	Bypass valve closed
2/2/2012	3:55:25 PM	Helium valve opened
2/2/2012	3:55:25 PM	Bubbler valve opened
2/2/2012	3:55:25 PM	Helium MFC set to  500.000000
2/2/2012	3:55:25 PM	H2 MFC set to  0.000000
2/2/2012	3:55:25 PM	BCl3 MFC set to  0.000000
2/2/2012	3:55:25 PM	PH3 MFC set to  0.000000
2/2/2012	3:55:25 PM	SiCl4 MFC set to  0.000000
2/2/2012	3:55:25 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	3:55:25 PM	Tube furnace set to 0
2/2/2012	4:02:11 PM	Run aborted at 4:02 PM
2/2/2012	4:02:11 PM	Helium valve closed
2/2/2012	4:02:11 PM	H2 valve closed
2/2/2012	4:02:11 PM	BCl3 valve closed
2/2/2012	4:02:11 PM	PH3 valve closed
2/2/2012	4:02:11 PM	SiCl4 pre valve closed
2/2/2012	4:02:11 PM	SiCl4 post valve closed
2/2/2012	4:02:11 PM	Bypass valve closed
2/2/2012	4:02:11 PM	Main Vac valve closed
2/2/2012	4:02:11 PM	Bubbler valve closed
2/2/2012	4:02:11 PM	Helium MFC set to  0.000000
2/2/2012	4:02:11 PM	H2 MFC set to  0.000000
2/2/2012	4:02:11 PM	BCl3 MFC set to  0.000000
2/2/2012	4:02:11 PM	PH3 MFC set to  0.000000
2/2/2012	4:02:11 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:02:11 PM	Tube furnace set to 0
2/2/2012	4:02:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	4:02:14 PM	Recipe started at 4:02 PM
2/2/2012	4:02:14 PM	Helium valve closed
2/2/2012	4:02:14 PM	H2 valve closed
2/2/2012	4:02:14 PM	BCl3 valve closed
2/2/2012	4:02:14 PM	PH3 valve closed
2/2/2012	4:02:14 PM	SiCl4 pre valve closed
2/2/2012	4:02:14 PM	SiCl4 post valve closed
2/2/2012	4:02:14 PM	Main Vac valve closed
2/2/2012	4:02:14 PM	Bypass valve closed
2/2/2012	4:02:14 PM	Bubbler valve closed
2/2/2012	4:02:14 PM	Helium MFC set to  0.000000
2/2/2012	4:02:14 PM	H2 MFC set to  0.000000
2/2/2012	4:02:14 PM	BCl3 MFC set to  0.000000
2/2/2012	4:02:14 PM	PH3 MFC set to  0.000000
2/2/2012	4:02:14 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:02:14 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:02:14 PM	Tube furnace set to 0
2/2/2012	4:02:17 PM	H2 valve closed
2/2/2012	4:02:17 PM	BCl3 valve closed
2/2/2012	4:02:17 PM	PH3 valve closed
2/2/2012	4:02:17 PM	SiCl4 pre valve closed
2/2/2012	4:02:17 PM	SiCl4 post valve closed
2/2/2012	4:02:17 PM	Main Vac valve closed
2/2/2012	4:02:17 PM	Bypass valve closed
2/2/2012	4:02:17 PM	Bubbler valve closed
2/2/2012	4:02:17 PM	Helium valve opened
2/2/2012	4:02:17 PM	Helium MFC set to  500.000000
2/2/2012	4:02:17 PM	H2 MFC set to  0.000000
2/2/2012	4:02:17 PM	BCl3 MFC set to  0.000000
2/2/2012	4:02:17 PM	PH3 MFC set to  0.000000
2/2/2012	4:02:17 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:02:17 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:02:17 PM	Tube furnace set to 0
2/2/2012	4:02:18 PM	Helium valve closed
2/2/2012	4:02:18 PM	H2 valve closed
2/2/2012	4:02:18 PM	BCl3 valve closed
2/2/2012	4:02:18 PM	PH3 valve closed
2/2/2012	4:02:18 PM	SiCl4 pre valve closed
2/2/2012	4:02:18 PM	SiCl4 post valve closed
2/2/2012	4:02:18 PM	Main Vac valve closed
2/2/2012	4:02:18 PM	Bypass valve closed
2/2/2012	4:02:18 PM	Bubbler valve closed
2/2/2012	4:02:18 PM	Helium MFC set to  0.000000
2/2/2012	4:02:18 PM	H2 MFC set to  0.000000
2/2/2012	4:02:18 PM	BCl3 MFC set to  0.000000
2/2/2012	4:02:18 PM	PH3 MFC set to  0.000000
2/2/2012	4:02:18 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:02:18 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:02:18 PM	Tube furnace set to 0
2/2/2012	4:02:19 PM	Run finished at 4:02 PM
2/2/2012	4:02:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	4:08:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	4:08:21 PM	Recipe started at 4:08 PM
2/2/2012	4:08:21 PM	Helium valve closed
2/2/2012	4:08:21 PM	H2 valve closed
2/2/2012	4:08:21 PM	BCl3 valve closed
2/2/2012	4:08:21 PM	PH3 valve closed
2/2/2012	4:08:21 PM	SiCl4 pre valve closed
2/2/2012	4:08:21 PM	SiCl4 post valve closed
2/2/2012	4:08:21 PM	Main Vac valve closed
2/2/2012	4:08:21 PM	Bubbler valve closed
2/2/2012	4:08:21 PM	Bypass valve opened
2/2/2012	4:08:21 PM	Helium MFC set to  0.000000
2/2/2012	4:08:21 PM	H2 MFC set to  0.000000
2/2/2012	4:08:21 PM	BCl3 MFC set to  0.000000
2/2/2012	4:08:21 PM	PH3 MFC set to  0.000000
2/2/2012	4:08:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:08:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:08:21 PM	Tube furnace set to 0
2/2/2012	4:09:21 PM	Helium valve closed
2/2/2012	4:09:21 PM	H2 valve closed
2/2/2012	4:09:21 PM	BCl3 valve closed
2/2/2012	4:09:21 PM	PH3 valve closed
2/2/2012	4:09:21 PM	SiCl4 pre valve closed
2/2/2012	4:09:21 PM	SiCl4 post valve closed
2/2/2012	4:09:21 PM	Main Vac valve closed
2/2/2012	4:09:21 PM	Bubbler valve closed
2/2/2012	4:09:21 PM	Bypass valve opened
2/2/2012	4:09:21 PM	Helium MFC set to  0.000000
2/2/2012	4:09:21 PM	H2 MFC set to  0.000000
2/2/2012	4:09:21 PM	BCl3 MFC set to  0.000000
2/2/2012	4:09:21 PM	PH3 MFC set to  0.000000
2/2/2012	4:09:21 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:09:21 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:09:21 PM	Tube furnace set to 0
2/2/2012	4:09:25 PM	Helium valve closed
2/2/2012	4:09:25 PM	H2 valve closed
2/2/2012	4:09:25 PM	BCl3 valve closed
2/2/2012	4:09:25 PM	PH3 valve closed
2/2/2012	4:09:25 PM	SiCl4 pre valve closed
2/2/2012	4:09:25 PM	SiCl4 post valve closed
2/2/2012	4:09:25 PM	Bypass valve closed
2/2/2012	4:09:25 PM	Bubbler valve closed
2/2/2012	4:09:25 PM	Main Vac valve opened
2/2/2012	4:09:25 PM	Helium MFC set to  0.000000
2/2/2012	4:09:25 PM	H2 MFC set to  0.000000
2/2/2012	4:09:25 PM	BCl3 MFC set to  0.000000
2/2/2012	4:09:25 PM	PH3 MFC set to  0.000000
2/2/2012	4:09:25 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:09:25 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:09:25 PM	Tube furnace set to 0
2/2/2012	4:09:26 PM	Run finished at 4:09 PM
2/2/2012	4:09:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	4:16:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	4:16:30 PM	Recipe started at 4:16 PM
2/2/2012	4:16:30 PM	Helium valve closed
2/2/2012	4:16:30 PM	H2 valve closed
2/2/2012	4:16:30 PM	BCl3 valve closed
2/2/2012	4:16:30 PM	PH3 valve closed
2/2/2012	4:16:30 PM	SiCl4 pre valve closed
2/2/2012	4:16:30 PM	SiCl4 post valve closed
2/2/2012	4:16:30 PM	Main Vac valve closed
2/2/2012	4:16:30 PM	Bubbler valve closed
2/2/2012	4:16:30 PM	Bypass valve opened
2/2/2012	4:16:30 PM	Helium MFC set to  0.000000
2/2/2012	4:16:30 PM	H2 MFC set to  0.000000
2/2/2012	4:16:30 PM	BCl3 MFC set to  0.000000
2/2/2012	4:16:30 PM	PH3 MFC set to  0.000000
2/2/2012	4:16:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:16:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:16:30 PM	Tube furnace set to 0
2/2/2012	4:16:30 PM	Helium valve closed
2/2/2012	4:16:30 PM	H2 valve closed
2/2/2012	4:16:30 PM	BCl3 valve closed
2/2/2012	4:16:30 PM	PH3 valve closed
2/2/2012	4:16:30 PM	SiCl4 pre valve closed
2/2/2012	4:16:30 PM	SiCl4 post valve closed
2/2/2012	4:16:30 PM	Main Vac valve closed
2/2/2012	4:16:30 PM	Bubbler valve closed
2/2/2012	4:16:30 PM	Bypass valve opened
2/2/2012	4:16:30 PM	Helium MFC set to  0.000000
2/2/2012	4:16:30 PM	H2 MFC set to  0.000000
2/2/2012	4:16:30 PM	BCl3 MFC set to  0.000000
2/2/2012	4:16:30 PM	PH3 MFC set to  0.000000
2/2/2012	4:16:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:16:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:16:30 PM	Tube furnace set to 0
2/2/2012	4:16:31 PM	Helium valve closed
2/2/2012	4:16:31 PM	H2 valve closed
2/2/2012	4:16:31 PM	BCl3 valve closed
2/2/2012	4:16:31 PM	PH3 valve closed
2/2/2012	4:16:31 PM	SiCl4 pre valve closed
2/2/2012	4:16:31 PM	SiCl4 post valve closed
2/2/2012	4:16:31 PM	Bypass valve closed
2/2/2012	4:16:31 PM	Bubbler valve closed
2/2/2012	4:16:31 PM	Main Vac valve opened
2/2/2012	4:16:31 PM	Helium MFC set to  0.000000
2/2/2012	4:16:31 PM	H2 MFC set to  0.000000
2/2/2012	4:16:31 PM	BCl3 MFC set to  0.000000
2/2/2012	4:16:31 PM	PH3 MFC set to  0.000000
2/2/2012	4:16:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:16:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:16:31 PM	Tube furnace set to 0
2/2/2012	4:17:01 PM	H2 valve closed
2/2/2012	4:17:01 PM	BCl3 valve closed
2/2/2012	4:17:01 PM	PH3 valve closed
2/2/2012	4:17:01 PM	SiCl4 pre valve closed
2/2/2012	4:17:01 PM	SiCl4 post valve closed
2/2/2012	4:17:01 PM	Bypass valve closed
2/2/2012	4:17:01 PM	Bubbler valve closed
2/2/2012	4:17:01 PM	Helium valve opened
2/2/2012	4:17:01 PM	Main Vac valve opened
2/2/2012	4:17:01 PM	Helium MFC set to  20.000000
2/2/2012	4:17:01 PM	H2 MFC set to  0.000000
2/2/2012	4:17:01 PM	BCl3 MFC set to  0.000000
2/2/2012	4:17:01 PM	PH3 MFC set to  0.000000
2/2/2012	4:17:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:17:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:17:01 PM	Tube furnace set to 0
2/2/2012	4:17:31 PM	Helium valve closed
2/2/2012	4:17:31 PM	H2 valve closed
2/2/2012	4:17:31 PM	BCl3 valve closed
2/2/2012	4:17:31 PM	PH3 valve closed
2/2/2012	4:17:31 PM	SiCl4 pre valve closed
2/2/2012	4:17:31 PM	SiCl4 post valve closed
2/2/2012	4:17:31 PM	Bypass valve closed
2/2/2012	4:17:31 PM	Bubbler valve closed
2/2/2012	4:17:31 PM	Main Vac valve opened
2/2/2012	4:17:31 PM	Helium MFC set to  0.000000
2/2/2012	4:17:31 PM	H2 MFC set to  0.000000
2/2/2012	4:17:31 PM	BCl3 MFC set to  0.000000
2/2/2012	4:17:31 PM	PH3 MFC set to  0.000000
2/2/2012	4:17:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:17:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:17:31 PM	Tube furnace set to 0
2/2/2012	4:18:01 PM	H2 valve closed
2/2/2012	4:18:01 PM	BCl3 valve closed
2/2/2012	4:18:01 PM	PH3 valve closed
2/2/2012	4:18:01 PM	SiCl4 pre valve closed
2/2/2012	4:18:01 PM	SiCl4 post valve closed
2/2/2012	4:18:01 PM	Bypass valve closed
2/2/2012	4:18:01 PM	Bubbler valve closed
2/2/2012	4:18:01 PM	Helium valve opened
2/2/2012	4:18:01 PM	Main Vac valve opened
2/2/2012	4:18:01 PM	Helium MFC set to  20.000000
2/2/2012	4:18:01 PM	H2 MFC set to  0.000000
2/2/2012	4:18:01 PM	BCl3 MFC set to  0.000000
2/2/2012	4:18:01 PM	PH3 MFC set to  0.000000
2/2/2012	4:18:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:18:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:18:02 PM	Tube furnace set to 0
2/2/2012	4:18:32 PM	Helium valve closed
2/2/2012	4:18:32 PM	H2 valve closed
2/2/2012	4:18:32 PM	BCl3 valve closed
2/2/2012	4:18:32 PM	PH3 valve closed
2/2/2012	4:18:32 PM	SiCl4 pre valve closed
2/2/2012	4:18:32 PM	SiCl4 post valve closed
2/2/2012	4:18:32 PM	Bypass valve closed
2/2/2012	4:18:32 PM	Bubbler valve closed
2/2/2012	4:18:32 PM	Main Vac valve opened
2/2/2012	4:18:32 PM	Helium MFC set to  0.000000
2/2/2012	4:18:32 PM	H2 MFC set to  0.000000
2/2/2012	4:18:32 PM	BCl3 MFC set to  0.000000
2/2/2012	4:18:32 PM	PH3 MFC set to  0.000000
2/2/2012	4:18:32 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:18:32 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:18:32 PM	Tube furnace set to 0
2/2/2012	4:19:02 PM	H2 valve closed
2/2/2012	4:19:02 PM	BCl3 valve closed
2/2/2012	4:19:02 PM	PH3 valve closed
2/2/2012	4:19:02 PM	SiCl4 pre valve closed
2/2/2012	4:19:02 PM	SiCl4 post valve closed
2/2/2012	4:19:02 PM	Bypass valve closed
2/2/2012	4:19:02 PM	Bubbler valve closed
2/2/2012	4:19:02 PM	Helium valve opened
2/2/2012	4:19:02 PM	Main Vac valve opened
2/2/2012	4:19:02 PM	Helium MFC set to  20.000000
2/2/2012	4:19:02 PM	H2 MFC set to  0.000000
2/2/2012	4:19:02 PM	BCl3 MFC set to  0.000000
2/2/2012	4:19:02 PM	PH3 MFC set to  0.000000
2/2/2012	4:19:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:19:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:19:02 PM	Tube furnace set to 0
2/2/2012	4:19:32 PM	Helium valve closed
2/2/2012	4:19:32 PM	H2 valve closed
2/2/2012	4:19:32 PM	BCl3 valve closed
2/2/2012	4:19:32 PM	PH3 valve closed
2/2/2012	4:19:32 PM	SiCl4 pre valve closed
2/2/2012	4:19:32 PM	SiCl4 post valve closed
2/2/2012	4:19:32 PM	Bypass valve closed
2/2/2012	4:19:32 PM	Bubbler valve closed
2/2/2012	4:19:32 PM	Main Vac valve opened
2/2/2012	4:19:32 PM	Helium MFC set to  0.000000
2/2/2012	4:19:32 PM	H2 MFC set to  0.000000
2/2/2012	4:19:32 PM	BCl3 MFC set to  0.000000
2/2/2012	4:19:32 PM	PH3 MFC set to  0.000000
2/2/2012	4:19:32 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:19:32 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:19:32 PM	Tube furnace set to 0
2/2/2012	4:20:02 PM	H2 valve closed
2/2/2012	4:20:02 PM	BCl3 valve closed
2/2/2012	4:20:02 PM	PH3 valve closed
2/2/2012	4:20:02 PM	SiCl4 pre valve closed
2/2/2012	4:20:02 PM	SiCl4 post valve closed
2/2/2012	4:20:02 PM	Bypass valve closed
2/2/2012	4:20:02 PM	Bubbler valve closed
2/2/2012	4:20:02 PM	Helium valve opened
2/2/2012	4:20:02 PM	Main Vac valve opened
2/2/2012	4:20:02 PM	Helium MFC set to  20.000000
2/2/2012	4:20:02 PM	H2 MFC set to  0.000000
2/2/2012	4:20:02 PM	BCl3 MFC set to  0.000000
2/2/2012	4:20:02 PM	PH3 MFC set to  0.000000
2/2/2012	4:20:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:20:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:20:02 PM	Tube furnace set to 0
2/2/2012	4:20:32 PM	Helium valve closed
2/2/2012	4:20:32 PM	H2 valve closed
2/2/2012	4:20:32 PM	BCl3 valve closed
2/2/2012	4:20:33 PM	PH3 valve closed
2/2/2012	4:20:33 PM	SiCl4 pre valve closed
2/2/2012	4:20:33 PM	SiCl4 post valve closed
2/2/2012	4:20:33 PM	Bypass valve closed
2/2/2012	4:20:33 PM	Bubbler valve closed
2/2/2012	4:20:33 PM	Main Vac valve opened
2/2/2012	4:20:33 PM	Helium MFC set to  0.000000
2/2/2012	4:20:33 PM	H2 MFC set to  0.000000
2/2/2012	4:20:33 PM	BCl3 MFC set to  0.000000
2/2/2012	4:20:33 PM	PH3 MFC set to  0.000000
2/2/2012	4:20:33 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:20:33 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:20:33 PM	Tube furnace set to 0
2/2/2012	4:21:03 PM	H2 valve closed
2/2/2012	4:21:03 PM	BCl3 valve closed
2/2/2012	4:21:03 PM	PH3 valve closed
2/2/2012	4:21:03 PM	SiCl4 pre valve closed
2/2/2012	4:21:03 PM	SiCl4 post valve closed
2/2/2012	4:21:03 PM	Bypass valve closed
2/2/2012	4:21:03 PM	Bubbler valve closed
2/2/2012	4:21:03 PM	Helium valve opened
2/2/2012	4:21:03 PM	Main Vac valve opened
2/2/2012	4:21:03 PM	Helium MFC set to  20.000000
2/2/2012	4:21:03 PM	H2 MFC set to  0.000000
2/2/2012	4:21:03 PM	BCl3 MFC set to  0.000000
2/2/2012	4:21:03 PM	PH3 MFC set to  0.000000
2/2/2012	4:21:03 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:21:03 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:21:03 PM	Tube furnace set to 0
2/2/2012	4:21:33 PM	Helium valve closed
2/2/2012	4:21:33 PM	H2 valve closed
2/2/2012	4:21:33 PM	BCl3 valve closed
2/2/2012	4:21:33 PM	PH3 valve closed
2/2/2012	4:21:33 PM	SiCl4 pre valve closed
2/2/2012	4:21:33 PM	SiCl4 post valve closed
2/2/2012	4:21:33 PM	Bypass valve closed
2/2/2012	4:21:33 PM	Bubbler valve closed
2/2/2012	4:21:33 PM	Main Vac valve opened
2/2/2012	4:21:33 PM	Helium MFC set to  0.000000
2/2/2012	4:21:33 PM	H2 MFC set to  0.000000
2/2/2012	4:21:33 PM	BCl3 MFC set to  0.000000
2/2/2012	4:21:33 PM	PH3 MFC set to  0.000000
2/2/2012	4:21:33 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:21:33 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:21:33 PM	Tube furnace set to 0
2/2/2012	4:22:03 PM	H2 valve closed
2/2/2012	4:22:03 PM	BCl3 valve closed
2/2/2012	4:22:03 PM	PH3 valve closed
2/2/2012	4:22:03 PM	SiCl4 pre valve closed
2/2/2012	4:22:03 PM	SiCl4 post valve closed
2/2/2012	4:22:03 PM	Bypass valve closed
2/2/2012	4:22:03 PM	Bubbler valve closed
2/2/2012	4:22:03 PM	Helium valve opened
2/2/2012	4:22:03 PM	Main Vac valve opened
2/2/2012	4:22:03 PM	Helium MFC set to  20.000000
2/2/2012	4:22:03 PM	H2 MFC set to  0.000000
2/2/2012	4:22:03 PM	BCl3 MFC set to  0.000000
2/2/2012	4:22:03 PM	PH3 MFC set to  0.000000
2/2/2012	4:22:03 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:22:03 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:22:03 PM	Tube furnace set to 0
2/2/2012	4:22:33 PM	Helium valve closed
2/2/2012	4:22:33 PM	H2 valve closed
2/2/2012	4:22:33 PM	BCl3 valve closed
2/2/2012	4:22:33 PM	PH3 valve closed
2/2/2012	4:22:33 PM	SiCl4 pre valve closed
2/2/2012	4:22:33 PM	SiCl4 post valve closed
2/2/2012	4:22:33 PM	Bypass valve closed
2/2/2012	4:22:33 PM	Bubbler valve closed
2/2/2012	4:22:33 PM	Main Vac valve opened
2/2/2012	4:22:33 PM	Helium MFC set to  0.000000
2/2/2012	4:22:33 PM	H2 MFC set to  0.000000
2/2/2012	4:22:33 PM	BCl3 MFC set to  0.000000
2/2/2012	4:22:33 PM	PH3 MFC set to  0.000000
2/2/2012	4:22:33 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:22:33 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:22:33 PM	Tube furnace set to 0
2/2/2012	4:23:04 PM	H2 valve closed
2/2/2012	4:23:04 PM	BCl3 valve closed
2/2/2012	4:23:04 PM	PH3 valve closed
2/2/2012	4:23:04 PM	SiCl4 pre valve closed
2/2/2012	4:23:04 PM	SiCl4 post valve closed
2/2/2012	4:23:04 PM	Bypass valve closed
2/2/2012	4:23:04 PM	Bubbler valve closed
2/2/2012	4:23:04 PM	Helium valve opened
2/2/2012	4:23:04 PM	Main Vac valve opened
2/2/2012	4:23:04 PM	Helium MFC set to  20.000000
2/2/2012	4:23:04 PM	H2 MFC set to  0.000000
2/2/2012	4:23:04 PM	BCl3 MFC set to  0.000000
2/2/2012	4:23:04 PM	PH3 MFC set to  0.000000
2/2/2012	4:23:04 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:23:04 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:23:04 PM	Tube furnace set to 0
2/2/2012	4:23:34 PM	Helium valve closed
2/2/2012	4:23:34 PM	H2 valve closed
2/2/2012	4:23:34 PM	BCl3 valve closed
2/2/2012	4:23:34 PM	PH3 valve closed
2/2/2012	4:23:34 PM	SiCl4 pre valve closed
2/2/2012	4:23:34 PM	SiCl4 post valve closed
2/2/2012	4:23:34 PM	Bypass valve closed
2/2/2012	4:23:34 PM	Bubbler valve closed
2/2/2012	4:23:34 PM	Main Vac valve opened
2/2/2012	4:23:34 PM	Helium MFC set to  0.000000
2/2/2012	4:23:34 PM	H2 MFC set to  0.000000
2/2/2012	4:23:34 PM	BCl3 MFC set to  0.000000
2/2/2012	4:23:34 PM	PH3 MFC set to  0.000000
2/2/2012	4:23:34 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:23:34 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:23:34 PM	Tube furnace set to 0
2/2/2012	4:24:04 PM	H2 valve closed
2/2/2012	4:24:04 PM	BCl3 valve closed
2/2/2012	4:24:04 PM	PH3 valve closed
2/2/2012	4:24:04 PM	SiCl4 pre valve closed
2/2/2012	4:24:04 PM	SiCl4 post valve closed
2/2/2012	4:24:04 PM	Bypass valve closed
2/2/2012	4:24:04 PM	Bubbler valve closed
2/2/2012	4:24:04 PM	Helium valve opened
2/2/2012	4:24:04 PM	Main Vac valve opened
2/2/2012	4:24:04 PM	Helium MFC set to  20.000000
2/2/2012	4:24:04 PM	H2 MFC set to  0.000000
2/2/2012	4:24:04 PM	BCl3 MFC set to  0.000000
2/2/2012	4:24:04 PM	PH3 MFC set to  0.000000
2/2/2012	4:24:04 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:24:04 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:24:04 PM	Tube furnace set to 0
2/2/2012	4:24:34 PM	Helium valve closed
2/2/2012	4:24:34 PM	H2 valve closed
2/2/2012	4:24:34 PM	BCl3 valve closed
2/2/2012	4:24:34 PM	PH3 valve closed
2/2/2012	4:24:34 PM	SiCl4 pre valve closed
2/2/2012	4:24:34 PM	SiCl4 post valve closed
2/2/2012	4:24:34 PM	Bypass valve closed
2/2/2012	4:24:34 PM	Bubbler valve closed
2/2/2012	4:24:34 PM	Main Vac valve opened
2/2/2012	4:24:34 PM	Helium MFC set to  0.000000
2/2/2012	4:24:34 PM	H2 MFC set to  0.000000
2/2/2012	4:24:34 PM	BCl3 MFC set to  0.000000
2/2/2012	4:24:34 PM	PH3 MFC set to  0.000000
2/2/2012	4:24:34 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:24:34 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:24:34 PM	Tube furnace set to 0
2/2/2012	4:25:04 PM	H2 valve closed
2/2/2012	4:25:04 PM	BCl3 valve closed
2/2/2012	4:25:04 PM	PH3 valve closed
2/2/2012	4:25:04 PM	SiCl4 pre valve closed
2/2/2012	4:25:04 PM	SiCl4 post valve closed
2/2/2012	4:25:04 PM	Bypass valve closed
2/2/2012	4:25:04 PM	Bubbler valve closed
2/2/2012	4:25:04 PM	Helium valve opened
2/2/2012	4:25:04 PM	Main Vac valve opened
2/2/2012	4:25:04 PM	Helium MFC set to  20.000000
2/2/2012	4:25:04 PM	H2 MFC set to  0.000000
2/2/2012	4:25:04 PM	BCl3 MFC set to  0.000000
2/2/2012	4:25:04 PM	PH3 MFC set to  0.000000
2/2/2012	4:25:04 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:25:04 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:25:05 PM	Tube furnace set to 0
2/2/2012	4:25:35 PM	Helium valve closed
2/2/2012	4:25:35 PM	H2 valve closed
2/2/2012	4:25:35 PM	BCl3 valve closed
2/2/2012	4:25:35 PM	PH3 valve closed
2/2/2012	4:25:35 PM	SiCl4 pre valve closed
2/2/2012	4:25:35 PM	SiCl4 post valve closed
2/2/2012	4:25:35 PM	Bypass valve closed
2/2/2012	4:25:35 PM	Bubbler valve closed
2/2/2012	4:25:35 PM	Main Vac valve opened
2/2/2012	4:25:35 PM	Helium MFC set to  0.000000
2/2/2012	4:25:35 PM	H2 MFC set to  0.000000
2/2/2012	4:25:35 PM	BCl3 MFC set to  0.000000
2/2/2012	4:25:35 PM	PH3 MFC set to  0.000000
2/2/2012	4:25:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:25:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:25:35 PM	Tube furnace set to 0
2/2/2012	4:26:05 PM	H2 valve closed
2/2/2012	4:26:05 PM	BCl3 valve closed
2/2/2012	4:26:05 PM	PH3 valve closed
2/2/2012	4:26:05 PM	SiCl4 pre valve closed
2/2/2012	4:26:05 PM	SiCl4 post valve closed
2/2/2012	4:26:05 PM	Bypass valve closed
2/2/2012	4:26:05 PM	Bubbler valve closed
2/2/2012	4:26:05 PM	Helium valve opened
2/2/2012	4:26:05 PM	Main Vac valve opened
2/2/2012	4:26:05 PM	Helium MFC set to  20.000000
2/2/2012	4:26:05 PM	H2 MFC set to  0.000000
2/2/2012	4:26:05 PM	BCl3 MFC set to  0.000000
2/2/2012	4:26:05 PM	PH3 MFC set to  0.000000
2/2/2012	4:26:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:26:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:26:05 PM	Tube furnace set to 0
2/2/2012	4:26:35 PM	Helium valve closed
2/2/2012	4:26:35 PM	H2 valve closed
2/2/2012	4:26:35 PM	BCl3 valve closed
2/2/2012	4:26:35 PM	PH3 valve closed
2/2/2012	4:26:35 PM	SiCl4 pre valve closed
2/2/2012	4:26:35 PM	SiCl4 post valve closed
2/2/2012	4:26:35 PM	Bypass valve closed
2/2/2012	4:26:35 PM	Bubbler valve closed
2/2/2012	4:26:35 PM	Main Vac valve opened
2/2/2012	4:26:35 PM	Helium MFC set to  0.000000
2/2/2012	4:26:35 PM	H2 MFC set to  0.000000
2/2/2012	4:26:35 PM	BCl3 MFC set to  0.000000
2/2/2012	4:26:35 PM	PH3 MFC set to  0.000000
2/2/2012	4:26:35 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:26:35 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:26:35 PM	Tube furnace set to 0
2/2/2012	4:26:36 PM	Run finished at 4:26 PM
2/2/2012	4:26:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	4:26:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	4:26:57 PM	Recipe started at 4:26 PM
2/2/2012	4:26:57 PM	Helium valve closed
2/2/2012	4:26:57 PM	H2 valve closed
2/2/2012	4:26:57 PM	BCl3 valve closed
2/2/2012	4:26:57 PM	PH3 valve closed
2/2/2012	4:26:57 PM	SiCl4 pre valve closed
2/2/2012	4:26:57 PM	SiCl4 post valve closed
2/2/2012	4:26:57 PM	Main Vac valve closed
2/2/2012	4:26:57 PM	Bubbler valve closed
2/2/2012	4:26:57 PM	Bypass valve opened
2/2/2012	4:26:57 PM	Helium MFC set to  0.000000
2/2/2012	4:26:57 PM	H2 MFC set to  0.000000
2/2/2012	4:26:57 PM	BCl3 MFC set to  0.000000
2/2/2012	4:26:57 PM	PH3 MFC set to  0.000000
2/2/2012	4:26:57 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:26:57 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:26:58 PM	Tube furnace set to 0
2/2/2012	4:26:58 PM	Helium valve closed
2/2/2012	4:26:58 PM	H2 valve closed
2/2/2012	4:26:58 PM	BCl3 valve closed
2/2/2012	4:26:58 PM	PH3 valve closed
2/2/2012	4:26:58 PM	SiCl4 pre valve closed
2/2/2012	4:26:58 PM	SiCl4 post valve closed
2/2/2012	4:26:58 PM	Main Vac valve closed
2/2/2012	4:26:58 PM	Bubbler valve closed
2/2/2012	4:26:58 PM	Bypass valve opened
2/2/2012	4:26:58 PM	Helium MFC set to  0.000000
2/2/2012	4:26:58 PM	H2 MFC set to  0.000000
2/2/2012	4:26:58 PM	BCl3 MFC set to  0.000000
2/2/2012	4:26:58 PM	PH3 MFC set to  0.000000
2/2/2012	4:26:58 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:26:58 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:26:58 PM	Tube furnace set to 0
2/2/2012	4:26:59 PM	Helium valve closed
2/2/2012	4:26:59 PM	H2 valve closed
2/2/2012	4:26:59 PM	BCl3 valve closed
2/2/2012	4:26:59 PM	PH3 valve closed
2/2/2012	4:26:59 PM	SiCl4 pre valve closed
2/2/2012	4:26:59 PM	SiCl4 post valve closed
2/2/2012	4:26:59 PM	Bypass valve closed
2/2/2012	4:26:59 PM	Bubbler valve closed
2/2/2012	4:26:59 PM	Main Vac valve opened
2/2/2012	4:26:59 PM	Helium MFC set to  0.000000
2/2/2012	4:26:59 PM	H2 MFC set to  0.000000
2/2/2012	4:26:59 PM	BCl3 MFC set to  0.000000
2/2/2012	4:26:59 PM	PH3 MFC set to  0.000000
2/2/2012	4:26:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:26:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:26:59 PM	Tube furnace set to 0
2/2/2012	4:27:29 PM	H2 valve closed
2/2/2012	4:27:29 PM	BCl3 valve closed
2/2/2012	4:27:29 PM	PH3 valve closed
2/2/2012	4:27:29 PM	SiCl4 pre valve closed
2/2/2012	4:27:29 PM	SiCl4 post valve closed
2/2/2012	4:27:29 PM	Bypass valve closed
2/2/2012	4:27:29 PM	Bubbler valve closed
2/2/2012	4:27:29 PM	Helium valve opened
2/2/2012	4:27:29 PM	Main Vac valve opened
2/2/2012	4:27:29 PM	Helium MFC set to  20.000000
2/2/2012	4:27:29 PM	H2 MFC set to  0.000000
2/2/2012	4:27:29 PM	BCl3 MFC set to  0.000000
2/2/2012	4:27:29 PM	PH3 MFC set to  0.000000
2/2/2012	4:27:29 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:27:29 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:27:29 PM	Tube furnace set to 0
2/2/2012	4:27:59 PM	Helium valve closed
2/2/2012	4:27:59 PM	H2 valve closed
2/2/2012	4:27:59 PM	BCl3 valve closed
2/2/2012	4:27:59 PM	PH3 valve closed
2/2/2012	4:27:59 PM	SiCl4 pre valve closed
2/2/2012	4:27:59 PM	SiCl4 post valve closed
2/2/2012	4:27:59 PM	Bypass valve closed
2/2/2012	4:27:59 PM	Bubbler valve closed
2/2/2012	4:27:59 PM	Main Vac valve opened
2/2/2012	4:27:59 PM	Helium MFC set to  0.000000
2/2/2012	4:27:59 PM	H2 MFC set to  0.000000
2/2/2012	4:27:59 PM	BCl3 MFC set to  0.000000
2/2/2012	4:27:59 PM	PH3 MFC set to  0.000000
2/2/2012	4:27:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:27:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:27:59 PM	Tube furnace set to 0
2/2/2012	4:28:29 PM	H2 valve closed
2/2/2012	4:28:29 PM	BCl3 valve closed
2/2/2012	4:28:29 PM	PH3 valve closed
2/2/2012	4:28:29 PM	SiCl4 pre valve closed
2/2/2012	4:28:29 PM	SiCl4 post valve closed
2/2/2012	4:28:29 PM	Bypass valve closed
2/2/2012	4:28:29 PM	Bubbler valve closed
2/2/2012	4:28:29 PM	Helium valve opened
2/2/2012	4:28:29 PM	Main Vac valve opened
2/2/2012	4:28:29 PM	Helium MFC set to  20.000000
2/2/2012	4:28:29 PM	H2 MFC set to  0.000000
2/2/2012	4:28:29 PM	BCl3 MFC set to  0.000000
2/2/2012	4:28:29 PM	PH3 MFC set to  0.000000
2/2/2012	4:28:29 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:28:29 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:28:29 PM	Tube furnace set to 0
2/2/2012	4:28:59 PM	Helium valve closed
2/2/2012	4:28:59 PM	H2 valve closed
2/2/2012	4:28:59 PM	BCl3 valve closed
2/2/2012	4:28:59 PM	PH3 valve closed
2/2/2012	4:28:59 PM	SiCl4 pre valve closed
2/2/2012	4:28:59 PM	SiCl4 post valve closed
2/2/2012	4:28:59 PM	Bypass valve closed
2/2/2012	4:28:59 PM	Bubbler valve closed
2/2/2012	4:28:59 PM	Main Vac valve opened
2/2/2012	4:28:59 PM	Helium MFC set to  0.000000
2/2/2012	4:28:59 PM	H2 MFC set to  0.000000
2/2/2012	4:28:59 PM	BCl3 MFC set to  0.000000
2/2/2012	4:28:59 PM	PH3 MFC set to  0.000000
2/2/2012	4:28:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:28:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:29:00 PM	Tube furnace set to 0
2/2/2012	4:29:30 PM	H2 valve closed
2/2/2012	4:29:30 PM	BCl3 valve closed
2/2/2012	4:29:30 PM	PH3 valve closed
2/2/2012	4:29:30 PM	SiCl4 pre valve closed
2/2/2012	4:29:30 PM	SiCl4 post valve closed
2/2/2012	4:29:30 PM	Bypass valve closed
2/2/2012	4:29:30 PM	Bubbler valve closed
2/2/2012	4:29:30 PM	Helium valve opened
2/2/2012	4:29:30 PM	Main Vac valve opened
2/2/2012	4:29:30 PM	Helium MFC set to  20.000000
2/2/2012	4:29:30 PM	H2 MFC set to  0.000000
2/2/2012	4:29:30 PM	BCl3 MFC set to  0.000000
2/2/2012	4:29:30 PM	PH3 MFC set to  0.000000
2/2/2012	4:29:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:29:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:29:30 PM	Tube furnace set to 0
2/2/2012	4:30:00 PM	Helium valve closed
2/2/2012	4:30:00 PM	H2 valve closed
2/2/2012	4:30:00 PM	BCl3 valve closed
2/2/2012	4:30:00 PM	PH3 valve closed
2/2/2012	4:30:00 PM	SiCl4 pre valve closed
2/2/2012	4:30:00 PM	SiCl4 post valve closed
2/2/2012	4:30:00 PM	Bypass valve closed
2/2/2012	4:30:00 PM	Bubbler valve closed
2/2/2012	4:30:00 PM	Main Vac valve opened
2/2/2012	4:30:00 PM	Helium MFC set to  0.000000
2/2/2012	4:30:00 PM	H2 MFC set to  0.000000
2/2/2012	4:30:00 PM	BCl3 MFC set to  0.000000
2/2/2012	4:30:00 PM	PH3 MFC set to  0.000000
2/2/2012	4:30:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:30:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:30:00 PM	Tube furnace set to 0
2/2/2012	4:30:30 PM	H2 valve closed
2/2/2012	4:30:30 PM	BCl3 valve closed
2/2/2012	4:30:30 PM	PH3 valve closed
2/2/2012	4:30:30 PM	SiCl4 pre valve closed
2/2/2012	4:30:30 PM	SiCl4 post valve closed
2/2/2012	4:30:30 PM	Bypass valve closed
2/2/2012	4:30:30 PM	Bubbler valve closed
2/2/2012	4:30:30 PM	Helium valve opened
2/2/2012	4:30:30 PM	Main Vac valve opened
2/2/2012	4:30:30 PM	Helium MFC set to  20.000000
2/2/2012	4:30:30 PM	H2 MFC set to  0.000000
2/2/2012	4:30:30 PM	BCl3 MFC set to  0.000000
2/2/2012	4:30:30 PM	PH3 MFC set to  0.000000
2/2/2012	4:30:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:30:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:30:30 PM	Tube furnace set to 0
2/2/2012	4:31:00 PM	Helium valve closed
2/2/2012	4:31:00 PM	H2 valve closed
2/2/2012	4:31:00 PM	BCl3 valve closed
2/2/2012	4:31:00 PM	PH3 valve closed
2/2/2012	4:31:00 PM	SiCl4 pre valve closed
2/2/2012	4:31:00 PM	SiCl4 post valve closed
2/2/2012	4:31:00 PM	Bypass valve closed
2/2/2012	4:31:00 PM	Bubbler valve closed
2/2/2012	4:31:00 PM	Main Vac valve opened
2/2/2012	4:31:00 PM	Helium MFC set to  0.000000
2/2/2012	4:31:00 PM	H2 MFC set to  0.000000
2/2/2012	4:31:00 PM	BCl3 MFC set to  0.000000
2/2/2012	4:31:00 PM	PH3 MFC set to  0.000000
2/2/2012	4:31:00 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:31:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:31:00 PM	Tube furnace set to 0
2/2/2012	4:31:30 PM	H2 valve closed
2/2/2012	4:31:30 PM	BCl3 valve closed
2/2/2012	4:31:30 PM	PH3 valve closed
2/2/2012	4:31:30 PM	SiCl4 pre valve closed
2/2/2012	4:31:30 PM	SiCl4 post valve closed
2/2/2012	4:31:30 PM	Bypass valve closed
2/2/2012	4:31:30 PM	Bubbler valve closed
2/2/2012	4:31:30 PM	Helium valve opened
2/2/2012	4:31:30 PM	Main Vac valve opened
2/2/2012	4:31:30 PM	Helium MFC set to  20.000000
2/2/2012	4:31:30 PM	H2 MFC set to  0.000000
2/2/2012	4:31:30 PM	BCl3 MFC set to  0.000000
2/2/2012	4:31:30 PM	PH3 MFC set to  0.000000
2/2/2012	4:31:30 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:31:30 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:31:31 PM	Tube furnace set to 0
2/2/2012	4:32:01 PM	Helium valve closed
2/2/2012	4:32:01 PM	H2 valve closed
2/2/2012	4:32:01 PM	BCl3 valve closed
2/2/2012	4:32:01 PM	PH3 valve closed
2/2/2012	4:32:01 PM	SiCl4 pre valve closed
2/2/2012	4:32:01 PM	SiCl4 post valve closed
2/2/2012	4:32:01 PM	Bypass valve closed
2/2/2012	4:32:01 PM	Bubbler valve closed
2/2/2012	4:32:01 PM	Main Vac valve opened
2/2/2012	4:32:01 PM	Helium MFC set to  0.000000
2/2/2012	4:32:01 PM	H2 MFC set to  0.000000
2/2/2012	4:32:01 PM	BCl3 MFC set to  0.000000
2/2/2012	4:32:01 PM	PH3 MFC set to  0.000000
2/2/2012	4:32:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:32:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:32:01 PM	Tube furnace set to 0
2/2/2012	4:32:31 PM	H2 valve closed
2/2/2012	4:32:31 PM	BCl3 valve closed
2/2/2012	4:32:31 PM	PH3 valve closed
2/2/2012	4:32:31 PM	SiCl4 pre valve closed
2/2/2012	4:32:31 PM	SiCl4 post valve closed
2/2/2012	4:32:31 PM	Bypass valve closed
2/2/2012	4:32:31 PM	Bubbler valve closed
2/2/2012	4:32:31 PM	Helium valve opened
2/2/2012	4:32:31 PM	Main Vac valve opened
2/2/2012	4:32:31 PM	Helium MFC set to  20.000000
2/2/2012	4:32:31 PM	H2 MFC set to  0.000000
2/2/2012	4:32:31 PM	BCl3 MFC set to  0.000000
2/2/2012	4:32:31 PM	PH3 MFC set to  0.000000
2/2/2012	4:32:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:32:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:32:31 PM	Tube furnace set to 0
2/2/2012	4:33:01 PM	Helium valve closed
2/2/2012	4:33:01 PM	H2 valve closed
2/2/2012	4:33:01 PM	BCl3 valve closed
2/2/2012	4:33:01 PM	PH3 valve closed
2/2/2012	4:33:01 PM	SiCl4 pre valve closed
2/2/2012	4:33:01 PM	SiCl4 post valve closed
2/2/2012	4:33:01 PM	Bypass valve closed
2/2/2012	4:33:01 PM	Bubbler valve closed
2/2/2012	4:33:01 PM	Main Vac valve opened
2/2/2012	4:33:01 PM	Helium MFC set to  0.000000
2/2/2012	4:33:01 PM	H2 MFC set to  0.000000
2/2/2012	4:33:01 PM	BCl3 MFC set to  0.000000
2/2/2012	4:33:01 PM	PH3 MFC set to  0.000000
2/2/2012	4:33:01 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:33:01 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:33:01 PM	Tube furnace set to 0
2/2/2012	4:33:31 PM	H2 valve closed
2/2/2012	4:33:31 PM	BCl3 valve closed
2/2/2012	4:33:31 PM	PH3 valve closed
2/2/2012	4:33:31 PM	SiCl4 pre valve closed
2/2/2012	4:33:31 PM	SiCl4 post valve closed
2/2/2012	4:33:31 PM	Bypass valve closed
2/2/2012	4:33:31 PM	Bubbler valve closed
2/2/2012	4:33:31 PM	Helium valve opened
2/2/2012	4:33:31 PM	Main Vac valve opened
2/2/2012	4:33:31 PM	Helium MFC set to  20.000000
2/2/2012	4:33:31 PM	H2 MFC set to  0.000000
2/2/2012	4:33:31 PM	BCl3 MFC set to  0.000000
2/2/2012	4:33:31 PM	PH3 MFC set to  0.000000
2/2/2012	4:33:31 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:33:31 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:33:32 PM	Tube furnace set to 0
2/2/2012	4:34:02 PM	Helium valve closed
2/2/2012	4:34:02 PM	H2 valve closed
2/2/2012	4:34:02 PM	BCl3 valve closed
2/2/2012	4:34:02 PM	PH3 valve closed
2/2/2012	4:34:02 PM	SiCl4 pre valve closed
2/2/2012	4:34:02 PM	SiCl4 post valve closed
2/2/2012	4:34:02 PM	Bypass valve closed
2/2/2012	4:34:02 PM	Bubbler valve closed
2/2/2012	4:34:02 PM	Main Vac valve opened
2/2/2012	4:34:02 PM	Helium MFC set to  0.000000
2/2/2012	4:34:02 PM	H2 MFC set to  0.000000
2/2/2012	4:34:02 PM	BCl3 MFC set to  0.000000
2/2/2012	4:34:02 PM	PH3 MFC set to  0.000000
2/2/2012	4:34:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:34:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:34:02 PM	Tube furnace set to 0
2/2/2012	4:34:32 PM	H2 valve closed
2/2/2012	4:34:32 PM	BCl3 valve closed
2/2/2012	4:34:32 PM	PH3 valve closed
2/2/2012	4:34:32 PM	SiCl4 pre valve closed
2/2/2012	4:34:32 PM	SiCl4 post valve closed
2/2/2012	4:34:32 PM	Bypass valve closed
2/2/2012	4:34:32 PM	Bubbler valve closed
2/2/2012	4:34:32 PM	Helium valve opened
2/2/2012	4:34:32 PM	Main Vac valve opened
2/2/2012	4:34:32 PM	Helium MFC set to  20.000000
2/2/2012	4:34:32 PM	H2 MFC set to  0.000000
2/2/2012	4:34:32 PM	BCl3 MFC set to  0.000000
2/2/2012	4:34:32 PM	PH3 MFC set to  0.000000
2/2/2012	4:34:32 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:34:32 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:34:32 PM	Tube furnace set to 0
2/2/2012	4:35:02 PM	Helium valve closed
2/2/2012	4:35:02 PM	H2 valve closed
2/2/2012	4:35:02 PM	BCl3 valve closed
2/2/2012	4:35:02 PM	PH3 valve closed
2/2/2012	4:35:02 PM	SiCl4 pre valve closed
2/2/2012	4:35:02 PM	SiCl4 post valve closed
2/2/2012	4:35:02 PM	Bypass valve closed
2/2/2012	4:35:02 PM	Bubbler valve closed
2/2/2012	4:35:02 PM	Main Vac valve opened
2/2/2012	4:35:02 PM	Helium MFC set to  0.000000
2/2/2012	4:35:02 PM	H2 MFC set to  0.000000
2/2/2012	4:35:02 PM	BCl3 MFC set to  0.000000
2/2/2012	4:35:02 PM	PH3 MFC set to  0.000000
2/2/2012	4:35:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:35:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:35:02 PM	Tube furnace set to 0
2/2/2012	4:35:32 PM	H2 valve closed
2/2/2012	4:35:32 PM	BCl3 valve closed
2/2/2012	4:35:32 PM	PH3 valve closed
2/2/2012	4:35:32 PM	SiCl4 pre valve closed
2/2/2012	4:35:32 PM	SiCl4 post valve closed
2/2/2012	4:35:32 PM	Bypass valve closed
2/2/2012	4:35:32 PM	Bubbler valve closed
2/2/2012	4:35:32 PM	Helium valve opened
2/2/2012	4:35:32 PM	Main Vac valve opened
2/2/2012	4:35:32 PM	Helium MFC set to  20.000000
2/2/2012	4:35:32 PM	H2 MFC set to  0.000000
2/2/2012	4:35:32 PM	BCl3 MFC set to  0.000000
2/2/2012	4:35:32 PM	PH3 MFC set to  0.000000
2/2/2012	4:35:32 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:35:32 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:35:32 PM	Tube furnace set to 0
2/2/2012	4:36:02 PM	Helium valve closed
2/2/2012	4:36:02 PM	H2 valve closed
2/2/2012	4:36:02 PM	BCl3 valve closed
2/2/2012	4:36:02 PM	PH3 valve closed
2/2/2012	4:36:02 PM	SiCl4 pre valve closed
2/2/2012	4:36:02 PM	SiCl4 post valve closed
2/2/2012	4:36:02 PM	Bypass valve closed
2/2/2012	4:36:02 PM	Bubbler valve closed
2/2/2012	4:36:02 PM	Main Vac valve opened
2/2/2012	4:36:02 PM	Helium MFC set to  0.000000
2/2/2012	4:36:02 PM	H2 MFC set to  0.000000
2/2/2012	4:36:02 PM	BCl3 MFC set to  0.000000
2/2/2012	4:36:02 PM	PH3 MFC set to  0.000000
2/2/2012	4:36:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:36:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:36:03 PM	Tube furnace set to 0
2/2/2012	4:36:33 PM	H2 valve closed
2/2/2012	4:36:33 PM	BCl3 valve closed
2/2/2012	4:36:33 PM	PH3 valve closed
2/2/2012	4:36:33 PM	SiCl4 pre valve closed
2/2/2012	4:36:33 PM	SiCl4 post valve closed
2/2/2012	4:36:33 PM	Bypass valve closed
2/2/2012	4:36:33 PM	Bubbler valve closed
2/2/2012	4:36:33 PM	Helium valve opened
2/2/2012	4:36:33 PM	Main Vac valve opened
2/2/2012	4:36:33 PM	Helium MFC set to  20.000000
2/2/2012	4:36:33 PM	H2 MFC set to  0.000000
2/2/2012	4:36:33 PM	BCl3 MFC set to  0.000000
2/2/2012	4:36:33 PM	PH3 MFC set to  0.000000
2/2/2012	4:36:33 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:36:33 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:36:33 PM	Tube furnace set to 0
2/2/2012	4:37:03 PM	Helium valve closed
2/2/2012	4:37:03 PM	H2 valve closed
2/2/2012	4:37:03 PM	BCl3 valve closed
2/2/2012	4:37:03 PM	PH3 valve closed
2/2/2012	4:37:03 PM	SiCl4 pre valve closed
2/2/2012	4:37:03 PM	SiCl4 post valve closed
2/2/2012	4:37:03 PM	Bypass valve closed
2/2/2012	4:37:03 PM	Bubbler valve closed
2/2/2012	4:37:03 PM	Main Vac valve opened
2/2/2012	4:37:03 PM	Helium MFC set to  0.000000
2/2/2012	4:37:03 PM	H2 MFC set to  0.000000
2/2/2012	4:37:03 PM	BCl3 MFC set to  0.000000
2/2/2012	4:37:03 PM	PH3 MFC set to  0.000000
2/2/2012	4:37:03 PM	SiCl4 MFC set to  0.000000
2/2/2012	4:37:03 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	4:37:03 PM	Tube furnace set to 0
2/2/2012	4:37:04 PM	Run finished at 4:37 PM
2/2/2012	4:37:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/2/2012	5:42:10 PM	Main Vac valve closed
2/2/2012	5:43:19 PM	Main Vac valve opened
2/2/2012	5:43:59 PM	Recipe started at 5:43 PM
2/2/2012	5:43:59 PM	Helium valve closed
2/2/2012	5:43:59 PM	H2 valve closed
2/2/2012	5:43:59 PM	BCl3 valve closed
2/2/2012	5:43:59 PM	PH3 valve closed
2/2/2012	5:43:59 PM	SiCl4 pre valve closed
2/2/2012	5:43:59 PM	SiCl4 post valve closed
2/2/2012	5:43:59 PM	Main Vac valve closed
2/2/2012	5:43:59 PM	Bypass valve closed
2/2/2012	5:43:59 PM	Bubbler valve closed
2/2/2012	5:43:59 PM	Helium MFC set to  0.000000
2/2/2012	5:43:59 PM	H2 MFC set to  0.000000
2/2/2012	5:43:59 PM	BCl3 MFC set to  0.000000
2/2/2012	5:43:59 PM	PH3 MFC set to  0.000000
2/2/2012	5:43:59 PM	SiCl4 MFC set to  0.000000
2/2/2012	5:43:59 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	5:43:59 PM	Tube furnace set to 0
2/2/2012	5:44:02 PM	Helium valve closed
2/2/2012	5:44:02 PM	BCl3 valve closed
2/2/2012	5:44:02 PM	PH3 valve closed
2/2/2012	5:44:02 PM	SiCl4 pre valve closed
2/2/2012	5:44:02 PM	SiCl4 post valve closed
2/2/2012	5:44:02 PM	Main Vac valve closed
2/2/2012	5:44:02 PM	Bypass valve closed
2/2/2012	5:44:02 PM	Bubbler valve closed
2/2/2012	5:44:02 PM	H2 valve opened
2/2/2012	5:44:02 PM	Helium MFC set to  0.000000
2/2/2012	5:44:02 PM	H2 MFC set to  500.000000
2/2/2012	5:44:02 PM	BCl3 MFC set to  0.000000
2/2/2012	5:44:02 PM	PH3 MFC set to  0.000000
2/2/2012	5:44:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	5:44:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	5:44:02 PM	Tube furnace set to 0
2/2/2012	5:45:11 PM	Helium valve closed
2/2/2012	5:45:11 PM	BCl3 valve closed
2/2/2012	5:45:11 PM	PH3 valve closed
2/2/2012	5:45:11 PM	SiCl4 pre valve closed
2/2/2012	5:45:11 PM	SiCl4 post valve closed
2/2/2012	5:45:11 PM	Main Vac valve closed
2/2/2012	5:45:11 PM	Bypass valve closed
2/2/2012	5:45:11 PM	H2 valve opened
2/2/2012	5:45:11 PM	Bubbler valve opened
2/2/2012	5:45:11 PM	Helium MFC set to  0.000000
2/2/2012	5:45:11 PM	H2 MFC set to  500.000000
2/2/2012	5:45:11 PM	BCl3 MFC set to  0.000000
2/2/2012	5:45:11 PM	PH3 MFC set to  0.000000
2/2/2012	5:45:11 PM	SiCl4 MFC set to  0.000000
2/2/2012	5:45:11 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	5:45:11 PM	Tube furnace set to 0
2/2/2012	5:45:12 PM	Helium valve closed
2/2/2012	5:45:12 PM	BCl3 valve closed
2/2/2012	5:45:12 PM	PH3 valve closed
2/2/2012	5:45:12 PM	SiCl4 pre valve closed
2/2/2012	5:45:12 PM	SiCl4 post valve closed
2/2/2012	5:45:12 PM	Main Vac valve closed
2/2/2012	5:45:12 PM	Bypass valve closed
2/2/2012	5:45:12 PM	H2 valve opened
2/2/2012	5:45:12 PM	Bubbler valve opened
2/2/2012	5:45:12 PM	Helium MFC set to  0.000000
2/2/2012	5:45:12 PM	H2 MFC set to  500.000000
2/2/2012	5:45:12 PM	BCl3 MFC set to  0.000000
2/2/2012	5:45:12 PM	PH3 MFC set to  0.000000
2/2/2012	5:45:12 PM	SiCl4 MFC set to  0.000000
2/2/2012	5:45:12 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	5:45:12 PM	Tube furnace set to 950
2/2/2012	6:05:12 PM	Helium valve closed
2/2/2012	6:05:12 PM	PH3 valve closed
2/2/2012	6:05:12 PM	Main Vac valve closed
2/2/2012	6:05:12 PM	Bypass valve closed
2/2/2012	6:05:13 PM	H2 valve opened
2/2/2012	6:05:13 PM	BCl3 valve opened
2/2/2012	6:05:13 PM	SiCl4 pre valve opened
2/2/2012	6:05:13 PM	SiCl4 post valve opened
2/2/2012	6:05:13 PM	Bubbler valve opened
2/2/2012	6:05:13 PM	Helium MFC set to  0.000000
2/2/2012	6:05:13 PM	H2 MFC set to  500.000000
2/2/2012	6:05:13 PM	BCl3 MFC set to  1.000000
2/2/2012	6:05:13 PM	PH3 MFC set to  0.000000
2/2/2012	6:05:13 PM	SiCl4 MFC set to  25.000000
2/2/2012	6:05:13 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:05:13 PM	Tube furnace set to 950
2/2/2012	6:25:13 PM	Helium valve closed
2/2/2012	6:25:13 PM	BCl3 valve closed
2/2/2012	6:25:13 PM	PH3 valve closed
2/2/2012	6:25:13 PM	SiCl4 pre valve closed
2/2/2012	6:25:13 PM	SiCl4 post valve closed
2/2/2012	6:25:13 PM	Main Vac valve closed
2/2/2012	6:25:13 PM	Bypass valve closed
2/2/2012	6:25:13 PM	H2 valve opened
2/2/2012	6:25:13 PM	Bubbler valve opened
2/2/2012	6:25:13 PM	Helium MFC set to  0.000000
2/2/2012	6:25:13 PM	H2 MFC set to  500.000000
2/2/2012	6:25:13 PM	BCl3 MFC set to  0.000000
2/2/2012	6:25:13 PM	PH3 MFC set to  0.000000
2/2/2012	6:25:13 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:25:13 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:25:13 PM	Tube furnace set to 750
2/2/2012	6:30:13 PM	H2 valve closed
2/2/2012	6:30:13 PM	BCl3 valve closed
2/2/2012	6:30:13 PM	PH3 valve closed
2/2/2012	6:30:13 PM	SiCl4 pre valve closed
2/2/2012	6:30:13 PM	SiCl4 post valve closed
2/2/2012	6:30:13 PM	Main Vac valve closed
2/2/2012	6:30:13 PM	Bypass valve closed
2/2/2012	6:30:13 PM	Helium valve opened
2/2/2012	6:30:13 PM	Bubbler valve opened
2/2/2012	6:30:13 PM	Helium MFC set to  500.000000
2/2/2012	6:30:13 PM	H2 MFC set to  0.000000
2/2/2012	6:30:13 PM	BCl3 MFC set to  0.000000
2/2/2012	6:30:13 PM	PH3 MFC set to  0.000000
2/2/2012	6:30:13 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:30:13 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:30:13 PM	Tube furnace set to 0
2/2/2012	6:37:57 PM	Run aborted at 6:37 PM
2/2/2012	6:37:57 PM	Helium valve closed
2/2/2012	6:37:57 PM	H2 valve closed
2/2/2012	6:37:57 PM	BCl3 valve closed
2/2/2012	6:37:57 PM	PH3 valve closed
2/2/2012	6:37:57 PM	SiCl4 pre valve closed
2/2/2012	6:37:57 PM	SiCl4 post valve closed
2/2/2012	6:37:57 PM	Bypass valve closed
2/2/2012	6:37:57 PM	Main Vac valve closed
2/2/2012	6:37:57 PM	Bubbler valve closed
2/2/2012	6:37:57 PM	Helium MFC set to  0.000000
2/2/2012	6:37:57 PM	H2 MFC set to  0.000000
2/2/2012	6:37:57 PM	BCl3 MFC set to  0.000000
2/2/2012	6:37:57 PM	PH3 MFC set to  0.000000
2/2/2012	6:37:57 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:37:57 PM	Tube furnace set to 0
2/2/2012	6:38:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	6:38:02 PM	Recipe started at 6:38 PM
2/2/2012	6:38:02 PM	Helium valve closed
2/2/2012	6:38:02 PM	H2 valve closed
2/2/2012	6:38:02 PM	BCl3 valve closed
2/2/2012	6:38:02 PM	PH3 valve closed
2/2/2012	6:38:02 PM	SiCl4 pre valve closed
2/2/2012	6:38:02 PM	SiCl4 post valve closed
2/2/2012	6:38:02 PM	Main Vac valve closed
2/2/2012	6:38:02 PM	Bypass valve closed
2/2/2012	6:38:02 PM	Bubbler valve closed
2/2/2012	6:38:02 PM	Helium MFC set to  0.000000
2/2/2012	6:38:02 PM	H2 MFC set to  0.000000
2/2/2012	6:38:02 PM	BCl3 MFC set to  0.000000
2/2/2012	6:38:02 PM	PH3 MFC set to  0.000000
2/2/2012	6:38:02 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:38:02 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:38:02 PM	Tube furnace set to 0
2/2/2012	6:38:05 PM	H2 valve closed
2/2/2012	6:38:05 PM	BCl3 valve closed
2/2/2012	6:38:05 PM	PH3 valve closed
2/2/2012	6:38:05 PM	SiCl4 pre valve closed
2/2/2012	6:38:05 PM	SiCl4 post valve closed
2/2/2012	6:38:05 PM	Main Vac valve closed
2/2/2012	6:38:05 PM	Bypass valve closed
2/2/2012	6:38:05 PM	Bubbler valve closed
2/2/2012	6:38:05 PM	Helium valve opened
2/2/2012	6:38:05 PM	Helium MFC set to  500.000000
2/2/2012	6:38:05 PM	H2 MFC set to  0.000000
2/2/2012	6:38:05 PM	BCl3 MFC set to  0.000000
2/2/2012	6:38:05 PM	PH3 MFC set to  0.000000
2/2/2012	6:38:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:38:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:38:05 PM	Tube furnace set to 0
2/2/2012	6:38:05 PM	Helium valve closed
2/2/2012	6:38:05 PM	H2 valve closed
2/2/2012	6:38:05 PM	BCl3 valve closed
2/2/2012	6:38:05 PM	PH3 valve closed
2/2/2012	6:38:05 PM	SiCl4 pre valve closed
2/2/2012	6:38:05 PM	SiCl4 post valve closed
2/2/2012	6:38:05 PM	Main Vac valve closed
2/2/2012	6:38:05 PM	Bypass valve closed
2/2/2012	6:38:05 PM	Bubbler valve closed
2/2/2012	6:38:05 PM	Helium MFC set to  0.000000
2/2/2012	6:38:05 PM	H2 MFC set to  0.000000
2/2/2012	6:38:05 PM	BCl3 MFC set to  0.000000
2/2/2012	6:38:05 PM	PH3 MFC set to  0.000000
2/2/2012	6:38:05 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:38:05 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:38:05 PM	Tube furnace set to 0
2/2/2012	6:38:06 PM	Run finished at 6:38 PM
2/2/2012	6:38:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2012	6:41:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2012	6:41:29 PM	Recipe started at 6:41 PM
2/2/2012	6:41:29 PM	Helium valve closed
2/2/2012	6:41:29 PM	H2 valve closed
2/2/2012	6:41:29 PM	BCl3 valve closed
2/2/2012	6:41:29 PM	PH3 valve closed
2/2/2012	6:41:29 PM	SiCl4 pre valve closed
2/2/2012	6:41:29 PM	SiCl4 post valve closed
2/2/2012	6:41:29 PM	Main Vac valve closed
2/2/2012	6:41:29 PM	Bubbler valve closed
2/2/2012	6:41:29 PM	Bypass valve opened
2/2/2012	6:41:29 PM	Helium MFC set to  0.000000
2/2/2012	6:41:29 PM	H2 MFC set to  0.000000
2/2/2012	6:41:29 PM	BCl3 MFC set to  0.000000
2/2/2012	6:41:29 PM	PH3 MFC set to  0.000000
2/2/2012	6:41:29 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:41:29 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:41:29 PM	Tube furnace set to 0
2/2/2012	6:42:26 PM	Helium valve closed
2/2/2012	6:42:26 PM	H2 valve closed
2/2/2012	6:42:26 PM	BCl3 valve closed
2/2/2012	6:42:26 PM	PH3 valve closed
2/2/2012	6:42:26 PM	SiCl4 pre valve closed
2/2/2012	6:42:26 PM	SiCl4 post valve closed
2/2/2012	6:42:26 PM	Main Vac valve closed
2/2/2012	6:42:26 PM	Bubbler valve closed
2/2/2012	6:42:26 PM	Bypass valve opened
2/2/2012	6:42:26 PM	Helium MFC set to  0.000000
2/2/2012	6:42:26 PM	H2 MFC set to  0.000000
2/2/2012	6:42:26 PM	BCl3 MFC set to  0.000000
2/2/2012	6:42:26 PM	PH3 MFC set to  0.000000
2/2/2012	6:42:26 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:42:26 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:42:26 PM	Tube furnace set to 0
2/2/2012	6:43:26 PM	Helium valve closed
2/2/2012	6:43:26 PM	H2 valve closed
2/2/2012	6:43:26 PM	BCl3 valve closed
2/2/2012	6:43:26 PM	PH3 valve closed
2/2/2012	6:43:26 PM	SiCl4 pre valve closed
2/2/2012	6:43:26 PM	SiCl4 post valve closed
2/2/2012	6:43:26 PM	Bypass valve closed
2/2/2012	6:43:26 PM	Bubbler valve closed
2/2/2012	6:43:26 PM	Main Vac valve opened
2/2/2012	6:43:26 PM	Helium MFC set to  0.000000
2/2/2012	6:43:26 PM	H2 MFC set to  0.000000
2/2/2012	6:43:26 PM	BCl3 MFC set to  0.000000
2/2/2012	6:43:26 PM	PH3 MFC set to  0.000000
2/2/2012	6:43:26 PM	SiCl4 MFC set to  0.000000
2/2/2012	6:43:26 PM	Bypass solenoid MFC set to  0.000000
2/2/2012	6:43:26 PM	Tube furnace set to 0
2/2/2012	6:43:27 PM	Run finished at 6:43 PM
2/2/2012	6:43:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
